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Title: Transparent nanocrystalline diamond coatings and devices

Abstract

A method for coating a substrate comprises producing a plasma ball using a microwave plasma source in the presence of a mixture of gases. The plasma ball has a diameter. The plasma ball is disposed at a first distance from the substrate and the substrate is maintained at a first temperature. The plasma ball is maintained at the first distance from the substrate, and a diamond coating is deposited on the substrate. The diamond coating has a thickness. Furthermore, the diamond coating has an optical transparency of greater than about 80%. The diamond coating can include nanocrystalline diamond. The microwave plasma source can have a frequency of about 915 MHz.

Inventors:
;
Issue Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1576352
Patent Number(s):
10,410,860
Application Number:
15/676,895
Assignee:
UChicago Argonne, LLC (Chicago, IL)
DOE Contract Number:  
AC02-06CH11357; W-31-109-ENG-38
Resource Type:
Patent
Resource Relation:
Patent File Date: 2017 Aug 14
Country of Publication:
United States
Language:
English

Citation Formats

Sumant, Anirudha V., and Khan, Adam. Transparent nanocrystalline diamond coatings and devices. United States: N. p., 2019. Web.
Sumant, Anirudha V., & Khan, Adam. Transparent nanocrystalline diamond coatings and devices. United States.
Sumant, Anirudha V., and Khan, Adam. Tue . "Transparent nanocrystalline diamond coatings and devices". United States. https://www.osti.gov/servlets/purl/1576352.
@article{osti_1576352,
title = {Transparent nanocrystalline diamond coatings and devices},
author = {Sumant, Anirudha V. and Khan, Adam},
abstractNote = {A method for coating a substrate comprises producing a plasma ball using a microwave plasma source in the presence of a mixture of gases. The plasma ball has a diameter. The plasma ball is disposed at a first distance from the substrate and the substrate is maintained at a first temperature. The plasma ball is maintained at the first distance from the substrate, and a diamond coating is deposited on the substrate. The diamond coating has a thickness. Furthermore, the diamond coating has an optical transparency of greater than about 80%. The diamond coating can include nanocrystalline diamond. The microwave plasma source can have a frequency of about 915 MHz.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2019},
month = {9}
}

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Works referenced in this record:

Single crystal diamond prepared by CVD
patent-application, November 2004