Correction of localized shape errors on optical surfaces by altering the localized density of surface or near-surface layers
Abstract
Figure errors are corrected on optical or other precision surfaces by changing the local density of material in a zone at or near the surface. Optical surface height is correlated with the localized density of the material within the same region. A change in the height of the optical surface can then be caused by a change in the localized density of the material at or near the surface.
- Inventors:
- Issue Date:
- Research Org.:
- EUV Limited Liability Corporation, Santa Clara, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1175205
- Patent Number(s):
- 6844272
- Application Number:
- 10/086,922
- Assignee:
- EUV Limited Liability Corporation (Santa Clara, CA)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Taylor, John S., Folta, James A., and Montcalm, Claude. Correction of localized shape errors on optical surfaces by altering the localized density of surface or near-surface layers. United States: N. p., 2005.
Web.
Taylor, John S., Folta, James A., & Montcalm, Claude. Correction of localized shape errors on optical surfaces by altering the localized density of surface or near-surface layers. United States.
Taylor, John S., Folta, James A., and Montcalm, Claude. Tue .
"Correction of localized shape errors on optical surfaces by altering the localized density of surface or near-surface layers". United States. https://www.osti.gov/servlets/purl/1175205.
@article{osti_1175205,
title = {Correction of localized shape errors on optical surfaces by altering the localized density of surface or near-surface layers},
author = {Taylor, John S. and Folta, James A. and Montcalm, Claude},
abstractNote = {Figure errors are corrected on optical or other precision surfaces by changing the local density of material in a zone at or near the surface. Optical surface height is correlated with the localized density of the material within the same region. A change in the height of the optical surface can then be caused by a change in the localized density of the material at or near the surface.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jan 18 00:00:00 EST 2005},
month = {Tue Jan 18 00:00:00 EST 2005}
}
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