Impact of a counter-rotating planetary rotation system on thin-film thickness and uniformity

Oliver, J. B.

doi:10.1364/AO.56.005121

Title: Impact of a counter-rotating planetary rotation system on thin-film thickness and uniformity

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Abstract

Planetary rotation systems incorporating forward- and counter-rotating planets are used as a means of increasing coating-system capacity for large oblong substrates. Comparisons of planetary motion for the two types of rotating systems are presented based on point tracking for multiple revolutions, as well as comparisons of quantitative thickness and uniformity. Counter-rotation system geometry is shown to result in differences in thin-film thickness relative to standard planetary rotation for precision optical coatings. As a result, this systematic error in thin-film thickness will reduce deposition yields for sensitive coating designs.

Authors:

Oliver, J. B. ^[1]

Univ. of Rochester, Rochester, NY (United States). Lab. for Laser Energetics

Publication Date:: 2017-06-12

Research Org.:: Univ. of Rochester, NY (United States). Lab. for Laser Energetics

Sponsoring Org.:: USDOE National Nuclear Security Administration (NNSA)

OSTI Identifier:: 1372102

Alternate Identifier(s):: OSTI ID: 1361946

Grant/Contract Number:: NA0001944

Resource Type:: Accepted Manuscript

Journal Name:: Applied Optics

Additional Journal Information:: Journal Volume: 56; Journal Issue: 18; Journal ID: ISSN 0003-6935

Publisher:: Optical Society of America (OSA)

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE; deposition and fabrication; materials and process characterization

Citation Formats


                    Oliver, J. B.. Impact of a counter-rotating planetary rotation system on thin-film thickness and uniformity.  United States: N. p., 2017. 
Web.  doi:10.1364/AO.56.005121.

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                    Oliver, J. B.. Impact of a counter-rotating planetary rotation system on thin-film thickness and uniformity.  United States.  https://doi.org/10.1364/AO.56.005121

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                    Oliver, J. B.. Mon .  
"Impact of a counter-rotating planetary rotation system on thin-film thickness and uniformity".  United States.  https://doi.org/10.1364/AO.56.005121.  https://www.osti.gov/servlets/purl/1372102.

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@article{osti_1372102,

  title        = {Impact of a counter-rotating planetary rotation system on thin-film thickness and uniformity},

  author       = {Oliver, J. B.},

  abstractNote = {Planetary rotation systems incorporating forward- and counter-rotating planets are used as a means of increasing coating-system capacity for large oblong substrates. Comparisons of planetary motion for the two types of rotating systems are presented based on point tracking for multiple revolutions, as well as comparisons of quantitative thickness and uniformity. Counter-rotation system geometry is shown to result in differences in thin-film thickness relative to standard planetary rotation for precision optical coatings. As a result, this systematic error in thin-film thickness will reduce deposition yields for sensitive coating designs.},

  doi          = {10.1364/AO.56.005121},

  journal      = {Applied Optics},

  number       = 18,

  volume       = 56,

  place        = {United States},

  year         = {2017},

  month        = {6}

}

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