Multiple sextupole system for the correction of third and higher order aberration
Abstract
A means is provided for compensating for third and higher order aberration in charged particle beam devices. The means includes two sextupoles with an intermediate focusing lens, all positioned between two focusing lenses.
- Inventors:
-
- Palos Park, IL
- Issue Date:
- Research Org.:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- OSTI Identifier:
- 864589
- Patent Number(s):
- 4389571
- Assignee:
- United States of America as represented by United States (Washington, DC)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- DOE Contract Number:
- EY-76-S-02-2398
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- multiple; sextupole; correction; third; aberration; means; provided; compensating; charged; particle; beam; devices; sextupoles; intermediate; focusing; lens; positioned; lenses; focusing lens; particle beam; charged particle; beam devices; focusing lenses; beam device; /250/313/
Citation Formats
Crewe, Albert V. Multiple sextupole system for the correction of third and higher order aberration. United States: N. p., 1983.
Web.
Crewe, Albert V. Multiple sextupole system for the correction of third and higher order aberration. United States.
Crewe, Albert V. Sat .
"Multiple sextupole system for the correction of third and higher order aberration". United States. https://www.osti.gov/servlets/purl/864589.
@article{osti_864589,
title = {Multiple sextupole system for the correction of third and higher order aberration},
author = {Crewe, Albert V},
abstractNote = {A means is provided for compensating for third and higher order aberration in charged particle beam devices. The means includes two sextupoles with an intermediate focusing lens, all positioned between two focusing lenses.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1983},
month = {1}
}