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Title: Multiple sextupole system for the correction of third and higher order aberration

Abstract

A means is provided for compensating for third and higher order aberration in charged particle beam devices. The means includes two sextupoles with an intermediate focusing lens, all positioned between two focusing lenses.

Inventors:
 [1]
  1. Palos Park, IL
Issue Date:
Research Org.:
Argonne National Laboratory (ANL), Argonne, IL (United States)
OSTI Identifier:
864589
Patent Number(s):
4389571
Assignee:
United States of America as represented by United States (Washington, DC)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
DOE Contract Number:  
EY-76-S-02-2398
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
multiple; sextupole; correction; third; aberration; means; provided; compensating; charged; particle; beam; devices; sextupoles; intermediate; focusing; lens; positioned; lenses; focusing lens; particle beam; charged particle; beam devices; focusing lenses; beam device; /250/313/

Citation Formats

Crewe, Albert V. Multiple sextupole system for the correction of third and higher order aberration. United States: N. p., 1983. Web.
Crewe, Albert V. Multiple sextupole system for the correction of third and higher order aberration. United States.
Crewe, Albert V. Sat . "Multiple sextupole system for the correction of third and higher order aberration". United States. https://www.osti.gov/servlets/purl/864589.
@article{osti_864589,
title = {Multiple sextupole system for the correction of third and higher order aberration},
author = {Crewe, Albert V},
abstractNote = {A means is provided for compensating for third and higher order aberration in charged particle beam devices. The means includes two sextupoles with an intermediate focusing lens, all positioned between two focusing lenses.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1983},
month = {1}
}