Transparent nanocrystalline diamond coatings and devices

Sumant, Anirudha V.; Khan, Adam

Title: Transparent nanocrystalline diamond coatings and devices

Patent · Tue Aug 22 00:00:00 EDT 2017

OSTI ID:1375938

Sumant, Anirudha V.; Khan, Adam

A method for coating a substrate comprises producing a plasma ball using a microwave plasma source in the presence of a mixture of gases. The plasma ball has a diameter. The plasma ball is disposed at a first distance from the substrate and the substrate is maintained at a first temperature. The plasma ball is maintained at the first distance from the substrate, and a diamond coating is deposited on the substrate. The diamond coating has a thickness. Furthermore, the diamond coating has an optical transparency of greater than about 80%. The diamond coating can include nanocrystalline diamond. The microwave plasma source can have a frequency of about 915 MHz.

View Patent

Cite

Export

Save

Research Organization:: Argonne National Laboratory (ANL), Argonne, IL (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: AC02-06CH11357

Assignee:: UCHICAGO ARGONNE, LLC

Patent Number(s):: 9,741,561

Application Number:: 14/796,527

OSTI ID:: 1375938

Resource Relation:: Patent File Date: 2015 Jul 10

Country of Publication:: United States

Language:: English

References (43)

Method of manufacturing diamond thermistors Yamazaki, Shunpei https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5183530 US Patent Document 5,183,530	patent	February 1993
Passivation/patterning of PZR diamond films for high temperature operability Kurtz, Anthony D.; Ned, Alexander A.; Vergel de Dios, Timoteo I. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5622902 US Patent Document 5,622,902	patent	April 1997
X-ray beam position monitor and its position measurement method Kitamura, Hideo; Yamamoto, Yoshiyuki; Tanabe, Keiichiro https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5717214 US Patent Document 5,717,214	patent	February 1998
Method for synthesizing n-type diamond having low resistance Yoshida, Hiroshi https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6340393 US Patent Document 6,340,393	patent	January 2002
Electrical switching device and method of embedding catalytic material in a diamond substrate Taylor, Gareth Andrew https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7781257 US Patent Document 7,781,257	patent	August 2010
Ultrananocrystalline diamond films with optimized dielectric properties for advanced RF MEMS capacitive switches Sumant, Anirudha V.; Auciello, Orlando H.; Mancini, Derrick C. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8354290 US Patent Document 8,354,290	patent	January 2013
Nano-crystal diamond film, manufacturing method thereof, and device using nano-crystal diamond film Gamo, Hidenori; Ando, Toshihiro https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8420043 US Patent Document 8,420,043	patent	April 2013
Diamond transmission dynode and photomultiplier or imaging device using same Tomasetti, Charles M.; Caracciolo, Robert; Beetz, Charles B. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20020041154 US Patent Application 09/885716; 20020041154	patent-application	April 2002
Polycrystal diamond thin film and photocathode and electron tube using the same Niigaki, Minoru; Uchiyama, Shoichi; Kan, Hirofumi https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20030001498 US Patent Application 10/223378; 20030001498	patent-application	January 2003
Patterning Of Nanocrystalline Diamond Films For Diamond Microstructures Useful In Mems And Other Devices Gruen, Dieter M.; Busmann, Hans-Gerd; Meyer, Eva-Maria https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20040129202 US Patent Application 10/169879; 20040129202	patent-application	July 2004
Single crystal diamond prepared by CVD Scarsbrook, Geoffrey Alan; Martineau, Philip Maurice; Collins, John Lloyd https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20040221795 US Patent Application 10/777633; 20040221795	patent-application	November 2004
All diamond self-aligned thin film transistor Gerbi, Jennifer https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20060060864 US Patent Document 11/226703; 20060060864	patent-application	March 2006
Transparent thin film transistor (TFT) and its method of manufacture Jeong, Jae Kyeong; Shin, Hyun Soo; Mo, Yeon Gon https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070057261 US Patent Application 11/513090; 20070057261	patent-application	March 2007
Diamond Semiconductor Element And Process For Producing The Same Kasu, Makoto; Makimoto, Toshiki; Ueda, Kenji https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20080134960 US Patent Application 12/023660; 20080134960	patent-application	June 2008
Nanowire-based sensor configurations Hamilton, James M.; Dubrow, Robert S.; Chow, Calvin Y.H. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090124025 US Patent Application 11/399218; 20090124025	patent-application	May 2009
Process and apparatus for diamond synthesis Asmussen, Jes; Grotjohn, Timothy; Reinhard, Donnie https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20090239078 US Patent Application 12/381270; 20090239078	patent-application	September 2009
Printable, Flexible and Stretchable Diamond for Thermal Management Rogers, John A.; Kim, Tae Ho; Choi, Won Mook https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20100052112 US Patent Application 12/418071; 20100052112	patent-application	March 2010
Apparatus And Method For Diamond Film Growth D'Evelyn, Mark Philip; Blouch, John Dewey; Haber, Ludwig Christian https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20100189924 US Patent Application 12/359083; 20100189924	patent-application	July 2010
Semiconductor Component Having Diamond-Containing Electrodes and Use Thereof Kusterer, Joachim; Kohn, Erhard https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20120312353 US Patent Document 13/384070; 20120312353	patent-application	December 2012
Diamond Semiconductor System and Method Khan, Adam https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20130026492 US Patent Application 13/273467; 20130026492	patent-application	January 2013
Graphene on Semiconductor Detector Kub, Francis J.; Anderson, Travis; Hobart, Karl D. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20130082241 US Patent Application 13/630257; 20130082241	patent-application	April 2013
Nanowire Stress Sensors And Stress Sensor Integrated Circuits, Design Structures For A Stress Sensor Integrated Circuit, And Related Methods Bryant, Andres; Gunawan, Oki; Lo, Shih-Hsien https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20130145857 US Patent Application 13/764169; 20130145857	patent-application	June 2013
Vacuum Encapsulated, High Temperature Diamond Amplified Cathode Capsule and Method for Making Same Rao, Triveni; Walsh, John; Gangone, Elizabeth https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20130320295 US Patent Application 13/896459; 20130320295	patent-application	December 2013
Appendage Mountable Electronic Devices COnformable to Surfaces Rogers, John A.; Ying, Ming; Bonifas, Andrew https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20130333094 US Patent Application 13/853770; 20130333094	patent-application	December 2013
X-Ray Monitoring Optical Elements Stoupin, Stanislav; Shvydko, Yury; Katsoudas, John https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20150092925 US Patent Application 14/041831; 20150092925	patent-application	April 2015
Design and fabrication of piezoresistive strain gauges based on nanocrystalline diamond layers Kulha, Pavel; Babchenko, Oleg; Kromka, Alexander Vacuum, Vol. 86, Issue 6, p. 689-692 https://doi.org/10.1016/j.vacuum.2011.07.022	journal	January 2012
Piezoresistivity of polycrystalline p-type diamond films of various doping levels at different temperatures Wang, W. L.; Jiang, X.; Taube, K. Journal of Applied Physics, Vol. 82, Issue 2, p. 729-732 https://doi.org/10.1063/1.365606	journal	July 1997
Piezoresistivity in vapor‐deposited diamond films Aslam, M.; Taher, I.; Masood, A. Applied Physics Letters, Vol. 60, Issue 23, p. 2923-2925 https://doi.org/10.1063/1.106821	journal	June 1992
Are Diamonds a MEMS' Best Friend? Auciello, Orlando; Pacheco, Sergio; Sumant, Anirudha IEEE Microwave Magazine, Vol. 8, Issue 6, p. 61-75 https://doi.org/10.1109/MMM.2007.907816	journal	December 2007
The CVD of Nanodiamond Materials Butler, James E.; Sumant, Anirudha V.; Barnard, Amanda S. Chemical Vapor Deposition, Vol. 14, Issue 7-8, p. 145-160 https://doi.org/10.1002/cvde.200700037	journal	July 2008
Band structure, deformation potentials, and carrier mobility in strained Si, Ge, and SiGe alloys Fischetti, M. V.; Laux, S. E. Journal of Applied Physics, Vol. 80, Issue 4, p. 2234-2252 https://doi.org/10.1063/1.363052	journal	August 1996
Electrical contacts to ultrananocrystalline diamond Gerbi, J. E.; Auciello, O.; Birrell, J. Applied Physics Letters, Vol. 83, Issue 10, p. 2001-2003 https://doi.org/10.1063/1.1609043	journal	September 2003
Configurational, electronic entropies and the thermoelectric properties of nanocarbon ensembles Gruen, Dieter M.; Bruno, Paola; Xie, Ming Applied Physics Letters, Vol. 92, Issue 14, Article No. 143118 https://doi.org/10.1063/1.2909150	journal	April 2008
Giant piezoresistance effect in silicon nanowires He, Rongrui; Yang, Peidong Nature Nanotechnology, Vol. 1, Issue 1, p. 42-46 https://doi.org/10.1038/nnano.2006.53	journal	October 2006
Silicon Device Scaling to the Sub-10-nm Regime Ieong, Meikei; Doris, Bruce; Kedzierski, Jakub Science, Vol. 306, Issue 5704, p. 2057-2060 https://doi.org/10.1126/science.1100731	journal	December 2004
Review on diamond based piezoresistive sensors Werner, M.; Gluche, P.; Adamschik, M. https://doi.org/10.1109/ISIE.1998.707766	conference	January 1998
Planar ultrananocrystalline diamond field emitter in accelerator radio frequency electron injector: Performance metrics Baryshev, Sergey V.; Antipov, Sergey; Shao, Jiahang Applied Physics Letters, Vol. 105, Issue 20, Article No. 203505 https://doi.org/10.1063/1.4901723	journal	November 2014
Optically Transparent Diamond Electrode for Use in IR Transmission Spectroelectrochemical Measurements Dai, Yingrui; Proshlyakov, Denis A.; Zak, Jerzy K. Analytical Chemistry, Vol. 79, Issue 19, p. 7526-7533 https://doi.org/10.1021/ac071161p	journal	October 2007
Direct Low-Temperature Integration of Nanocrystalline Diamond with GaN Substrates for Improved Thermal Management of High-Power Electronics Goyal, Vivek; Sumant, Anirudha V.; Teweldebrhan, Desalegne Advanced Functional Materials, Vol. 22, Issue 7, p. 1525-1530 https://doi.org/10.1002/adfm.201102786	journal	February 2012
High quantum efficiency ultrananocrystalline diamond photocathode for photoinjector applications Pérez Quintero, Kenneth J.; Antipov, Sergey; Sumant, Anirudha V. Applied Physics Letters, Vol. 105, Issue 12, Article No. 123103 https://doi.org/10.1063/1.4896418	journal	September 2014
Properties of Hydrogen Terminated Diamond as a Photocathode Rameau, J. D.; Smedley, J.; Muller, E. M. Physical Review Letters, Vol. 106, Issue 13, Article No. 137602 https://doi.org/10.1103/PhysRevLett.106.137602	journal	March 2011
Optical and Electrochemical Properties of Optically Transparent, Boron-Doped Diamond Thin Films Deposited on Quartz Stotter, Jason; Zak, Jerzy; Behler, Zack Analytical Chemistry, Vol. 74, Issue 23, p. 5924-5930 https://doi.org/10.1021/ac0203544	journal	December 2002
Polycrystalline diamond films as prospective UV photocathodes Tremsin, Anton S.; Siegmund, Oswald H. W. Instrumentation for UV/EUV Astronomy and Solar Missions https://doi.org/10.1117/12.410530	conference	December 2000

Similar Records

Transparent nanocrystalline diamond coatings and devices

Patent · Tue Sep 10 00:00:00 EDT 2019 · OSTI ID:1375938

Sumant, Anirudha V.; Khan, Adam

Method to grow pure nanocrystalline diamond films at low temperatures and high deposition rates

Patent · Tue Jul 07 00:00:00 EDT 2009 · OSTI ID:1375938

Carlisle, John A; Gruen, Dieter M; Auciello, Orlando; +1 more

Ultrananocrystalline diamond contacts for electronic devices

Patent · Tue Nov 01 00:00:00 EDT 2016 · OSTI ID:1375938

Sumant, Anirudha V.; Smedley, John; Muller, Erik

Related Subjects

36 MATERIALS SCIENCE
70 PLASMA PHYSICS AND FUSION TECHNOLOGY

Title: Transparent nanocrystalline diamond coatings and devices

Citation Formats

References (43)

Similar Records

Related Subjects