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Title: Optically transparent, scratch-resistant, diamond-like carbon coatings

Abstract

A plasma-based method for the deposition of diamond-like carbon (DLC) coatings is described. The process uses a radio-frequency inductively coupled discharge to generate a plasma at relatively low gas pressures. The deposition process is environmentally friendly and scaleable to large areas, and components that have geometrically complicated surfaces can be processed. The method has been used to deposit adherent 100-400 nm thick DLC coatings on metals, glass, and polymers. These coatings are between three and four times harder than steel and are therefore scratch resistant, and transparent to visible light. Boron and silicon doping of the DLC coatings have produced coatings having improved optical properties and lower coating stress levels, but with slightly lower hardness.

Inventors:
; ; ; ;
Issue Date:
Research Org.:
The Regents of the University of California, Los Alamos, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1174350
Patent Number(s):
6572935
Application Number:
09/428,269
Assignee:
The Regents of the University of California (Los Alamos, NM)
Patent Classifications (CPCs):
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
DOE Contract Number:  
W-7405-ENG-36
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

He, Xiao-Ming, Lee, Deok-Hyung, Nastasi, Michael A., Walter, Kevin C., and Tuszewski, Michel G. Optically transparent, scratch-resistant, diamond-like carbon coatings. United States: N. p., 2003. Web.
He, Xiao-Ming, Lee, Deok-Hyung, Nastasi, Michael A., Walter, Kevin C., & Tuszewski, Michel G. Optically transparent, scratch-resistant, diamond-like carbon coatings. United States.
He, Xiao-Ming, Lee, Deok-Hyung, Nastasi, Michael A., Walter, Kevin C., and Tuszewski, Michel G. Tue . "Optically transparent, scratch-resistant, diamond-like carbon coatings". United States. https://www.osti.gov/servlets/purl/1174350.
@article{osti_1174350,
title = {Optically transparent, scratch-resistant, diamond-like carbon coatings},
author = {He, Xiao-Ming and Lee, Deok-Hyung and Nastasi, Michael A. and Walter, Kevin C. and Tuszewski, Michel G.},
abstractNote = {A plasma-based method for the deposition of diamond-like carbon (DLC) coatings is described. The process uses a radio-frequency inductively coupled discharge to generate a plasma at relatively low gas pressures. The deposition process is environmentally friendly and scaleable to large areas, and components that have geometrically complicated surfaces can be processed. The method has been used to deposit adherent 100-400 nm thick DLC coatings on metals, glass, and polymers. These coatings are between three and four times harder than steel and are therefore scratch resistant, and transparent to visible light. Boron and silicon doping of the DLC coatings have produced coatings having improved optical properties and lower coating stress levels, but with slightly lower hardness.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2003},
month = {6}
}

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Works referenced in this record:

Stress and plastic flow in silicon during amorphization by ion bombardment
journal, October 1991


Preparation Techniques for Diamond-Like Carbon
book, January 1991