Sextupole system for the correction of spherical aberration
Abstract
A means is provided for compensating for spherical aberration in charged particle beam devices. The means includes a sextupole positioned between two focusing lenses.
- Inventors:
-
- Palos Park, IL
- Chicago, IL
- Issue Date:
- Research Org.:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- OSTI Identifier:
- 864063
- Patent Number(s):
- 4303864
- Assignee:
- United States of America as represented by United States (Washington, DC)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- DOE Contract Number:
- EY-76-S-02-2398
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- sextupole; correction; spherical; aberration; means; provided; compensating; charged; particle; beam; devices; positioned; focusing; lenses; focusing lens; particle beam; charged particle; beam devices; spherical aberration; focusing lenses; beam device; /250/313/376/
Citation Formats
Crewe, Albert V, and Kopf, David A. Sextupole system for the correction of spherical aberration. United States: N. p., 1981.
Web.
Crewe, Albert V, & Kopf, David A. Sextupole system for the correction of spherical aberration. United States.
Crewe, Albert V, and Kopf, David A. Thu .
"Sextupole system for the correction of spherical aberration". United States. https://www.osti.gov/servlets/purl/864063.
@article{osti_864063,
title = {Sextupole system for the correction of spherical aberration},
author = {Crewe, Albert V and Kopf, David A},
abstractNote = {A means is provided for compensating for spherical aberration in charged particle beam devices. The means includes a sextupole positioned between two focusing lenses.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Thu Jan 01 00:00:00 EST 1981},
month = {Thu Jan 01 00:00:00 EST 1981}
}
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