Impact of non-integer planetary revolutions on the distribution of evaporated optical coatings

Oliver, J. B.

doi:10.1364/AO.56.001460

Title: Impact of non-integer planetary revolutions on the distribution of evaporated optical coatings

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Abstract

Planetary substrate rotation for optical-coating deposition is evaluated based on initial and final positions for a given layer with different numbers of revolutions and various deposition-source locations. The influence of partial revolutions of the rotation system is analyzed relative to the total number of planetary revolutions in that layer to determine the relative impact on film thickness and uniformity. Furthermore, guidance is provided on the necessary planetary revolutions that should take place in each layer versus the expected error level in the layer thickness for the modeled system.

Authors:

Oliver, J. B. ^[1]

Univ. of Rochester, Rochester, NY (United States). Lab. for Laser Energetics

Publication Date:: Wed Feb 08 00:00:00 EST 2017

Research Org.:: Univ. of Rochester, NY (United States). Lab. for Laser Energetics

Sponsoring Org.:: USDOE National Nuclear Security Administration (NNSA)

Contributing Org.:: Laboratory for Laser Energetics, University of Rochester

OSTI Identifier:: 1347440

Alternate Identifier(s):: OSTI ID: 1342619

Report Number(s):: 2016-223; 1321
Journal ID: ISSN 0003-6935; APOPAI; 2016-223; 2276; 1321

Grant/Contract Number:: NA0001944

Resource Type:: Accepted Manuscript

Journal Name:: Applied Optics

Additional Journal Information:: Journal Volume: 56; Journal Issue: 5; Journal ID: ISSN 0003-6935

Publisher:: Optical Society of America (OSA)

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE; deposition and fabrication; materials and process characterization

Citation Formats


                    Oliver, J. B. Impact of non-integer planetary revolutions on the distribution of evaporated optical coatings.  United States: N. p., 2017. 
Web.  doi:10.1364/AO.56.001460.

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                    Oliver, J. B. Impact of non-integer planetary revolutions on the distribution of evaporated optical coatings.  United States.  https://doi.org/10.1364/AO.56.001460

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                    Oliver, J. B. Wed .  
"Impact of non-integer planetary revolutions on the distribution of evaporated optical coatings".  United States.  https://doi.org/10.1364/AO.56.001460.  https://www.osti.gov/servlets/purl/1347440.

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@article{osti_1347440,

  title        = {Impact of non-integer planetary revolutions on the distribution of evaporated optical coatings},

  author       = {Oliver, J. B.},

  abstractNote = {Planetary substrate rotation for optical-coating deposition is evaluated based on initial and final positions for a given layer with different numbers of revolutions and various deposition-source locations. The influence of partial revolutions of the rotation system is analyzed relative to the total number of planetary revolutions in that layer to determine the relative impact on film thickness and uniformity. Furthermore, guidance is provided on the necessary planetary revolutions that should take place in each layer versus the expected error level in the layer thickness for the modeled system.},

  doi          = {10.1364/AO.56.001460},

  journal      = {Applied Optics},

  number       = 5,

  volume       = 56,

  place        = {United States},

  year         = {Wed Feb 08 00:00:00 EST 2017},

  month        = {Wed Feb 08 00:00:00 EST 2017}

}

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