Apparatus and method for deterministic control of surface figure during full aperture pad polishing

Title: Apparatus and method for deterministic control of surface figure during full aperture pad polishing

A polishing system configured to polish a lap includes a lap configured to contact a workpiece for polishing the workpiece; and a septum configured to contact the lap. The septum has an aperture formed therein. The radius of the aperture and radius the workpiece are substantially the same. The aperture and the workpiece have centers disposed at substantially the same radial distance from a center of the lap. The aperture is disposed along a first radial direction from the center of the lap, and the workpiece is disposed along a second radial direction from the center of the lap. The first and second radial directions may be opposite directions.

Inventors:: Suratwala, Tayyab Ishaq; Feit, Michael Douglas; Steele, William Augustus

Issue Date:: 2017-10-10

OSTI Identifier:: 1398989

Assignee:: Lawrence Livermore National Security, LLC LLNL

Patent Number(s):: 9,782,871

Application Number:: 14/055,780

Contract Number:: AC52-07N27344

Resource Relation:: Patent File Date: 2013 Oct 16

Research Org:: Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)

Sponsoring Org:: USDOE

Country of Publication:: United States

Language:: English

Subject:: 42 ENGINEERING

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