Active mechanical-environmental-thermal MEMS device for nanoscale characterization
Abstract
A microelectromechanical system (MEMS) device can be used for quantitative mechanical testing of materials within a controlled (chemical and temperature) environment, with the ability for electrochemical control to the specimen, that is coupled with a complimentary in-situ characterization technique.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE National Nuclear Security Administration (NNSA)
- OSTI Identifier:
- 1650859
- Patent Number(s):
- 10641733
- Application Number:
- 15/925,118
- Assignee:
- National Technology & Engineering Solutions of Sandia, LLC (Albuquerque, NM)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- DOE Contract Number:
- NA0003525
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 03/19/2018
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; 37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
Citation Formats
Jungjohann, Katherine L., Mook, William, Chisholm, Claire, Shaw, Michael, Hattar, Khalid Mikhiel, Galambos, Paul C., Leenheer, Andrew Jay, and Hearne, Sean J. Active mechanical-environmental-thermal MEMS device for nanoscale characterization. United States: N. p., 2020.
Web.
Jungjohann, Katherine L., Mook, William, Chisholm, Claire, Shaw, Michael, Hattar, Khalid Mikhiel, Galambos, Paul C., Leenheer, Andrew Jay, & Hearne, Sean J. Active mechanical-environmental-thermal MEMS device for nanoscale characterization. United States.
Jungjohann, Katherine L., Mook, William, Chisholm, Claire, Shaw, Michael, Hattar, Khalid Mikhiel, Galambos, Paul C., Leenheer, Andrew Jay, and Hearne, Sean J. Tue .
"Active mechanical-environmental-thermal MEMS device for nanoscale characterization". United States. https://www.osti.gov/servlets/purl/1650859.
@article{osti_1650859,
title = {Active mechanical-environmental-thermal MEMS device for nanoscale characterization},
author = {Jungjohann, Katherine L. and Mook, William and Chisholm, Claire and Shaw, Michael and Hattar, Khalid Mikhiel and Galambos, Paul C. and Leenheer, Andrew Jay and Hearne, Sean J.},
abstractNote = {A microelectromechanical system (MEMS) device can be used for quantitative mechanical testing of materials within a controlled (chemical and temperature) environment, with the ability for electrochemical control to the specimen, that is coupled with a complimentary in-situ characterization technique.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue May 05 00:00:00 EDT 2020},
month = {Tue May 05 00:00:00 EDT 2020}
}
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