Device and method for creating Gaussian aberration-corrected electron beams
Patent
·
OSTI ID:1236003
Electron beam phase gratings have phase profiles that produce a diffracted beam having a Gaussian or other selected intensity profile. Phase profiles can also be selected to correct or compensate electron lens aberrations. Typically, a low diffraction order produces a suitable phase profile, and other orders are discarded.
- Research Organization:
- Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC02-05CH11231
- Assignee:
- University of Oregon
- Patent Number(s):
- 9,240,255
- Application Number:
- 14/199,947
- OSTI ID:
- 1236003
- Resource Relation:
- Patent File Date: 2014 Mar 06
- Country of Publication:
- United States
- Language:
- English
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