Thermal history-based etching

Simpson, John T.

Title: Thermal history-based etching

Abstract

A method for adjusting an etchability of a first borosilicate glass by heating the first borosilicate glass; combining the first borosilicate glass with a second borosilicate glass to form a composite; and etching the composite with an etchant. A material having a protrusive phase and a recessive phase, where the protrusive phase protrudes from the recessive phase to form a plurality of nanoscale surface features, and where the protrusive phase and the recessive phase have the same composition.

Inventors:: Simpson, John T.

Issue Date:: 2017-11-28

Research Org.:: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1410558

Patent Number(s):: 9828284

Application Number:: 14/229,385

Assignee:: UT-BATTELLE, LLC (Oak Ridge, TN)

Patent Classifications (CPCs):: C - CHEMISTRY C03 - GLASS C03B - MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES

C - CHEMISTRY C03 - GLASS C03C - CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS

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C - CHEMISTRY C03 - GLASS C03B - MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
C03B2201/10 - doped with boron
C03B2201/32 - doped with aluminium
C03B2201/50 - doped with alkali metals
C03B37/01205 - {starting from tubes, rods, fibres or filaments
C03B37/01211 - {by inserting one or more rods or tubes into a tube}
C03B37/01214 - {for making preforms of multifibres, fibre bundles other than multiple core preforms}
C03B37/01242 - {Controlling or regulating the down-draw process}
C03B37/0253 - {Controlling or regulating
C03B37/028 - Drawing fibre bundles, e.g. for making fibre bundles of multifibres {, image fibres
C03B37/075 - Manufacture of {non-optical} fibres or filaments consisting of different sorts of glass or characterised by shape, e.g. undulated fibres
C03B37/16 - Cutting or severing

C - CHEMISTRY C03 - GLASS C03C - CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS
C03C13/046 - {Multicomponent glass compositions}
C03C15/00 - Surface treatment of glass, not in the form of fibres or filaments, by etching
C03C25/68 - by etching
C03C3/089 - containing boron

G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
G02B1/18 - Coatings for keeping optical surfaces clean, e.g. hydrophobic or photo-catalytic films

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
Y10T428/24355 - Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]

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DOE Contract Number:: AC05-00OR22725

Resource Type:: Patent

Resource Relation:: Patent File Date: 2014 Mar 28

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE

Citation Formats


                    Simpson, John T. Thermal history-based etching.  United States: N. p., 2017. 
        Web.

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                    Simpson, John T. Thermal history-based etching.  United States.

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                    Simpson, John T. Tue .  
        "Thermal history-based etching".  United States.  https://www.osti.gov/servlets/purl/1410558.

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@article{osti_1410558,

  title        = {Thermal history-based etching},

  author       = {Simpson, John T.},

  abstractNote = {A method for adjusting an etchability of a first borosilicate glass by heating the first borosilicate glass; combining the first borosilicate glass with a second borosilicate glass to form a composite; and etching the composite with an etchant. A material having a protrusive phase and a recessive phase, where the protrusive phase protrudes from the recessive phase to form a plurality of nanoscale surface features, and where the protrusive phase and the recessive phase have the same composition.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2017},

  month        = {11}

}

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Zero-mode metal clad waveguides for performing spectroscopy with confined effective observation volumes
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Levene, Michael J.; Korlach, Jonas; Turner, Stephen W.
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Methods and device for biomolecule characterization
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Su, Xing; Berlin, Andrew A.
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Methods and preforms for drawing microstructured optical fibers
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Dawes, Steven B.; Gallagher, Michael T.; Hawtof, Daniel W.
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Spectral filter for green and shorter wavelengths
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Method of making a product with a micro or nano sized structure and product
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Van Rijn, Cornelis Johannes Maria; Vogelaar, Laura; Nijdam, Wietze
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Wang, Chung Lin
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Leached fiber bundle and method
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Microfabrication method based on metal matrix composite technology
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Polymeric structures, particularly microstructures, and methods for making same
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Apparatus and method for near-field imaging of tissue
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van der Weide, Daniel Warren
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High density optical data storage
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Walt, David R.
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Process for manufacturing a micro-structured optical fibre
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Arimondi, Marco; Roba, Giacomo Stefano
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Laser scanning confocal microscope with fibre bundle return
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Harris, Martin
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Photonic crystals with nanowire-based fabrication
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Li, Zhiyong; Williams, R. Stanley; Islam, M. Saif
US Patent Application 11/096669; 20050191774
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Subwavelength-diameter silica wires for low-loss optical waveguiding
patent-application, September 2005

Mazur, Eric; Tong, Limin; Gattass, Rafael
US Patent Application 11/013198; 20050207713
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Method for creating chemical sensors using contact-based microdispensing technology
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Carter, J. Chance; Colston, Billy W. JR.; Brown, Steve B.
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Composite, ordered material having sharp surface features
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Composite, nanostructured, super-hydrophobic material
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Insulator coating and method for forming same
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US Patent Application 10/966963; 20060081394
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Method and apparatus for compact spectrometer for fiber array spectral translator
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Gardner, Charles W. JR.; Maier, John S.; Nelson, Matthew P.
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Composite, Ordered Material Having Sharp Surface Features
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D'Urso, Brian R.; Simpson, John T.
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Ultrasonic probing device with distributed sensing elements
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Aharoni, Rami; Matcovitch, Avram
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Nanoscale optical microscope
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Naughton, Michael J; Kempa, Krzysztof J.; Ren, Zhifeng
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Fused Array Preform Fabrication Of Holey Optical Fibers
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Falkenstein, Paul L.; Justus, Brian
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Transparent, super-hydrophobic, disordered composite material
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Multi-Tipped Optical Component
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D'Urso, Brian; Simpson, John
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Method for Producing Microchannels in Drawn Material
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D'urso, Brian R.; Simpson, John T.
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Composite, Nanostructured, Super-Hydrophobic Material
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Nano-Structured Substrates, Articles, and Methods Thereof
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Optical Member and Imaging Apparatus
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Chang, Yu-Jen; Chen, Yi-Chun; Kuo, Hui-Ling
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Transformation of a Simple Plastic into a Superhydrophobic Surface
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Erbil, H. Y.; Demirel, A. Levent; Avcl, Yonca
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From Rolling Ball to Complete Wetting: The Dynamic Tuning of Liquids on Nanostructured Surfaces
journal, May 2004

Krupenkin, Tom N.; Taylor, J. Ashley; Schneider, Tobias M.
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Tunable Superhydrophobic Surfaces Fabricated by Nanosphere Lithography
journal, April 2004

Litvinova, Ekaterina A.
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Fabrication of Anodic-Alumina Films with Custom-Designed Arrays of Nanochannels
journal, January 2005

Liu, N.-W.; Datta, A.; Liu, C.-Y.
Advanced Materials, Vol. 17, Issue 2, p. 222-225
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Microfabricated needles for transdermal delivery of macromolecules and nanoparticles: Fabrication methods and transport studies
journal, November 2003

McAllister, D. V.; Wang, P. M.; Davis, S. P.
Proceedings of the National Academy of Sciences, Vol. 100, Issue 24, p. 13755-13760
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Silicon micromachining using a high-density plasma source
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McAuley, S. A.; Ashraf, H.; Atabo, L.
Journal of Physics D: Applied Physics, Vol. 34, Issue 18, p. 2769-2774
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Modeling of subwavelength-diameter optical wire waveguides for optical sensing applications
conference, February 2005

Tong, Limin; Lou, Jingyi; Mazur, Eric
Photonics Asia 2004
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Optical silica nanowires for nanophotonics
conference, February 2012

Tong, Limin; Lou, Jingyi; Ma, Zhe
SPIE Proceedings
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Submicron and nano-diameter silica wires for optical wave guiding
conference, September 2002

Tong, Limin; Gattass, R. R.; Lou, Jingyi
Photonics Asia 2002
https://doi.org/10.1117/12.481726

Subwavelength-diameter silica wires for microscale optical components
conference, April 2005

Tong, Limin; Mazur, Eric; Jiang, Shibin
Integrated Optoelectronic Devices 2005
https://doi.org/10.1117/12.590677

Nanochannel Array Glass
journal, October 1992

Tonucci, R. J.; Justus, B. L.; Campillo, A. J.
Science, Vol. 258, Issue 5083, p. 783-785
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Abstract

Citation Formats

Method of Making Metal and Glass Fiber Structures patent, August 1966

Method of Making Honeycomb Structure patent, September 1966

Fuel Cell Electrode patent, November 1966

Photocathode Of Light Fibers Having Ends Terminating In Truncated Corner Cubes patent, June 1971

Fiber optic photoluminescence sensor patent, August 1992

Multi-fiber plug for a laser catheter patent, March 1993

Ultrablack surfaces patent, July 1993

Nanochannel filter patent, August 1993

Imaging fiber optic array sensors, apparatus, and methods for concurrently detecting multiple analytes of interest in a fluid sample patent, September 1993

Method of making a semiconductor device by forming a nanochannel mask patent, July 1994

Microchannel plates having both improved gain and signal-to-noise ratio and methods of their manufacture patent, February 1996

Laser resectoscope with laser induced mechanical cutting means patent, March 1996

Method of making wide band gap field emitter patent, July 1996

Superresolution imaging fiber for subwavelength light energy generation and near-field optical microscopy patent, May 1997

High resolution fiber optic probe for near field optical microscopy and method of making same patent, September 1997

High density array fabrication and readout method for a fiber optic biosensor patent, November 1997

Optical sensor apparatus for far-field viewing and making optical analytical measurements at remote locations patent, September 1998

High density array fabrication and readout method for a fiber optic biosensor patent, November 1998

Minimally invasive sensor patent, January 1999

Method for forming optical interferometer patent, January 1999

Method for optical fiber with tapered end core protruding from clad patent, July 1999

Composite nanophosphor screen for detecting radiation patent, September 1999

Optical filters based on uniform arrays of metallic waveguides patent, January 2000

Tapered coherent fiber bundle imaging device for near-field optical microscopy patent, January 2000

Fiber optic sensor with encoded microspheres patent, February 2000

Near-field scanning optical microscope having a sub-wavelength aperture array for enhanced light transmission patent, April 2000

Spectral volume microprobe arrays patent, August 2000

High density array fabrication and readout method for a fiber optic biosensor patent, November 2000

Photodeposition method for fabricating a three-dimensional, patterned polymer microstructure patent, March 2001

Process for fabricating an array of nanowires patent, May 2001

Apparatus and method for using an intracutaneous microneedle array patent, July 2001

Fiber optic sensor with encoded microspheres patent, July 2001

Target analyte sensors utilizing Microspheres patent, December 2001

Fiber optic biosensor for selectively detecting oligonucleotide species in a mixed fluid sample patent, June 2002

High density array fabrication and readout method for a fiber optic biosensor patent, July 2002

Fiber optic biosensor for selectively detecting oligonucleotide species in a mixed fluid sample patent, November 2002

Optical notch filters based on two-dimensional photonic band-gap materials patent, November 2002

Microneedle device for transport of molecules across tissue patent, January 2003

Methods of fabricating microneedle arrays using sacrificial molds patent, January 2003

Method for fabricating arrays of micro-needles patent, April 2003

Self-cleaning surfaces of objects and process for producing same patent, December 2003

Optical device for generating pulsed light patent, September 2004

Optical architectures for microvolume laser-scanning cytometers patent, October 2004

Fiber, probe and optical head of multiple optical path array type and methods for manufacturing the same patent, November 2004

Microarrays and their manufacture patent, January 2005

Photonic-crystal fibers and photonic-crystal fiber devices patent, February 2005

Target analyte sensors utilizing microspheres patent, February 2005

Encoding and decoding of array sensors utilizing nanocrystals patent, May 2005

Microfabricated, flowthrough porous apparatus for discrete detection of binding reactions patent, May 2005

Method of preparing ultra fine particle of metal chalcogenide patent, August 2005

Optical fiber array with lenses patent, August 2005

Optical fiber coupling system patent, August 2005

Optical detection of label-free biomolecular interactions using microreplicated plastic sensor elements patent, October 2005

Method of forming a nanotip array in a substrate by forming masks on portions of the substrate and etching the unmasked portions patent, November 2005

Methods and devices for optically recording and imaging representations of interactions of an object with its environment patent, November 2005

Optical architectures for microvolume laser-scanning cytometers patent, December 2005

Optical array device and methods of use thereof for screening, analysis and manipulation of particles patent, January 2006

Contact-field optical microscope patent, February 2006

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Composite, ordered material having sharp surface features patent, December 2006

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Polymeric structures, particularly microstructures, and methods for making same patent, July 2008

Subwavelength-diameter silica wires for low-loss optical waveguiding patent, September 2008

"Self - Encoding Sensor with Microspheres " patent-application, October 2001

Fiber Optic Biosensor For Selectively Detecting Oligonucleotide Species In A Mixed Fluid Sample patent-application, January 2002

Microneedle devices and methods of manufacture and use thereof patent-application, September 2002

Substrates with a self-cleaning surface, a process for their production and their use patent-application, October 2002

Reflective coherent spatial light modulator patent-application, October 2002

Properties of structure-formers for self-cleaning surfaces, and the production of the same patent-application, October 2002

Method of Making Metal and Glass Fiber Structures
patent, August 1966

Method of Making Honeycomb Structure
patent, September 1966

Fuel Cell Electrode
patent, November 1966

Photocathode Of Light Fibers Having Ends Terminating In Truncated Corner Cubes
patent, June 1971

Fiber optic photoluminescence sensor
patent, August 1992

Multi-fiber plug for a laser catheter
patent, March 1993

Ultrablack surfaces
patent, July 1993

Nanochannel filter
patent, August 1993

Imaging fiber optic array sensors, apparatus, and methods for concurrently detecting multiple analytes of interest in a fluid sample
patent, September 1993

Method of making a semiconductor device by forming a nanochannel mask
patent, July 1994

Microchannel plates having both improved gain and signal-to-noise ratio and methods of their manufacture
patent, February 1996

Laser resectoscope with laser induced mechanical cutting means
patent, March 1996

Method of making wide band gap field emitter
patent, July 1996

Superresolution imaging fiber for subwavelength light energy generation and near-field optical microscopy
patent, May 1997

High resolution fiber optic probe for near field optical microscopy and method of making same
patent, September 1997

High density array fabrication and readout method for a fiber optic biosensor
patent, November 1997

Optical sensor apparatus for far-field viewing and making optical analytical measurements at remote locations
patent, September 1998

High density array fabrication and readout method for a fiber optic biosensor
patent, November 1998

Minimally invasive sensor
patent, January 1999

Method for forming optical interferometer
patent, January 1999

Method for optical fiber with tapered end core protruding from clad
patent, July 1999

Composite nanophosphor screen for detecting radiation
patent, September 1999

Optical filters based on uniform arrays of metallic waveguides
patent, January 2000

Tapered coherent fiber bundle imaging device for near-field optical microscopy
patent, January 2000

Fiber optic sensor with encoded microspheres
patent, February 2000

Near-field scanning optical microscope having a sub-wavelength aperture array for enhanced light transmission
patent, April 2000

Spectral volume microprobe arrays
patent, August 2000

High density array fabrication and readout method for a fiber optic biosensor
patent, November 2000

Photodeposition method for fabricating a three-dimensional, patterned polymer microstructure
patent, March 2001

Process for fabricating an array of nanowires
patent, May 2001

Apparatus and method for using an intracutaneous microneedle array
patent, July 2001

Fiber optic sensor with encoded microspheres
patent, July 2001

Target analyte sensors utilizing Microspheres
patent, December 2001

Fiber optic biosensor for selectively detecting oligonucleotide species in a mixed fluid sample
patent, June 2002

High density array fabrication and readout method for a fiber optic biosensor
patent, July 2002

Fiber optic biosensor for selectively detecting oligonucleotide species in a mixed fluid sample
patent, November 2002

Optical notch filters based on two-dimensional photonic band-gap materials
patent, November 2002

Microneedle device for transport of molecules across tissue
patent, January 2003

Methods of fabricating microneedle arrays using sacrificial molds
patent, January 2003

Method for fabricating arrays of micro-needles
patent, April 2003

Self-cleaning surfaces of objects and process for producing same
patent, December 2003

Optical device for generating pulsed light
patent, September 2004

Optical architectures for microvolume laser-scanning cytometers
patent, October 2004

Fiber, probe and optical head of multiple optical path array type and methods for manufacturing the same
patent, November 2004

Microarrays and their manufacture
patent, January 2005

Photonic-crystal fibers and photonic-crystal fiber devices
patent, February 2005

Target analyte sensors utilizing microspheres
patent, February 2005

Encoding and decoding of array sensors utilizing nanocrystals
patent, May 2005

Microfabricated, flowthrough porous apparatus for discrete detection of binding reactions
patent, May 2005

Method of preparing ultra fine particle of metal chalcogenide
patent, August 2005

Optical fiber array with lenses
patent, August 2005

Optical fiber coupling system
patent, August 2005

Optical detection of label-free biomolecular interactions using microreplicated plastic sensor elements
patent, October 2005

Method of forming a nanotip array in a substrate by forming masks on portions of the substrate and etching the unmasked portions
patent, November 2005

Methods and devices for optically recording and imaging representations of interactions of an object with its environment
patent, November 2005

Optical architectures for microvolume laser-scanning cytometers
patent, December 2005

Optical array device and methods of use thereof for screening, analysis and manipulation of particles
patent, January 2006

Contact-field optical microscope
patent, February 2006

Spectral filter for green and shorter wavelengths
patent, April 2006

Microlens for projection lithography and method of preparation thereof
patent, June 2006

Method of making and decoding of array sensors with microspheres
patent, June 2006

Composite, ordered material having sharp surface features
patent, December 2006

Resonant waveguide-grating filters and sensors and methods for making and using same
patent, January 2007

Photonic crystal fibers and medical systems including photonic crystal fibers
patent, January 2007

Composite, nanostructured, super-hydrophobic material
patent, August 2007

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patent, March 2008

Resonant optical cavities for high-sensitivity high-throughput biological sensors and methods
patent, June 2008

Fiber-optic assay apparatus based on phase-shift interferometry
patent, July 2008

Methods for using resonant waveguide-grating filters and sensors
patent, July 2008

Polymeric structures, particularly microstructures, and methods for making same
patent, July 2008

Subwavelength-diameter silica wires for low-loss optical waveguiding
patent, September 2008

"Self - Encoding Sensor with Microspheres "
patent-application, October 2001

Fiber Optic Biosensor For Selectively Detecting Oligonucleotide Species In A Mixed Fluid Sample
patent-application, January 2002

Microneedle devices and methods of manufacture and use thereof
patent-application, September 2002

Substrates with a self-cleaning surface, a process for their production and their use
patent-application, October 2002

Reflective coherent spatial light modulator
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Properties of structure-formers for self-cleaning surfaces, and the production of the same
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Automated information processing in randomly ordered arrays
patent-application, October 2002

Fiber spacers in large area vacuum displays and method for manufacture
patent-application, October 2002

Optical fiber array and method of formation
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