Title: Transparent nanocrystalline diamond coatings and devices

Abstract

A method for coating a substrate comprises producing a plasma ball using a microwave plasma source in the presence of a mixture of gases. The plasma ball has a diameter. The plasma ball is disposed at a first distance from the substrate and the substrate is maintained at a first temperature. The plasma ball is maintained at the first distance from the substrate, and a diamond coating is deposited on the substrate. The diamond coating has a thickness. Furthermore, the diamond coating has an optical transparency of greater than about 80%. The diamond coating can include nanocrystalline diamond. The microwave plasma source can have a frequency of about 915 MHz.

Inventors:

Sumant, Anirudha V.; Khan, Adam

Issue Date:

Tue Sep 10 00:00:00 EDT 2019

Research Org.:

Argonne National Laboratory (ANL), Argonne, IL (United States)

Sponsoring Org.:

USDOE

OSTI Identifier:

1576352

Patent Number(s):

10410860

Application Number:

15/676,895

Assignee:

UChicago Argonne, LLC (Chicago, IL)

Patent Classifications (CPCs):

C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

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C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL

C23C16/274 - {using microwave discharges}
C23C16/511 - using microwave discharges
C23C16/56 - After-treatment

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

H01L21/02527 - {Carbon, e.g. diamond-like carbon}
H01L21/02576 - {N-type}
H01L21/02579 - {P-type}
H01L21/0262 - {Reduction or decomposition of gaseous compounds, e.g. CVD}
H01L23/3732 - {Diamonds}
H01L29/04 - characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes
H01L29/1602 - {Diamond}
H01L29/861 - Diodes

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DOE Contract Number:  

AC02-06CH11357; W-31-109-ENG-38

Resource Type:

Patent

Resource Relation:

Patent File Date: 2017 Aug 14

Country of Publication:

United States

Language:

English