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Title: Impact of a counter-rotating planetary rotation system on thin-film thickness and uniformity

Planetary rotation systems incorporating forward- and counter-rotating planets are used as a means of increasing coating-system capacity for large oblong substrates. Comparisons of planetary motion for the two types of rotating systems are presented based on point tracking for multiple revolutions, as well as comparisons of quantitative thickness and uniformity. Counter-rotation system geometry is shown to result in differences in thin-film thickness relative to standard planetary rotation for precision optical coatings. As a result, this systematic error in thin-film thickness will reduce deposition yields for sensitive coating designs.
Authors:
 [1]
  1. Univ. of Rochester, Rochester, NY (United States). Lab. for Laser Energetics
Publication Date:
Grant/Contract Number:
NA0001944
Type:
Accepted Manuscript
Journal Name:
Applied Optics
Additional Journal Information:
Journal Volume: 56; Journal Issue: 18; Journal ID: ISSN 0003-6935
Publisher:
Optical Society of America (OSA)
Research Org:
Univ. of Rochester, Rochester, NY (United States). Lab. for Laser Energetics
Sponsoring Org:
USDOE National Nuclear Security Administration (NNSA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; deposition and fabrication; materials and process characterization
OSTI Identifier:
1372102
Alternate Identifier(s):
OSTI ID: 1361946