Patterning of nanocrystalline diamond films for diamond microstructures useful in MEMS and other devices
Abstract
MEMS structure and a method of fabricating them from ultrananocrystalline diamond films having average grain sizes of less than about 10 nm and feature resolution of less than about one micron . The MEMS structures are made by contacting carbon dimer species with an oxide substrate forming a carbide layer on the surface onto which ultrananocrystalline diamond having average grain sizes of less than about 10 nm is deposited. Thereafter, microfabrication process are used to form a structure of predetermined shape having a feature resolution of less than about one micron.
- Inventors:
-
- Downers Grove, IL
- Bremen, DE
- Bolingbrook, IL
- late of Naperville, IL
- Naperville, IL
- Issue Date:
- Research Org.:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 912844
- Patent Number(s):
- 6811612
- Application Number:
- 10/169,879
- Assignee:
- The University of Chicago (Chicago, IL)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81B - MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH
- DOE Contract Number:
- W-31109-ENG-38
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Gruen, Dieter M, Busmann, Hans-Gerd, Meyer, Eva-Maria, Auciello, Orlando, Krauss, Alan R, and Krauss, Julie R. Patterning of nanocrystalline diamond films for diamond microstructures useful in MEMS and other devices. United States: N. p., 2004.
Web.
Gruen, Dieter M, Busmann, Hans-Gerd, Meyer, Eva-Maria, Auciello, Orlando, Krauss, Alan R, & Krauss, Julie R. Patterning of nanocrystalline diamond films for diamond microstructures useful in MEMS and other devices. United States.
Gruen, Dieter M, Busmann, Hans-Gerd, Meyer, Eva-Maria, Auciello, Orlando, Krauss, Alan R, and Krauss, Julie R. Tue .
"Patterning of nanocrystalline diamond films for diamond microstructures useful in MEMS and other devices". United States. https://www.osti.gov/servlets/purl/912844.
@article{osti_912844,
title = {Patterning of nanocrystalline diamond films for diamond microstructures useful in MEMS and other devices},
author = {Gruen, Dieter M and Busmann, Hans-Gerd and Meyer, Eva-Maria and Auciello, Orlando and Krauss, Alan R and Krauss, Julie R},
abstractNote = {MEMS structure and a method of fabricating them from ultrananocrystalline diamond films having average grain sizes of less than about 10 nm and feature resolution of less than about one micron . The MEMS structures are made by contacting carbon dimer species with an oxide substrate forming a carbide layer on the surface onto which ultrananocrystalline diamond having average grain sizes of less than about 10 nm is deposited. Thereafter, microfabrication process are used to form a structure of predetermined shape having a feature resolution of less than about one micron.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2004},
month = {11}
}
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