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Title: Multi-chamber deposition system

Abstract

A system for the simultaneous deposition of different coatings onto a thin web within a large volume vacuum chamber is disclosed which chamber is provided with a plurality of deposition chambers in which the different layers are deposited onto the film as its moves from a supply roll to a finished take-up roll of coated web. The deposition chambers provided within the large vacuum chamber are provided with separate seals which minimize back diffusion of any dopant gas from adjacent deposition chambers.

Inventors:
 [1];  [2];  [3]
  1. (Roseville, MN)
  2. (Shoreview, MN)
  3. (Cottage Grove, MN)
Issue Date:
OSTI Identifier:
867017
Patent Number(s):
4841908
Application Number:
07/156,548
Assignee:
Minnesota Mining and Manufacturing Company (St. Paul, MN) OSTI
DOE Contract Number:  
ZB-4-03056-2
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
multi-chamber; deposition; simultaneous; coatings; web; volume; vacuum; chamber; disclosed; provided; plurality; chambers; layers; deposited; film; moves; supply; roll; finished; take-up; coated; separate; seals; minimize; diffusion; dopant; gas; adjacent; deposition chambers; deposition chamber; vacuum chamber; volume vacuum; supply roll; multi-chamber deposition; simultaneous deposition; take-up roll; chamber deposition; dopant gas; /118/136/

Citation Formats

Jacobson, Richard L., Jeffrey, Frank R., and Westerberg, Roger K. Multi-chamber deposition system. United States: N. p., 1989. Web.
Jacobson, Richard L., Jeffrey, Frank R., & Westerberg, Roger K. Multi-chamber deposition system. United States.
Jacobson, Richard L., Jeffrey, Frank R., and Westerberg, Roger K. Tue . "Multi-chamber deposition system". United States. https://www.osti.gov/servlets/purl/867017.
@article{osti_867017,
title = {Multi-chamber deposition system},
author = {Jacobson, Richard L. and Jeffrey, Frank R. and Westerberg, Roger K.},
abstractNote = {A system for the simultaneous deposition of different coatings onto a thin web within a large volume vacuum chamber is disclosed which chamber is provided with a plurality of deposition chambers in which the different layers are deposited onto the film as its moves from a supply roll to a finished take-up roll of coated web. The deposition chambers provided within the large vacuum chamber are provided with separate seals which minimize back diffusion of any dopant gas from adjacent deposition chambers.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1989},
month = {6}
}

Patent:

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