Thermal history-based etching
Abstract
A method for adjusting an etchability of a first borosilicate glass by heating the first borosilicate glass; combining the first borosilicate glass with a second borosilicate glass to form a composite; and etching the composite with an etchant. A material having a protrusive phase and a recessive phase, where the protrusive phase protrudes from the recessive phase to form a plurality of nanoscale surface features, and where the protrusive phase and the recessive phase have the same composition.
- Inventors:
- Issue Date:
- Research Org.:
- Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1497859
- Patent Number(s):
- 10155688
- Application Number:
- 15/794,824
- Assignee:
- UT-BATTELLE, LLC (Oak Ridge, TN)
- Patent Classifications (CPCs):
-
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
C - CHEMISTRY C03 - GLASS C03C - CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS
- DOE Contract Number:
- AC05-00OR22725
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2017 Oct 26
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Simpson, John T. Thermal history-based etching. United States: N. p., 2018.
Web.
Simpson, John T. Thermal history-based etching. United States.
Simpson, John T. Tue .
"Thermal history-based etching". United States. https://www.osti.gov/servlets/purl/1497859.
@article{osti_1497859,
title = {Thermal history-based etching},
author = {Simpson, John T.},
abstractNote = {A method for adjusting an etchability of a first borosilicate glass by heating the first borosilicate glass; combining the first borosilicate glass with a second borosilicate glass to form a composite; and etching the composite with an etchant. A material having a protrusive phase and a recessive phase, where the protrusive phase protrudes from the recessive phase to form a plurality of nanoscale surface features, and where the protrusive phase and the recessive phase have the same composition.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2018},
month = {12}
}
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