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Title: Transparent nanocrystalline diamond coatings and devices

Abstract

A method for coating a substrate comprises producing a plasma ball using a microwave plasma source in the presence of a mixture of gases. The plasma ball has a diameter. The plasma ball is disposed at a first distance from the substrate and the substrate is maintained at a first temperature. The plasma ball is maintained at the first distance from the substrate, and a diamond coating is deposited on the substrate. The diamond coating has a thickness. Furthermore, the diamond coating has an optical transparency of greater than about 80%. The diamond coating can include nanocrystalline diamond. The microwave plasma source can have a frequency of about 915 MHz.

Inventors:
;
Issue Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1375938
Patent Number(s):
9741561
Application Number:
14/796,527
Assignee:
UCHICAGO ARGONNE, LLC
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
DOE Contract Number:  
AC02-06CH11357
Resource Type:
Patent
Resource Relation:
Patent File Date: 2015 Jul 10
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 70 PLASMA PHYSICS AND FUSION TECHNOLOGY

Citation Formats

Sumant, Anirudha V., and Khan, Adam. Transparent nanocrystalline diamond coatings and devices. United States: N. p., 2017. Web.
Sumant, Anirudha V., & Khan, Adam. Transparent nanocrystalline diamond coatings and devices. United States.
Sumant, Anirudha V., and Khan, Adam. Tue . "Transparent nanocrystalline diamond coatings and devices". United States. https://www.osti.gov/servlets/purl/1375938.
@article{osti_1375938,
title = {Transparent nanocrystalline diamond coatings and devices},
author = {Sumant, Anirudha V. and Khan, Adam},
abstractNote = {A method for coating a substrate comprises producing a plasma ball using a microwave plasma source in the presence of a mixture of gases. The plasma ball has a diameter. The plasma ball is disposed at a first distance from the substrate and the substrate is maintained at a first temperature. The plasma ball is maintained at the first distance from the substrate, and a diamond coating is deposited on the substrate. The diamond coating has a thickness. Furthermore, the diamond coating has an optical transparency of greater than about 80%. The diamond coating can include nanocrystalline diamond. The microwave plasma source can have a frequency of about 915 MHz.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2017},
month = {8}
}

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Works referenced in this record:

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