Lubricated mechanical polishing
Abstract
A lubricated mechanical polishing (LMP) process is provided that uses hard nanoparticles of less than 5 nm diameter dispersed in a fluid lubricant as a polishing slurry to produce an ultra-smooth surface on a hard metallic or non-metallic substrate with a sub-nanometer surface roughness substantially less than that produced by silica chemical mechanical polishing.
- Inventors:
- Issue Date:
- Research Org.:
- Ames Laboratory (AMES), Ames, IA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1600143
- Patent Number(s):
- 10442055
- Application Number:
- 15/530,575
- Assignee:
- Iowa State University Research Foundation, Inc. (Ames, IA)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B24 - GRINDING B24B - MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
C - CHEMISTRY C09 - DYES C09K - MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- DOE Contract Number:
- AC02-07CH11358
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 01/31/2017
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Cademartiri, Ludovico, and Montoya, Briane Caroline. Lubricated mechanical polishing. United States: N. p., 2019.
Web.
Cademartiri, Ludovico, & Montoya, Briane Caroline. Lubricated mechanical polishing. United States.
Cademartiri, Ludovico, and Montoya, Briane Caroline. Tue .
"Lubricated mechanical polishing". United States. https://www.osti.gov/servlets/purl/1600143.
@article{osti_1600143,
title = {Lubricated mechanical polishing},
author = {Cademartiri, Ludovico and Montoya, Briane Caroline},
abstractNote = {A lubricated mechanical polishing (LMP) process is provided that uses hard nanoparticles of less than 5 nm diameter dispersed in a fluid lubricant as a polishing slurry to produce an ultra-smooth surface on a hard metallic or non-metallic substrate with a sub-nanometer surface roughness substantially less than that produced by silica chemical mechanical polishing.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2019},
month = {10}
}
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