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Title: Transparent nanocrystalline diamond coatings and devices

A method for coating a substrate comprises producing a plasma ball using a microwave plasma source in the presence of a mixture of gases. The plasma ball has a diameter. The plasma ball is disposed at a first distance from the substrate and the substrate is maintained at a first temperature. The plasma ball is maintained at the first distance from the substrate, and a diamond coating is deposited on the substrate. The diamond coating has a thickness. Furthermore, the diamond coating has an optical transparency of greater than about 80%. The diamond coating can include nanocrystalline diamond. The microwave plasma source can have a frequency of about 915 MHz.
Inventors:
;
Issue Date:
OSTI Identifier:
1375938
Assignee:
UCHICAGO ARGONNE, LLC ANL
Patent Number(s):
9,741,561
Application Number:
14/796,527
Contract Number:
AC02-06CH11357
Resource Relation:
Patent File Date: 2015 Jul 10
Research Org:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 70 PLASMA PHYSICS AND FUSION TECHNOLOGY

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