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Title: Chemical vapor deposition techniques and related methods for manufacturing microminiature thermionic converters

Abstract

Methods of manufacturing microminiature thermionic converters (MTCs) having high energy-conversion efficiencies and variable operating temperatures using MEMS manufacturing techniques including chemical vapor deposition. The MTCs made using the methods of the invention incorporate cathode to anode spacing of about 1 micron or less and use cathode and anode materials having work functions ranging from about 1 eV to about 3 eV. The MTCs also exhibit maximum efficiencies of just under 30%, and thousands of the devices can be fabricated at modest costs.

Inventors:
 [1];  [2];  [3]
  1. (Albuquerque, NM)
  2. (Salt Lake City, UT)
  3. (Clairton, PA)
Issue Date:
Research Org.:
SANDIA CORP
OSTI Identifier:
874544
Patent Number(s):
6411007
Application Number:
09/895,372
Assignee:
Sandia Corporation (Albuquerque, NM) SNL
DOE Contract Number:  
AC04-96AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
chemical; vapor; deposition; techniques; related; methods; manufacturing; microminiature; thermionic; converters; mtcs; energy-conversion; efficiencies; variable; operating; temperatures; mems; including; incorporate; cathode; anode; spacing; micron; materials; functions; ranging; exhibit; maximum; 30; thousands; devices; fabricated; modest; costs; vapor deposition; chemical vapor; operating temperature; anode material; related method; conversion efficiencies; deposition technique; /310/136/

Citation Formats

King, Donald B., Sadwick, Laurence P., and Wernsman, Bernard R. Chemical vapor deposition techniques and related methods for manufacturing microminiature thermionic converters. United States: N. p., 2002. Web.
King, Donald B., Sadwick, Laurence P., & Wernsman, Bernard R. Chemical vapor deposition techniques and related methods for manufacturing microminiature thermionic converters. United States.
King, Donald B., Sadwick, Laurence P., and Wernsman, Bernard R. Tue . "Chemical vapor deposition techniques and related methods for manufacturing microminiature thermionic converters". United States. https://www.osti.gov/servlets/purl/874544.
@article{osti_874544,
title = {Chemical vapor deposition techniques and related methods for manufacturing microminiature thermionic converters},
author = {King, Donald B. and Sadwick, Laurence P. and Wernsman, Bernard R.},
abstractNote = {Methods of manufacturing microminiature thermionic converters (MTCs) having high energy-conversion efficiencies and variable operating temperatures using MEMS manufacturing techniques including chemical vapor deposition. The MTCs made using the methods of the invention incorporate cathode to anode spacing of about 1 micron or less and use cathode and anode materials having work functions ranging from about 1 eV to about 3 eV. The MTCs also exhibit maximum efficiencies of just under 30%, and thousands of the devices can be fabricated at modest costs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2002},
month = {6}
}

Patent:

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