Chemical vapor deposition techniques and related methods for manufacturing microminiature thermionic converters
Abstract
Methods of manufacturing microminiature thermionic converters (MTCs) having high energy-conversion efficiencies and variable operating temperatures using MEMS manufacturing techniques including chemical vapor deposition. The MTCs made using the methods of the invention incorporate cathode to anode spacing of about 1 micron or less and use cathode and anode materials having work functions ranging from about 1 eV to about 3 eV. The MTCs also exhibit maximum efficiencies of just under 30%, and thousands of the devices can be fabricated at modest costs.
- Inventors:
-
- Albuquerque, NM
- Salt Lake City, UT
- Clairton, PA
- Issue Date:
- Research Org.:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- OSTI Identifier:
- 874544
- Patent Number(s):
- 6411007
- Application Number:
- 09/895,372
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
G - PHYSICS G21 - NUCLEAR PHYSICS G21H - OBTAINING ENERGY FROM RADIOACTIVE SOURCES
- DOE Contract Number:
- AC04-96AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- chemical; vapor; deposition; techniques; related; methods; manufacturing; microminiature; thermionic; converters; mtcs; energy-conversion; efficiencies; variable; operating; temperatures; mems; including; incorporate; cathode; anode; spacing; micron; materials; functions; ranging; exhibit; maximum; 30; thousands; devices; fabricated; modest; costs; vapor deposition; chemical vapor; operating temperature; anode material; related method; conversion efficiencies; deposition technique; /310/136/
Citation Formats
King, Donald B, Sadwick, Laurence P, and Wernsman, Bernard R. Chemical vapor deposition techniques and related methods for manufacturing microminiature thermionic converters. United States: N. p., 2002.
Web.
King, Donald B, Sadwick, Laurence P, & Wernsman, Bernard R. Chemical vapor deposition techniques and related methods for manufacturing microminiature thermionic converters. United States.
King, Donald B, Sadwick, Laurence P, and Wernsman, Bernard R. Tue .
"Chemical vapor deposition techniques and related methods for manufacturing microminiature thermionic converters". United States. https://www.osti.gov/servlets/purl/874544.
@article{osti_874544,
title = {Chemical vapor deposition techniques and related methods for manufacturing microminiature thermionic converters},
author = {King, Donald B and Sadwick, Laurence P and Wernsman, Bernard R},
abstractNote = {Methods of manufacturing microminiature thermionic converters (MTCs) having high energy-conversion efficiencies and variable operating temperatures using MEMS manufacturing techniques including chemical vapor deposition. The MTCs made using the methods of the invention incorporate cathode to anode spacing of about 1 micron or less and use cathode and anode materials having work functions ranging from about 1 eV to about 3 eV. The MTCs also exhibit maximum efficiencies of just under 30%, and thousands of the devices can be fabricated at modest costs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jun 25 00:00:00 EDT 2002},
month = {Tue Jun 25 00:00:00 EDT 2002}
}
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Works referenced in this record:
The microminiature thermionic converter
conference, January 2001
- King, Donald B.
- Space technology and applications international forum - 2001, AIP Conference Proceedings