Multi-chamber deposition system

Jacobson, Richard L; Jeffrey, Frank R; Westerberg, Roger K

Title: Multi-chamber deposition system

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Abstract

A system for the simultaneous deposition of different coatings onto a thin web within a large volume vacuum chamber is disclosed which chamber is provided with a plurality of deposition chambers in which the different layers are deposited onto the film as its moves from a supply roll to a finished take-up roll of coated web. The deposition chambers provided within the large vacuum chamber are provided with separate seals which minimize back diffusion of any dopant gas from adjacent deposition chambers.

Inventors:

Jacobson, Richard L ^[1]; Jeffrey, Frank R ^[2]; Westerberg, Roger K ^[3]

Roseville, MN
Shoreview, MN
Cottage Grove, MN

Issue Date:: 1989-10-17

OSTI Identifier:: 867139

Patent Number(s):: 4874631

Application Number:: 07/157,238

Assignee:: Minnesota Mining and Manufacturing Company (St. Paul, MN)

Patent Classifications (CPCs):: C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL

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C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C23C16/0245 - {by etching with a plasma}
C23C16/54 - Apparatus specially adapted for continuous coating

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DOE Contract Number:: ZB-4-03056-2

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: multi-chamber; deposition; simultaneous; coatings; web; volume; vacuum; chamber; disclosed; provided; plurality; chambers; layers; deposited; film; moves; supply; roll; finished; take-up; coated; separate; seals; minimize; diffusion; dopant; gas; adjacent; deposition chambers; deposition chamber; vacuum chamber; volume vacuum; supply roll; multi-chamber deposition; simultaneous deposition; take-up roll; chamber deposition; dopant gas; /427/118/136/

Citation Formats


                    Jacobson, Richard L, Jeffrey, Frank R, and Westerberg, Roger K. Multi-chamber deposition system.  United States: N. p., 1989. 
        Web.

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                    Jacobson, Richard L, Jeffrey, Frank R, & Westerberg, Roger K. Multi-chamber deposition system.  United States.

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                    Jacobson, Richard L, Jeffrey, Frank R, and Westerberg, Roger K. Tue .  
        "Multi-chamber deposition system".  United States.  https://www.osti.gov/servlets/purl/867139.

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@article{osti_867139,

  title        = {Multi-chamber deposition system},

  author       = {Jacobson, Richard L and Jeffrey, Frank R and Westerberg, Roger K},

  abstractNote = {A system for the simultaneous deposition of different coatings onto a thin web within a large volume vacuum chamber is disclosed which chamber is provided with a plurality of deposition chambers in which the different layers are deposited onto the film as its moves from a supply roll to a finished take-up roll of coated web. The deposition chambers provided within the large vacuum chamber are provided with separate seals which minimize back diffusion of any dopant gas from adjacent deposition chambers.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {1989},

  month        = {10}

}

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A system for the simultaneous deposition of different coatings onto a thin web within a large volume vacuum chamber is disclosed which chamber is provided with a plurality of deposition chambers in which the different layers are deposited onto the film as its moves from a supply roll to a finished take-up roll of coated web. The deposition chambers provided within the large vacuum chamber are provided with separate seals which minimize back diffusion of any dopant gas from adjacent deposition chambers.
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