Impact of a counter-rotating planetary rotation system on thin-film thickness and uniformity
Abstract
Planetary rotation systems incorporating forward- and counter-rotating planets are used as a means of increasing coating-system capacity for large oblong substrates. Comparisons of planetary motion for the two types of rotating systems are presented based on point tracking for multiple revolutions, as well as comparisons of quantitative thickness and uniformity. Counter-rotation system geometry is shown to result in differences in thin-film thickness relative to standard planetary rotation for precision optical coatings. As a result, this systematic error in thin-film thickness will reduce deposition yields for sensitive coating designs.
- Authors:
-
- Univ. of Rochester, Rochester, NY (United States). Lab. for Laser Energetics
- Publication Date:
- Research Org.:
- Univ. of Rochester, NY (United States). Lab. for Laser Energetics
- Sponsoring Org.:
- USDOE National Nuclear Security Administration (NNSA)
- OSTI Identifier:
- 1372102
- Alternate Identifier(s):
- OSTI ID: 1361946
- Grant/Contract Number:
- NA0001944
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Applied Optics
- Additional Journal Information:
- Journal Volume: 56; Journal Issue: 18; Journal ID: ISSN 0003-6935
- Publisher:
- Optical Society of America (OSA)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; deposition and fabrication; materials and process characterization
Citation Formats
Oliver, J. B.. Impact of a counter-rotating planetary rotation system on thin-film thickness and uniformity. United States: N. p., 2017.
Web. doi:10.1364/AO.56.005121.
Oliver, J. B.. Impact of a counter-rotating planetary rotation system on thin-film thickness and uniformity. United States. https://doi.org/10.1364/AO.56.005121
Oliver, J. B.. Mon .
"Impact of a counter-rotating planetary rotation system on thin-film thickness and uniformity". United States. https://doi.org/10.1364/AO.56.005121. https://www.osti.gov/servlets/purl/1372102.
@article{osti_1372102,
title = {Impact of a counter-rotating planetary rotation system on thin-film thickness and uniformity},
author = {Oliver, J. B.},
abstractNote = {Planetary rotation systems incorporating forward- and counter-rotating planets are used as a means of increasing coating-system capacity for large oblong substrates. Comparisons of planetary motion for the two types of rotating systems are presented based on point tracking for multiple revolutions, as well as comparisons of quantitative thickness and uniformity. Counter-rotation system geometry is shown to result in differences in thin-film thickness relative to standard planetary rotation for precision optical coatings. As a result, this systematic error in thin-film thickness will reduce deposition yields for sensitive coating designs.},
doi = {10.1364/AO.56.005121},
journal = {Applied Optics},
number = 18,
volume = 56,
place = {United States},
year = {2017},
month = {6}
}
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