Title: Apparatus and method for deterministic control of surface figure during full aperture pad polishing

Abstract

A polishing system configured to polish a lap includes a lap configured to contact a workpiece for polishing the workpiece; and a septum configured to contact the lap. The septum has an aperture formed therein. The radius of the aperture and radius the workpiece are substantially the same. The aperture and the workpiece have centers disposed at substantially the same radial distance from a center of the lap. The aperture is disposed along a first radial direction from the center of the lap, and the workpiece is disposed along a second radial direction from the center of the lap. The first and second radial directions may be opposite directions.

Inventors:

Suratwala, Tayyab Ishaq; Feit, Michael Douglas; Steele, William Augustus

Issue Date:

2017-10-10

Research Org.:

Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)

Sponsoring Org.:

USDOE

OSTI Identifier:

1398989

Patent Number(s):

9782871

Application Number:

14/055,780

Assignee:

Lawrence Livermore National Security, LLC

Patent Classifications (CPCs):

B - PERFORMING OPERATIONS B24 - GRINDING B24B - MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING

Show more

B - PERFORMING OPERATIONS B24 - GRINDING B24B - MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING

B24B37/32 - Retaining rings
B24B37/10 - for single side lapping
B24B13/00 - Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work
B24B37/04 - designed for working plane surfaces
B24B37/042 - {operating processes therefor}
B24B53/017 - Devices or means for dressing, cleaning or otherwise conditioning lapping tools
B24B53/12 - Dressing tools
B24B37/105 - {the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement}

Show less

DOE Contract Number:  

AC52-07N27344

Resource Type:

Patent

Resource Relation:

Patent File Date: 2013 Oct 16

Country of Publication:

United States

Language:

English

Subject:

42 ENGINEERING