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Title: Impact of a counter-rotating planetary rotation system on thin-film thickness and uniformity

Journal Article · · Applied Optics
 [1]
  1. Univ. of Rochester, Rochester, NY (United States). Lab. for Laser Energetics

Planetary rotation systems incorporating forward- and counter-rotating planets are used as a means of increasing coating-system capacity for large oblong substrates. Comparisons of planetary motion for the two types of rotating systems are presented based on point tracking for multiple revolutions, as well as comparisons of quantitative thickness and uniformity. Counter-rotation system geometry is shown to result in differences in thin-film thickness relative to standard planetary rotation for precision optical coatings. As a result, this systematic error in thin-film thickness will reduce deposition yields for sensitive coating designs.

Research Organization:
Univ. of Rochester, NY (United States). Lab. for Laser Energetics
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
Grant/Contract Number:
NA0001944
OSTI ID:
1372102
Alternate ID(s):
OSTI ID: 1361946
Journal Information:
Applied Optics, Vol. 56, Issue 18; ISSN 0003-6935
Publisher:
Optical Society of America (OSA)Copyright Statement
Country of Publication:
United States
Language:
English