Micro-balance sensor integrated with atomic layer deposition chamber

Martinson, Alex B. F.; Libera, Joseph A.; Elam, Jeffrey W.; Riha, Shannon C.

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A - human necessities
A01 - agriculture
A21 - baking
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Title: Micro-balance sensor integrated with atomic layer deposition chamber

Abstract

The invention is directed to QCM measurements in monitoring ALD processes. Previously, significant barriers remain in the ALD processes and accurate execution. To turn this exclusively dedicated in situ technique into a routine characterization method, an integral QCM fixture was developed. This new design is easily implemented on a variety of ALD tools, allows rapid sample exchange, prevents backside deposition, and minimizes both the footprint and flow disturbance. Unlike previous QCM designs, the fast thermal equilibration enables tasks such as temperature-dependent studies and ex situ sample exchange, further highlighting the feasibility of this QCM design for day-to-day use. Finally, the in situ mapping of thin film growth rates across the ALD reactor was demonstrated in a popular commercial tool operating in both continuous and quasi-static ALD modes.

Inventors:: Martinson, Alex B. F.; Libera, Joseph A.; Elam, Jeffrey W.; Riha, Shannon C.

Issue Date:: 2018-01-02

Research Org.:: Argonne National Laboratory (ANL), Argonne, IL (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1415625

Patent Number(s):: 9856563

Application Number:: 13/591,498

Assignee:: UCHICAGO ARGONNE, LLC (Chicago, IL)

Patent Classifications (CPCs):: C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL

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C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C23C16/45525 - {Atomic layer deposition [ALD]}
C23C16/52 - Controlling or regulating the coating process {

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DOE Contract Number:: AC02-06CH11357

Resource Type:: Patent

Resource Relation:: Patent File Date: 2012 Aug 22

Country of Publication:: United States

Language:: English

Subject:: 42 ENGINEERING

Citation Formats


                    Martinson, Alex B. F., Libera, Joseph A., Elam, Jeffrey W., and Riha, Shannon C. Micro-balance sensor integrated with atomic layer deposition chamber.  United States: N. p., 2018. 
        Web.

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                    Martinson, Alex B. F., Libera, Joseph A., Elam, Jeffrey W., & Riha, Shannon C. Micro-balance sensor integrated with atomic layer deposition chamber.  United States.

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                    Martinson, Alex B. F., Libera, Joseph A., Elam, Jeffrey W., and Riha, Shannon C. Tue .  
        "Micro-balance sensor integrated with atomic layer deposition chamber".  United States.  https://www.osti.gov/servlets/purl/1415625.

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@article{osti_1415625,

  title        = {Micro-balance sensor integrated with atomic layer deposition chamber},

  author       = {Martinson, Alex B. F. and Libera, Joseph A. and Elam, Jeffrey W. and Riha, Shannon C.},

  abstractNote = {The invention is directed to QCM measurements in monitoring ALD processes. Previously, significant barriers remain in the ALD processes and accurate execution. To turn this exclusively dedicated in situ technique into a routine characterization method, an integral QCM fixture was developed. This new design is easily implemented on a variety of ALD tools, allows rapid sample exchange, prevents backside deposition, and minimizes both the footprint and flow disturbance. Unlike previous QCM designs, the fast thermal equilibration enables tasks such as temperature-dependent studies and ex situ sample exchange, further highlighting the feasibility of this QCM design for day-to-day use. Finally, the in situ mapping of thin film growth rates across the ALD reactor was demonstrated in a popular commercial tool operating in both continuous and quasi-static ALD modes.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2018},

  month        = {1}

}

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Works referenced in this record:

Quartz oscillator measuring head
patent, December 1982

Schadler, Walter
US Patent Document 4,362,125
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4362125

Method for hydrating a cycloolefin
patent, April 1994

Yamashita, Kunihiko; Obana, Hideaki; Kai, Tadashi
US Patent Document 5,302,762
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5302762

Method to monitor and control chemical treatment of petroleum, petrochemical and processes with on-line quartz crystal microbalance sensors
patent, March 1998

Kraus, Paul R.; McClain, Robert D.; Poindexter, Michael K.
US Patent Document 5,734,098
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5734098

Diagnostic head assembly for plasma chamber
patent, March 1999

Esquibel, James
US Patent Document 5,885,402
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5885402

Wall deposition monitoring system
patent, September 1999

Gogol, Jr., Carl C.; Kendrick, Mark F.
US Patent Document 5,948,983
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5948983

Method for measuring the rate of a fouling reaction induced by heat transfer using a piezoelectric microbalance
patent, June 2001

Kouznetsov, Dmitri L.; DiSanto, Louis; Johnson, Donald A.
US Patent Document 6,250,140
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6250140

Reusable mass-sensor in manufacture of organic light-emitting devices
patent, May 2003

Marcus, Michael A.; Hrycin, Anna L.; Van Slyke, Steven A.
US Patent Document 6,558,735
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6558735

Reducing deposition of process residues on a surface in a chamber
patent, December 2004

Grimbergen, Michael N.; Qian, Xue-Yu
US Patent Document 6,835,275
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6835275

Method and apparatus for measuring electron density of plasma and plasma processing apparatus
patent, September 2009

Matsumoto, Naoki; Yamazawa, Yohei; Koshimizu, Chishio
US Patent Document 7,582,182
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7582182

Synthesis of transparent conducting oxide coatings
patent, May 2010

Elam, Jeffrey W.; Martinson, Alex B.; Pellin, Michael J.
US Patent Document 7,709,056
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7709056

Deposition amount measuring apparatus, depositing apparatus including the same, and method for manufacturing light emitting display
patent, November 2014

Kim, Kyung Soo; Jeong, Seong-ho; Song, Hyun-Keun
US Patent Document 8,889,214
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8889214

High capacity monitor crystal exchanger utilizing an organized 3-D storage structure
patent, November 2015

Gogol, Jr., Carl A.
US Patent Document 9,182,378
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9182378

Hermetic pressure transducer
patent-application, January 2004

Weise, Peter A.
US Patent Application 10/341295; 20040007073
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20040007073

Adjustable height PIF Probe
patent-application, May 2009

Kimball, Christopher; Hudson, Eric; Keil, Douglas
US Patent Application 12/333209; 20090133836
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090133836

Electron Transport in Dye-Sensitized Solar Cells Based on ZnO Nanotubes: Evidence for Highly Efficient Charge Collection and Exceptionally Rapid Dynamics
journal, April 2009

Martinson, Alex B. F.; Góes, Márcio S.; Fabregat-Santiago, Francisco
The Journal of Physical Chemistry A, Vol. 113, Issue 16, p. 4015-4021
https://doi.org/10.1021/jp810406q

Radial Electron Collection in Dye-Sensitized Solar Cells
journal, September 2008

Martinson, Alex B. F.; Elam, Jeffrey W.; Liu, Jun
Nano Letters, Vol. 8, Issue 9, p. 2862-2866
https://doi.org/10.1021/nl8015285

ZnO Nanotube Based Dye-Sensitized Solar Cells
June 2007

Martinson, Alex B. F.; Elam, Jeffrey W.; Hupp, Joseph T.
Nano Letters, Vol. 7, Issue 8, p. 2183-2187
https://doi.org/10.1021/nl070160+

Atomic Layer Deposition of Fe₂O₃ Using Ferrocene and Ozone
journal, February 2011

Martinson, Alex B. F.; DeVries, Michael J.; Libera, Joseph A.
The Journal of Physical Chemistry C, Vol. 115, Issue 10, p. 4333-4339
https://doi.org/10.1021/jp110203x

Compensation of temperature effects in quartz crystal microbalance measurements
journal, January 2002

Rahtu, Antti; Ritala, Mikko
Applied Physics Letters, Vol. 80, Issue 3, p. 521-523
https://doi.org/10.1063/1.1433904

Study of atomic layer epitaxy of zinc oxide by in-situ quartz crystal microgravimetry
journal, January 2000

Yousfi, El Bekkaye; Fouache, Jacques; Lincot, Daniel
Applied Surface Science, Vol. 153, Issue 4, p. 223-234
https://doi.org/10.1016/S0169-4332(99)00330-X

In situ characterization of ALE growth by reagent pulse delay times in a flow-type reactor
journal, January 1994

Aarik, J.; Aidla, A.; Kukli, K.
Applied Surface Science, Vol. 75, Issue 1-4, p. 180-184
https://doi.org/10.1016/0169-4332(94)90157-0

ALD for clean energy conversion, utilization, and storage
journal, November 2011

Elam, Jeffrey W.; Dasgupta, Neil P.; Prinz, Fritz B.
MRS Bulletin, Vol. 36, Issue 11, p. 899-906
https://doi.org/10.1557/mrs.2011.265

GaPO₄ Sensors for Gravimetric Monitoring during Atomic Layer Deposition at High Temperatures
journal, June 2005

Elam, J. W.; Pellin, M. J.
Analytical Chemistry, Vol. 77, Issue 11, p. 3531-3535
https://doi.org/10.1021/ac050349a

Nucleation and Growth of Noble Metals on Oxide Surfaces Using Atomic Layer Deposition
journal, January 2007

Elam, J. W.; Zinovev, A. V. V.; Pellin, Michael J.
ECS Transactions, Vol. 3, Issue 15, p. 271-278
https://doi.org/10.1149/1.2721496

Viscous flow reactor with quartz crystal microbalance for thin film growth by atomic layer deposition
journal, August 2002

Elam, J. W.; Groner, M. D.; George, S. M.
Review of Scientific Instruments, Vol. 73, Issue 8, p. 2981-2987
https://doi.org/10.1063/1.1490410

Atomic Layer Deposition of Ir−Pt Alloy Films
journal, April 2010

Christensen, Steven T.; Elam, Jeffrey W.
Chemistry of Materials, Vol. 22, Issue 8, p. 2517-2525
https://doi.org/10.1021/cm9031978

Low-Temperature Al₂O₃ Atomic Layer Deposition
journal, February 2004

Groner, M. D.; Fabreguette, F. H.; Elam, J. W.
Chemistry of Materials, Vol. 16, Issue 4, p. 639-645
https://doi.org/10.1021/cm0304546

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Similar Records

Title: Micro-balance sensor integrated with atomic layer deposition chamber

Abstract

Citation Formats

Quartz oscillator measuring head patent, December 1982

Method for hydrating a cycloolefin patent, April 1994

Method to monitor and control chemical treatment of petroleum, petrochemical and processes with on-line quartz crystal microbalance sensors patent, March 1998

Diagnostic head assembly for plasma chamber patent, March 1999

Wall deposition monitoring system patent, September 1999

Method for measuring the rate of a fouling reaction induced by heat transfer using a piezoelectric microbalance patent, June 2001

Reusable mass-sensor in manufacture of organic light-emitting devices patent, May 2003

Reducing deposition of process residues on a surface in a chamber patent, December 2004

Method and apparatus for measuring electron density of plasma and plasma processing apparatus patent, September 2009

Synthesis of transparent conducting oxide coatings patent, May 2010

Deposition amount measuring apparatus, depositing apparatus including the same, and method for manufacturing light emitting display patent, November 2014

High capacity monitor crystal exchanger utilizing an organized 3-D storage structure patent, November 2015

Hermetic pressure transducer patent-application, January 2004

Adjustable height PIF Probe patent-application, May 2009

Electron Transport in Dye-Sensitized Solar Cells Based on ZnO Nanotubes: Evidence for Highly Efficient Charge Collection and Exceptionally Rapid Dynamics journal, April 2009

Radial Electron Collection in Dye-Sensitized Solar Cells journal, September 2008

ZnO Nanotube Based Dye-Sensitized Solar Cells June 2007

Atomic Layer Deposition of Fe2O3 Using Ferrocene and Ozone journal, February 2011

Compensation of temperature effects in quartz crystal microbalance measurements journal, January 2002

Study of atomic layer epitaxy of zinc oxide by in-situ quartz crystal microgravimetry journal, January 2000

In situ characterization of ALE growth by reagent pulse delay times in a flow-type reactor journal, January 1994

ALD for clean energy conversion, utilization, and storage journal, November 2011

GaPO4 Sensors for Gravimetric Monitoring during Atomic Layer Deposition at High Temperatures journal, June 2005

Nucleation and Growth of Noble Metals on Oxide Surfaces Using Atomic Layer Deposition journal, January 2007

Viscous flow reactor with quartz crystal microbalance for thin film growth by atomic layer deposition journal, August 2002

Atomic Layer Deposition of Ir−Pt Alloy Films journal, April 2010

Low-Temperature Al2O3 Atomic Layer Deposition journal, February 2004

Quartz oscillator measuring head
patent, December 1982

Method for hydrating a cycloolefin
patent, April 1994

Method to monitor and control chemical treatment of petroleum, petrochemical and processes with on-line quartz crystal microbalance sensors
patent, March 1998

Diagnostic head assembly for plasma chamber
patent, March 1999

Wall deposition monitoring system
patent, September 1999

Method for measuring the rate of a fouling reaction induced by heat transfer using a piezoelectric microbalance
patent, June 2001

Reusable mass-sensor in manufacture of organic light-emitting devices
patent, May 2003

Reducing deposition of process residues on a surface in a chamber
patent, December 2004

Method and apparatus for measuring electron density of plasma and plasma processing apparatus
patent, September 2009

Synthesis of transparent conducting oxide coatings
patent, May 2010

Deposition amount measuring apparatus, depositing apparatus including the same, and method for manufacturing light emitting display
patent, November 2014

High capacity monitor crystal exchanger utilizing an organized 3-D storage structure
patent, November 2015

Hermetic pressure transducer
patent-application, January 2004

Adjustable height PIF Probe
patent-application, May 2009

Electron Transport in Dye-Sensitized Solar Cells Based on ZnO Nanotubes: Evidence for Highly Efficient Charge Collection and Exceptionally Rapid Dynamics
journal, April 2009

Radial Electron Collection in Dye-Sensitized Solar Cells
journal, September 2008

ZnO Nanotube Based Dye-Sensitized Solar Cells
June 2007

Atomic Layer Deposition of Fe₂O₃ Using Ferrocene and Ozone
journal, February 2011

Compensation of temperature effects in quartz crystal microbalance measurements
journal, January 2002

Study of atomic layer epitaxy of zinc oxide by in-situ quartz crystal microgravimetry
journal, January 2000

In situ characterization of ALE growth by reagent pulse delay times in a flow-type reactor
journal, January 1994

ALD for clean energy conversion, utilization, and storage
journal, November 2011

GaPO₄ Sensors for Gravimetric Monitoring during Atomic Layer Deposition at High Temperatures
journal, June 2005

Nucleation and Growth of Noble Metals on Oxide Surfaces Using Atomic Layer Deposition
journal, January 2007

Viscous flow reactor with quartz crystal microbalance for thin film growth by atomic layer deposition
journal, August 2002

Atomic Layer Deposition of Ir−Pt Alloy Films
journal, April 2010

Low-Temperature Al₂O₃ Atomic Layer Deposition
journal, February 2004