Processing of insulators and semiconductors
Abstract
A method is disclosed for processing an insulator material or a semiconductor material. The method includes pulsing a plasma lamp onto the material to diffuse a doping substance into the material, to activate the doping substance in the material or to metallize a large area region of the material. The method may further include pulsing a laser onto a selected region of the material to diffuse a doping substance into the material, to activate the doping substance in the material or to metallize a selected region of the material.
- Inventors:
- Issue Date:
- Research Org.:
- Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1184555
- Patent Number(s):
- 9059079
- Application Number:
- 14/036,925
- Assignee:
- UT-Battelle, LLC (Oak Ridge, TN)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- DOE Contract Number:
- AC05-00OR22725
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 70 PLASMA PHYSICS AND FUSION TECHNOLOGY; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 36 MATERIALS SCIENCE
Citation Formats
Quick, Nathaniel R., Joshi, Pooran C., Duty, Chad Edward, Jellison, Jr., Gerald Earle, and Angelini, Joseph Attilio. Processing of insulators and semiconductors. United States: N. p., 2015.
Web.
Quick, Nathaniel R., Joshi, Pooran C., Duty, Chad Edward, Jellison, Jr., Gerald Earle, & Angelini, Joseph Attilio. Processing of insulators and semiconductors. United States.
Quick, Nathaniel R., Joshi, Pooran C., Duty, Chad Edward, Jellison, Jr., Gerald Earle, and Angelini, Joseph Attilio. Tue .
"Processing of insulators and semiconductors". United States. https://www.osti.gov/servlets/purl/1184555.
@article{osti_1184555,
title = {Processing of insulators and semiconductors},
author = {Quick, Nathaniel R. and Joshi, Pooran C. and Duty, Chad Edward and Jellison, Jr., Gerald Earle and Angelini, Joseph Attilio},
abstractNote = {A method is disclosed for processing an insulator material or a semiconductor material. The method includes pulsing a plasma lamp onto the material to diffuse a doping substance into the material, to activate the doping substance in the material or to metallize a large area region of the material. The method may further include pulsing a laser onto a selected region of the material to diffuse a doping substance into the material, to activate the doping substance in the material or to metallize a selected region of the material.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jun 16 00:00:00 EDT 2015},
month = {Tue Jun 16 00:00:00 EDT 2015}
}
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Works referenced in this record:
Apparatus for forming refractory tubing
patent, March 1976
- Haggerty, John S.
- US Patent Document 3,943,324
Method for forming refractory fibers by laser energy
patent, March 1976
- Haggerty, John S.; Menashi, Wilson P.; Wenckus, Joseph F.
- US Patent Document 3,944,640
Method for forming refractory fibers by laser energy
patent, March 1976
- Haggerty, John S.; Menashi, Wilson P.; Wenckus, Joseph F.
- US Patent Document 3,944,640
Printing plate blank and image sheet by laser transfer
patent, March 1976
- Landsman, Robert M.
- US Patent Document 3,945,318
Method of making optical waveguides from glass fibers
patent, September 1976
- Jaeger, Raymond E.; Miller, Thomas John
- US Patent Document 3,981,705
Patenting process and apparatus combined with a wire
patent, August 1977
- Erodi, Gyorgy; Gorondi, Istvan; Kovacs, Laszlo
- US Patent Document 4,043,170
Method and apparatus for drawing optical fibers
patent, January 1979
- Oehrle, Robert C.
- US Patent Document 4,135,902
Method of mounting a fuel pellet in a laser-excited fusion reactor
patent, February 1979
- Hirsch, Robert L.
- US Patent Document 4,142,088
Method for forming electrically conductive paths
patent, June 1979
- Suh, Nam P.; Ramos, Alonso R.; Chartash, Elliot K.
- US Patent Document 4,159,414
Drawing optical waveguides by heating with laser radiation
patent, July 1980
- Grey, David; Wey, Robert A.
- US Patent Document 4,215,263
Method for manufacturing a semiconductor device
patent, January 1982
- Shibata, Tadashi
- US Patent Document 4,309,224
Method for fabricating adjacent conducting and insulating regions in a film by laser irradiation
patent, July 1982
- Pankove, Jacques I.
- US Patent Document 4,339,285
Process for producing coarse-grain crystalline/mono-crystalline metal and alloy films
patent, February 1983
- Menzel, Guenther
- US Patent Document 4,372,989
Methods of and apparatus for heating a preform from which lightguide fiber is drawn
patent, May 1983
- Iyengar, Rama
- US Patent Document 4,383,843
Laser process for producing electrically conductive surfaces on insulators
patent, January 1985
- Mathias, Eckart
- US Patent Document 4,496,607
Surface coated Sialon-base ceramic materials for tools
patent, September 1985
- Sugisawa, Taijiro; Tanase, Teruyoshi
- US Patent Document 4,539,251
Device for heating an annular surface zone of a threadlike object
patent, October 1985
- Arditty, Herve; Graindorge, Philippe
- US Patent Document 4,547,650
Method of making a semiconductor read only memory
patent, January 1986
- Noguchi, Hideo; Iwamoto, Tugunari; Takei, Sakae
- US Patent Document 4,565,712
Multi-layer ceramic wiring circuit board and process for producing the same
patent, October 1986
- Ushifusa, Nobuyuki; Ogihara, Satoru; Nagayama, Kosei
- US Patent Document 4,620,264
Ceramic composition for multilayer printed wiring board
patent, November 1986
- Kokubu, Yoshinori; Chiba, Jiro
- US Patent Document 4,624,934
Method for generating a conductive region on a surface of a body of dielectric material
patent, May 1987
- Baeuerle, Dieter
- US Patent Document 4,663,826
Direct writing of conductive patterns
patent, September 1987
- Lyons, Alan Michael; Mendenhall, Jr., Frederick T.; Robbins, Murray
- US Patent Document 4,691,091
Method for manufacturing a circuit board
patent, December 1987
- Soszek, Peter
- US Patent Document 4,710,253
Sintered ceramic articles and method for production thereof
patent, August 1988
- Komatsu, Michiyasu; Ikeda, Isao
- US Patent Document 4,761,339
Multilayer printed wiring board and method for producing the same
patent, December 1988
- Shirahata, Isao; Shiga, Shoji; Hori, Hisako
- US Patent Document 4,791,239
Surface structure of AlN substrate and a process for producing the same
patent, June 1989
- Iio, Satoshi; Okuno, Akiyasu
- US Patent Document 4,840,853
Thermal writing on glass and glass-ceramic substrates
patent, July 1989
- Boylan, Elizabeth A.; Fong, Gerald D.
- US Patent Document 4,847,138
Methods for mounting components on convoluted three-dimensional structures
patent, August 1989
- Ainsworth, Roger William; Allen, John L.; Kurtz, Anthony D.
- US Patent Document 4,860,442
Die-less drawing method and apparatus
patent, October 1989
- Borodin, Daniel J.
- US Patent Document 4,872,923
Metalorganic deposition process for preparing superconducting oxide films
patent, November 1989
- Mir, Jose M.; Agostinelli, John A.; Peterson, David L.
- US Patent Document 4,880,770
Manufacturing method of extra fine wire
patent, February 1990
- Koide, Masato; Iwamura, Takuro; Koya, Tsugio
- US Patent Document 4,901,550
Rapid thermal annealing of superconducting oxide precursor films on Si and SiO.sub.2 substrates
patent, March 1990
- Aslam, Mohammad; Logothetis, Eleftherios M.; Soltis, Richard E.
- US Patent Document 4,912,087
Brazing paste for bonding metal and ceramic
patent, May 1990
- Iyogi, Kiyoshi; Nakahashi, Masako; Takeda, Hiromitsu
- US Patent Document 4,924,033
High intensity radiation apparatus and fluid recirculating system therefor
patent, June 1990
- Camm, David Malcolm; Kjorvel, Arne; Housden, Anthony J.
- US Patent Document 4,937,490
Oxidation resistant high temperature thermal cycling resistant coatings on silicon-based substrates and process for the production thereof
patent, August 1990
- Sarin, Vinod K.
- US Patent Document 4,950,558
Production of oxidic superconductors by zone oxidation of a precursor alloy
patent, October 1990
- deBarbadillo, John J.; Smith, Gaylord D.
- US Patent Document 4,962,085
Metal carbide, nitride, or carbonitride whiskers coated with metal carbides, nitrides, carbonitrides, or oxides
patent, January 1991
- D'Angelo, III, Charles; Baldoni, II, Joseph G.; Buljan, Sergej-Tomislav
- US Patent Document 4,988,564
Laser zone melted Bi--Sr--Ca--Cu--O thick films
patent, May 1991
- Levinson, Mark
- US Patent Document 5,015,618
Substrate for an electrical circuit system and a circuit system using that substrate
patent, October 1991
- Sukonnik, Israil M.; Forster, James A.; Breit, Henry F.
- US Patent Document 5,055,967
Apparatus for making A-15 type tape superconductors which includes means to melt a wire at its tip so a beam is formed and means for wiping the bead onto a continuous tape substrate
patent, July 1992
- Savkar, Sudhir D.; Penney, Carl M.
- US Patent Document 5,127,364
Converting ceramic materials to electrical conductors and semiconductors
patent, September 1992
- Quick, Nathaniel R.
- US Patent Document 5,145,741
Melt texturing of long superconductor fibers
patent, September 1992
- Ohkawa, Tihiro; Stephens, Richard B.; Lieber, Albert J.
- US Patent Document 5,149,681
Printed circuit thermocouple arrangements for personnel training and equipment evaluation purposes
patent, January 1993
- Siegel, William J.; Abbagnaro, Louis A.; Kantter, William J.
- US Patent Document 5,180,440
Laser processed coatings on electronic circuit substrates
patent, February 1995
- Quick, Nathaniel R.
- US Patent Document 5,391,841
Gas photonanograph for producing and optically analyzing nanometre scale patterns
patent, April 1995
- Licoppe, Christian; Bensoussan, Marcel
- US Patent Document 5,405,481
Blue light-emitting diode with high external quantum efficiency
patent, May 1995
- Edmond, John Adam; Kong, Hua-Shuang
- US Patent Document 5,416,342
Process for laser processing and apparatus for use in the same
patent, June 1995
- Zhang, Hongyong; Yamazaki, Shunpei; Takemura, Yasuhiko
- US Patent Document 5,424,244
Maskless laser writing of microscopic metallic interconnects
patent, October 1995
- Maya, Leon
- US Patent Document 5,459,098
Diamond-like carbon optical waveguide
patent, May 1997
- Myrick, James J.
- US Patent Document 5,629,532
Inspection apparatus and method for optical system, exposure apparatus provided with the inspection apparatus, and alignment apparatus and optical system thereof applicable to the exposure apparatus
patent, October 1997
- Sugaya, Ayako; Nakagawa, Masahiro; Nagayama, Tadashi
- US Patent Document 5,680,200
Method for inducing electrical conductivity in zirconia ceramic surfaces
patent, December 1997
- Ghosh, Syamal K.; Jarrold, Gregory S.; Chatterjee, Dilip K.
- US Patent Document 5,695,828
Ceramic coatings synthesized by chemical reactions energized by laser plasmas
patent, March 1998
- Wang, Liang
- US Patent Document 5,733,609
Inspection apparatus and method for optical system, exposure apparatus provided with the inspection apparatus, and alignment apparatus and optical system thereof applicable to the exposure apparatus
patent, May 1998
- Sugaya, Ayako; Nakagawa, Masahiro; Nagayama, Tadashi
- US Patent Document 5,754,299
Infrared spectrophotometer accelerated corrosion-erosion analysis system
patent, August 1998
- Quick, Nathaniel R.
- US Patent Document 5,793,042
Apparatus for drawing wire using a heated drawing die and cooling device
patent, October 1998
- Umeda, Katsumi; Umekawa, Kanji; Umeda, Yasushi
- US Patent Document 5,823,039
Method of making a laser synthesized ceramic electronic devices and circuits
patent, November 1998
- Quick, Nathaniel R.
- US Patent Document 5,837,607
Semiconductor photo detector containing crystalline amplification layer
patent, December 1998
- Nakamura, Takeshi; Kyozuka, Shinya; Yamada, Takayuki
- US Patent Document 5,847,418
Zirconia ceramic members with laser induced electrical conductivity in surfaces thereof
patent, March 1999
- Ghosh, Syamal K.; Jarrold, Gregory S.; Chatterjee, Dilip K.
- US Patent Document 5,889,234
Silicon-germanium-carbon compositions in selective etch processes
patent, May 1999
- Robinson, McDonald; Westhoff, Richard; Hunt, Charles E.
- US Patent Document 5,906,708
Wet chemical etchants
patent, October 1999
- Robinson, McDonald; Westhoff, Richard; Hunt, Charles E.
- US Patent Document 5,961,877
Laser synthesized ceramic electronic devices and circuits and method for making
patent, February 2000
- Quick, Nathaniel R.
- US Patent Document 6,025,609
Method for making laser synthesized ceramic electronic devices and circuits
patent, April 2000
- Quick, Nathaniel R.
- US Patent Document 6,054,375
Silicon-germanium-carbon compositions and processes thereof
patent, May 2000
- Robinson, McDonald; Westhoff, Richard; Hunt, Charles E.
- US Patent Document 6,064,081
Rapid infrared heating of a surface
patent, January 2001
- Sikka, Vinod K.; Blue, Craig A.; Ohriner, Evan Keith
- US Patent Document 6,174,388
One-step rapid manufacturing of metal and composite parts
patent, March 2001
- Kar, Aravinda; Sankaranarayanan, Srikanth; Kahlen, Franz-Josef
- US Patent Document 6,203,861
Method for growing beta-silicon carbide nanorods, and preparation of patterned field-emitters by chemical vapor depositon (CVD)
patent, April 2001
- Lee, Shuit-Tong; Lee, Chun-Sing; Wang, Ning
- US Patent Document 6,221,154
Method and apparatus for separating non-metallic substrates utilizing a supplemental mechanical force applicator
patent, June 2001
- Hoekstra, Brian; Pierola, Javier A.; Kar, Aravinda
- US Patent Document 6,252,197
Metal embedded passivation layer structure for microelectronic interconnect formation, customization and repair
patent, July 2001
- Bojarczuk, Nestor A.; Guha, Supratik; Gupta, Arunava
- US Patent Document 6,255,671
Laser synthesized ceramic sensors and method for making
patent, August 2001
- Quick, Nathaniel R.
- US Patent Document 6,271,576
Very long and highly stable atomic wires, method for making these wires, application in nano-electronics
patent, August 2001
- Dujardin, Gérald; Mayne, Andrew; Semond, Fabrice
- US Patent Document 6,274,234
Growth method for silicon nanowires and nanoparticle chains from silicon monoxide
patent, November 2001
- Lee, Shuit-Tong; Wang, Ning; Lee, Chun-Sing
- US Patent Document 6,313,015
Nanostructure-based high energy capacity material
patent, January 2002
- Zhou, Otto Z.; Gao, Bo; Sinha, Saion
- US Patent Document 6,334,939
Nanoscale patterning for the formation of extensive wires
patent, June 2002
- Chen, Yong Hong; Williams, R. Stanley
- US Patent Document 6,407,443
Process for making fine and ultra fine metallic fibers
patent, December 2002
- Quick, Nathaniel R.; Liberman, Michael; Sobolevsky, Alexander
- US Patent Document 6,497,029
One-step rapid manufacturing of metal and composite parts
patent, February 2003
- Kar, Aravinda; Sankaranarayanan, Srikanth; Kahlen, Franz-Josef
- US Patent Document 6,526,327
Non-contact radar system for reconstruction of scenes obscured under snow and similar material
patent, September 2003
- Lasky, Ty A.; Shahrdad, Tabib; Ravani, Bahram
- US Patent Document 6,621,448
Method of high-density foil fabrication
patent, December 2003
- Blue, Craig A.; Sikka, Vinod K.; Ohriner, Evan Keith
- US Patent Document 6,663,826
Laser synthesized wide-bandgap semiconductor electronic devices and circuits
patent, December 2003
- Quick, Nathaniel R.
- US Patent Document 6,670,693
Apparatus and method for drawing continuous fiber
patent, May 2004
- Quick, Nathaniel R.; Kar, Aravinda; Li, Yonggang
- US Patent Document 6,732,562
Nitride semiconductor light-emitting device
patent, May 2005
- Nakamura, Shuji; Nagahama, Shinichi; Iwasa, Naruhito
- US Patent Document 6,900,465
Laser synthesized wide-bandgap semiconductor electronic devices and circuits
patent, August 2005
- Quick, Nathaniel R.
- US Patent Document 6,930,009
Nano-size semiconductor component and method of making
patent, September 2005
- Quick, Nathaniel R.
- US Patent Document 6,939,748
Gallium nitride based III-V group compound semiconductor device and method of producing the same
patent, February 2006
- Nakamura, Shuji; Yamada, Takao; Senoh, Masayuki
- US Patent Document 6,998,690
Method for drawing continuous fiber
patent, March 2006
- Quick, Nathaniel R.; Kar, Aravinda; Li, Yonggang
- US Patent Document 7,013,695
White light emitting device and method of making same
patent, May 2006
- Wu, Tung-Hsing; Horng, Ray-Hua; Wu, Meng-Chai
- US Patent Document 7,045,375
Pulse thermal processing of functional materials using directed plasma arc
patent, May 2007
- Ott, Ronald D.; Blue, Craig A.; Dudney, Nancy J.
- US Patent Document 7,220,936
Method of drawing a composite wire
patent, July 2007
- Quick, Nathaniel R.; Kar, Aravinda; Li, Yonggang
- US Patent Document 7,237,422
Process for fabricating semiconductor component
patent, September 2007
- Quick, Nathaniel R.; Kar, Aravinda; Salama, Islam A.
- US Patent Document 7,268,063
Laser assisted nano deposition
patent, September 2008
- Quick, Nathaniel R.; Kar, Aravinda
- US Patent Document 7,419,887
Method of drawing a ceramic
patent, October 2009
- Quick, Nathaniel R.; Kar, Aravinda; Li, Yonggang
- US Patent Document 7,603,883
Apparatus and method for transformation of substrate
patent, November 2009
- Quick, Nathaniel R.
- US Patent Document 7,618,880
Laser beam shaping for pitchfork profile
patent, December 2009
- Kar, Aravinda; Zhang, Chong; Quick, Nathaniel R.
- US Patent Document 7,630,147
Apparatus and method for increasing thermal conductivity of a substrate
patent, October 2010
- Quick, Nathaniel R.; Kar, Aravinda
- US Patent Document 7,811,914
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patent, March 2011
- Quick, Nathaniel R.
- US Patent Document 7,897,492
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patent, May 2011
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- US Patent Document 7,951,632
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- US Patent Document 8,067,303
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patent, December 2011
- Quick, Nathaniel R.; Kar, Aravinda; Salama, Islam A.
- US Patent Document 8,080,836
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patent, February 2012
- Quick, Nathaniel R.; Kar, Aravinda
- US Patent Document 8,114,693
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patent, March 2013
- Quick, Nathaniel R.; Kar, Aravinda
- US Patent Document 8,393,289
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patent, December 2013
- Quick, Nathaniel R.; Kar, Aravinda
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patent, December 2013
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patent, March 2014
- Quick, Nathaniel R.; Kar, Aravinda
- US Patent Document 8,674,373
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patent, May 2014
- Quick, Nathaniel R.; Kar, Aravinda
- US Patent Document 8,722,451
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patent, July 2014
- Quick, Nathaniel R.; Kar, Aravinda
- US Patent Document 8,772,061
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patent, September 2014
- Quick, Nathaniel R.; Kar, Aravinda
- US Patent Document 8,828,769
Optical device and method of making
patent, December 2014
- Quick, Nathaniel R.; Kar, Aravinda; Salama, Islam A.
- US Patent Document 8,912,549
Laser Direct Write of Conducting and Insulating Tracks in Silicon Carbide
journal, January 2000
- Sengupta, D. K.; Quick, N. R.; Kar, A.
- MRS Proceedings, Vol. 624
Laser conversion of electrical properties for silicon carbide device applications
journal, February 2001
- Sengupta, D. K.; Quick, N. R.; Kar, A.
- Journal of Laser Applications, Vol. 13, Issue 1
Laser doping of silicon carbide substrates
journal, March 2002
- Salama, I. A.; Quick, N. R.; Kar, A.
- Journal of Electronic Materials, Vol. 31, Issue 3
Microstructural and electrical resistance analysis of laser-processed SiC substrates for wide bandgap semiconductor materials
journal, August 2005
- Salama, I. A.; Quick, N. R.; Kar, A.
- Journal of Materials Science, Vol. 40, Issue 15
Laser synthesis of carbon-rich SiC nanoribbons
journal, June 2003
- Salama, I. A.; Quick, N. R.; Kar, A.
- Journal of Applied Physics, Vol. 93, Issue 11
Laser direct writing and doping of diamond-like carbon, polycrystalline diamond, and single crystal silicon carbide
journal, May 2004
- Salama, I. A.; Quick, N. R.; Kar, A.
- Journal of Laser Applications, Vol. 16, Issue 2
Laser Direct Write and Gas Immersion Laser Doping Fabrication of SiC Diodes
journal, January 2004
- Tian, Z.; Quick, N. R.; Kar, A.
- MRS Proceedings, Vol. 815
Effects of different laser sources and doping methods used to dope silicon carbide
journal, May 2005
- Tian, Z.; Salama, I. A.; Quick, N. R.
- Acta Materialia, Vol. 53, Issue 9, p. 2835-2844
Characteristics of 6H-silicon carbide PIN diodes prototyping by laser doping
journal, April 2005
- Tian, Z.; Quick, N. R.; Kar, A.
- Journal of Electronic Materials, Vol. 34, Issue 4
CO2 Laser Drilling of Microvias Using Diffractive Optics Techniques: I — Mathematical Modeling
conference, March 2009
- Zhang, Chong; Bet, Sachin; Salama, Islam A.
- ASME 2005 Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems collocated with the ASME 2005 Heat Transfer Summer Conference, Advances in Electronic Packaging, Parts A, B, and C
Laser-enhanced diffusion of nitrogen and aluminum dopants in silicon carbide
journal, September 2006
- Tian, Z.; Quick, N. R.; Kar, A.
- Acta Materialia, Vol. 54, Issue 16, p. 4273-4283
Laser Direct Write Doping and Metallization Fabrication of Silicon Carbide PIN Diodes
journal, October 2006
- Tian, Z.; Quick, N. R.; Kar, Aravinda
- Materials Science Forum, Vol. 527-529
SiC-based optical interferometry at high pressures and temperatures for pressure and chemical sensing
journal, May 2006
- Dakshinamurthy, Surendramohan; Quick, Nathaniel R.; Kar, Aravinda
- Journal of Applied Physics, Vol. 99, Issue 9
Modelling of microvia drilling with a Nd : YAG laser
journal, August 2006
- Zhang, C.; Salama, I. A.; Quick, N. R.
- Journal of Physics D: Applied Physics, Vol. 39, Issue 17
Laser Endotaxy and PIN Diode Fabrication of Silicon Carbide
journal, January 2006
- Tian, Zhaoxu; Quick, Nathaniel R.; Kar, Aravinda
- MRS Proceedings, Vol. 911
Laser Doping of Chromium and Selenium in p-Type 4H-SiC
journal, September 2008
- Bet, S.; Quick, N. R.; Kar, Aravinda
- Materials Science Forum, Vol. 600-603
Effect of laser field and thermal stress on diffusion in laser doping of SiC
journal, December 2007
- Bet, Sachin; Quick, Nathaniel; Kar, Aravinda
- Acta Materialia, Vol. 55, Issue 20, p. 6816-6824
Laser-doping of silicon carbide for p-n junction and LED fabrication
journal, April 2007
- Bet, Sachin; Quick, Nathaniel; Kar, Aravinda
- physica status solidi (a), Vol. 204, Issue 4
Temperature-dependent optical properties of silicon carbide for wireless temperature sensors
journal, January 2007
- Dakshinamurthy, S.; Quick, N. R.; Kar, A.
- Journal of Physics D: Applied Physics, Vol. 40, Issue 2
Determination of Thermophysical Properties for Polymer Films using Conduction Analysis of Laser Heating
journal, June 2007
- Zhang, Chong; Salama, Islam A.; Quick, Nathaniel R.
- International Journal of Thermophysics, Vol. 28, Issue 3
Laser doping of chromium in 6H-SiC for white light emitting diodes
journal, February 2008
- Bet, Sachin; Quick, Nathaniel; Kar, Aravinda
- Journal of Laser Applications, Vol. 20, Issue 1
Laser endotaxy in silicon carbide and PIN diode fabrication
journal, May 2008
- Tian, Z.; Quick, N. R.; Kar, A.
- Journal of Laser Applications, Vol. 20, Issue 2
Laser direct write doping of wide-bandgap semiconductor materials
conference, January 2004
- Salama, I. A.; Quick, N. R.; Kar, A.
- 2003 International Symposium on Compound Semiconductors: Post-Conference Proceedings (IEEE Cat. No.03TH8767)
Laser microprocessing of wide bandgap materials
conference, March 2003
- Salama, Islam A.; Quick, N. R.; Kar, Aravinda
- LAMP 2002: International Congress on Laser Advanced Materials Processing, SPIE Proceedings
Laser direct write doping of wide-bandgap semiconductor materials
conference, January 2004
- Salama, I. A.; Quick, N. R.; Kar, A.
- 2003 International Symposium on Compound Semiconductors: Post-Conference Proceedings (IEEE Cat. No.03TH8767)
Laser Doping of Chromium and Selenium in p-Type 4H-SiC
journal, September 2008
- Bet, S.; Quick, N. R.; Kar, Aravinda
- Materials Science Forum, Vol. 600-603
Extremely high quantum efficiency of donor-acceptor-pair emission in N-and-B-doped 6H-SiC
journal, May 2006
- Kamiyama, S.; Maeda, T.; Nakamura, Y.
- Journal of Applied Physics, Vol. 99, Issue 9
Effects of different laser sources and doping methods used to dope silicon carbide
journal, May 2005
- Tian, Z.; Salama, I. A.; Quick, N. R.
- Acta Materialia, Vol. 53, Issue 9, p. 2835-2844
Laser-enhanced diffusion of nitrogen and aluminum dopants in silicon carbide
journal, September 2006
- Tian, Z.; Quick, N. R.; Kar, A.
- Acta Materialia, Vol. 54, Issue 16, p. 4273-4283