skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Aberration corrected STEM by means of diffraction gratings

Abstract

In the past 15 years, the advent of aberration correction technology in electron microscopy has enabled materials analysis on the atomic scale. This is made possible by precise arrangements of multipole electrodes and magnetic solenoids to compensate the aberrations inherent to any focusing element of an electron microscope. In this paper, we describe an alternative method to correct for the spherical aberration of the objective lens in scanning transmission electron microscopy (STEM) using a passive, nanofabricated diffractive optical element. This holographic device is installed in the probe forming aperture of a conventional electron microscope and can be designed to remove arbitrarily complex aberrations from the electron's wave front. In this work, we show a proof-of-principle experiment that demonstrates successful correction of the spherical aberration in STEM by means of such a grating corrector (GCOR). Our GCOR enables us to record aberration-corrected high-resolution high-angle annular dark field (HAADF-) STEM images, although yet without advancement in probe current and resolution. Finally, improvements in this technology could provide an economical solution for aberration-corrected high-resolution STEM in certain use scenarios.

Authors:
 [1];  [2];  [3];  [3]
  1. Corrected Electron Optical Systems GmbH, Heidelberg (Germany)
  2. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). National Center for Electron Microscopy. Molecular Foundry
  3. Univ. of Oregon, Eugene, OR (United States). Dept. of Physics
Publication Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States); Univ. of Oregon, Eugene, OR (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
OSTI Identifier:
1435092
Grant/Contract Number:  
AC02-05CH11231; SC0010466
Resource Type:
Journal Article: Accepted Manuscript
Journal Name:
Ultramicroscopy
Additional Journal Information:
Journal Volume: 182; Journal ID: ISSN 0304-3991
Publisher:
Elsevier
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION; diffraction gratings; aberration correction; Cs-corrector; high-resolution STEM; Ronchigram

Citation Formats

Linck, Martin, Ercius, Peter A., Pierce, Jordan S., and McMorran, Benjamin J. Aberration corrected STEM by means of diffraction gratings. United States: N. p., 2017. Web. doi:10.1016/j.ultramic.2017.06.008.
Linck, Martin, Ercius, Peter A., Pierce, Jordan S., & McMorran, Benjamin J. Aberration corrected STEM by means of diffraction gratings. United States. doi:10.1016/j.ultramic.2017.06.008.
Linck, Martin, Ercius, Peter A., Pierce, Jordan S., and McMorran, Benjamin J. Mon . "Aberration corrected STEM by means of diffraction gratings". United States. doi:10.1016/j.ultramic.2017.06.008. https://www.osti.gov/servlets/purl/1435092.
@article{osti_1435092,
title = {Aberration corrected STEM by means of diffraction gratings},
author = {Linck, Martin and Ercius, Peter A. and Pierce, Jordan S. and McMorran, Benjamin J.},
abstractNote = {In the past 15 years, the advent of aberration correction technology in electron microscopy has enabled materials analysis on the atomic scale. This is made possible by precise arrangements of multipole electrodes and magnetic solenoids to compensate the aberrations inherent to any focusing element of an electron microscope. In this paper, we describe an alternative method to correct for the spherical aberration of the objective lens in scanning transmission electron microscopy (STEM) using a passive, nanofabricated diffractive optical element. This holographic device is installed in the probe forming aperture of a conventional electron microscope and can be designed to remove arbitrarily complex aberrations from the electron's wave front. In this work, we show a proof-of-principle experiment that demonstrates successful correction of the spherical aberration in STEM by means of such a grating corrector (GCOR). Our GCOR enables us to record aberration-corrected high-resolution high-angle annular dark field (HAADF-) STEM images, although yet without advancement in probe current and resolution. Finally, improvements in this technology could provide an economical solution for aberration-corrected high-resolution STEM in certain use scenarios.},
doi = {10.1016/j.ultramic.2017.06.008},
journal = {Ultramicroscopy},
number = ,
volume = 182,
place = {United States},
year = {Mon Jun 12 00:00:00 EDT 2017},
month = {Mon Jun 12 00:00:00 EDT 2017}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record

Citation Metrics:
Cited by: 1 work
Citation information provided by
Web of Science

Save / Share: