Boron diffusion in silicon devices
Abstract
Disclosed are various embodiments that include a process, an arrangement, and an apparatus for boron diffusion in a wafer. In one representative embodiment, a process is provided in which a boric oxide solution is applied to a surface of the wafer. Thereafter, the wafer is subjected to a fast heat ramp-up associated with a first heating cycle that results in a release of an amount of boron for diffusion into the wafer.
- Inventors:
-
- Atlanta, GA
- Smyrna, GA
- Stockbridge, GA
- Issue Date:
- Research Org.:
- Georgia Institute of Technology, Atlanta, GA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1014672
- Patent Number(s):
- 7790574
- Application Number:
- US Patent Application 11/301,527
- Assignee:
- Georgia Tech Research Corporation (Atlanta, GA)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- DOE Contract Number:
- FC36-00GO10600
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Rohatgi, Ajeet, Kim, Dong Seop, Nakayashiki, Kenta, and Rounsaville, Brian. Boron diffusion in silicon devices. United States: N. p., 2010.
Web.
Rohatgi, Ajeet, Kim, Dong Seop, Nakayashiki, Kenta, & Rounsaville, Brian. Boron diffusion in silicon devices. United States.
Rohatgi, Ajeet, Kim, Dong Seop, Nakayashiki, Kenta, and Rounsaville, Brian. Tue .
"Boron diffusion in silicon devices". United States. https://www.osti.gov/servlets/purl/1014672.
@article{osti_1014672,
title = {Boron diffusion in silicon devices},
author = {Rohatgi, Ajeet and Kim, Dong Seop and Nakayashiki, Kenta and Rounsaville, Brian},
abstractNote = {Disclosed are various embodiments that include a process, an arrangement, and an apparatus for boron diffusion in a wafer. In one representative embodiment, a process is provided in which a boric oxide solution is applied to a surface of the wafer. Thereafter, the wafer is subjected to a fast heat ramp-up associated with a first heating cycle that results in a release of an amount of boron for diffusion into the wafer.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Sep 07 00:00:00 EDT 2010},
month = {Tue Sep 07 00:00:00 EDT 2010}
}
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