Thermal history-based etching
Abstract
A method for adjusting an etchability of a first borosilicate glass by heating the first borosilicate glass; combining the first borosilicate glass with a second borosilicate glass to form a composite; and etching the composite with an etchant. A material having a protrusive phase and a recessive phase, where the protrusive phase protrudes from the recessive phase to form a plurality of nanoscale surface features, and where the protrusive phase and the recessive phase have the same composition.
- Inventors:
- Issue Date:
- Research Org.:
- Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1497859
- Patent Number(s):
- 10155688
- Application Number:
- 15/794,824
- Assignee:
- UT-BATTELLE, LLC (Oak Ridge, TN)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C03 - GLASS C03B - MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
C - CHEMISTRY C03 - GLASS C03C - CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS
- DOE Contract Number:
- AC05-00OR22725
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2017 Oct 26
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Simpson, John T. Thermal history-based etching. United States: N. p., 2018.
Web.
Simpson, John T. Thermal history-based etching. United States.
Simpson, John T. Tue .
"Thermal history-based etching". United States. https://www.osti.gov/servlets/purl/1497859.
@article{osti_1497859,
title = {Thermal history-based etching},
author = {Simpson, John T.},
abstractNote = {A method for adjusting an etchability of a first borosilicate glass by heating the first borosilicate glass; combining the first borosilicate glass with a second borosilicate glass to form a composite; and etching the composite with an etchant. A material having a protrusive phase and a recessive phase, where the protrusive phase protrudes from the recessive phase to form a plurality of nanoscale surface features, and where the protrusive phase and the recessive phase have the same composition.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2018},
month = {12}
}
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.
Works referenced in this record:
Transformation of a Simple Plastic into a Superhydrophobic Surface
journal, February 2003
- Erbil, H. Y.; Demirel, A. Levent; Avcl, Yonca
- Science, Vol. 299, Issue 5611, p. 1377-1380
Optical filters based on uniform arrays of metallic waveguides
patent, January 2000
- Rosenberg, Armand; Tonuuci, Ronald J.
- US Patent Document 6,014,251
Photonic-crystal fibers and photonic-crystal fiber devices
patent, February 2005
- Russell, Phillip St. John; Birks, Timothy Adam; Knight, Jonathan Cave
- US Patent Document 6,853,786
Optical architectures for microvolume laser-scanning cytometers
patent, October 2004
- Dietz, Louis J.; Walton, Ian; Norton, Scott
- US Patent Document 6,800,860
Nanoneedle chips and the production thereof
patent-application, April 2004
- Wang, Chung Lin
- US Patent Application 10/259849; 20040063100
Microchannel plates having both improved gain and signal-to-noise ratio and methods of their manufacture
patent, February 1996
- Pierle, Robert L.; Gilpin, Mark; Parish, Hubert G.
- US Patent Document 5,493,169
Fiber Optic Biosensor For Selectively Detecting Oligonucleotide Species In A Mixed Fluid Sample
patent-application, January 2002
- Walt, David R.; Healey, Brian G.
- US Patent Application 09/187289; 20020009719
Method of forming a nanotip array in a substrate by forming masks on portions of the substrate and etching the unmasked portions
patent, November 2005
- Chen, Kuie-Hsien; Hwang, Jih-Shang; Das, Debasmita
- US Patent Document 6,960,528
Nano-Structured Substrates, Articles, and Methods Thereof
patent-application, June 2011
- Baker, David; Ponader, Carl; Potuzak, Marcel
- US Patent Application 12/952904; 20110128535
Optical architectures for microvolume laser-scanning cytometers
patent, December 2005
- Dietz, Louis J.; Walton, Ian; Norton, Scott
- US Patent Document 6,979,830
Optical device for generating pulsed light
patent, September 2004
- Dinu, Mihaela; Kerbage, Charles; Liu, Xiang
- US Patent Document 6,795,617
Microarrays and their manufacture by slicing
patent-application, March 2003
- Anderson, N. Leigh; Anderson, Norman G.; Braatz, James A.
- US Patent Application 10/061969; 20030044855
Process for manufacturing a micro-structured optical fibre
patent-application, April 2005
- Arimondi, Marco; Roba, Giacomo Stefano
- US Patent Application 10/499022; 20050072192
Methods of fabricating microneedle arrays using sacrificial molds
patent, January 2003
- Wood, Robert L.; Wynands, Henry A.; Markus, Karen W.
- US Patent Document 6,511,463
Fiber, probe and optical head of multiple optical path array type and methods for manufacturing the same
patent, November 2004
- Narita, Yoshihito; Inoue, Tsutomu
- US Patent Document 6,813,402
Composite, ordered material having sharp surface features
patent-application, February 2006
- D'Urso, Brian R.; Simpson, John T.
- US Patent Application 10/900248; 20060024478
Nanoscale optical microscope
patent-application, June 2007
- Naughton, Michael J; Kempa, Krzysztof J.; Ren, Zhifeng
- US Patent Application 11/509519; 20070138376
Fiber optic photoluminescence sensor
patent, August 1992
- Thompson, Richard B.; Levine, Michael
- US Patent Document 5,141,312
Composite, nanostructured, super-hydrophobic material
patent-application, February 2006
- D'Urso, Brian R.; Simpson, John T.
- US Patent Application 10/900249; 20060024508
Surfaces rendered self-cleaning by hydrophobic structures and a process for their production
patent-application, January 2003
- Nun, Edwin; Oles, Markus; Schleich, Bernhard
- US Patent Application 10/137445; 20030013795
Fused Array Preform Fabrication Of Holey Optical Fibers
patent-application, July 2007
- Falkenstein, Paul L.; Justus, Brian
- US Patent Application 11/689584; 20070154154
Method of Making Honeycomb Structure
patent, September 1966
- Siegmund, Walter P.
- US Patent Document 3,275,428
Ultrasonic probing device with distributed sensing elements
patent-application, May 2007
- Aharoni, Rami; Matcovitch, Avram
- US Patent Application 10/552757; 20070123776
Method of making a semiconductor device by forming a nanochannel mask
patent, July 1994
- Tonucci, Ronald J.; Justus, Brian L.
- US Patent Document 5,332,681
Superresolution imaging fiber for subwavelength light energy generation and near-field optical microscopy
patent, May 1997
- Walt, David R.; Pantano, Paul
- US Patent Document 5,633,972
Composite, nanostructured, super-hydrophobic material
patent, August 2007
- D'Urso, Brian R.; Simpson, John T.
- US Patent Document 7,258,731
Fiber optic sensor with encoded microspheres
patent, February 2000
- Walt, David R.; Michael, Karri L.
- US Patent Document 6,023,540
High density array fabrication and readout method for a fiber optic biosensor
patent, November 1998
- Pinkel, Daniel; Segraves, Richard L.; Zhai, Ye Yz
- US Patent Document 5,837,196
Optical detection of label-free biomolecular interactions using microreplicated plastic sensor elements
patent, October 2005
- Cunningham, Brian T.; Pepper, Jane; Lin, Bo
- US Patent Document 6,951,715
Composite, Ordered Material Having Sharp Surface Features
patent-application, December 2006
- D'Urso, Brian R.; Simpson, John T.
- US Patent Application 11/463940; 2006028938
Polymeric structures, particularly microstructures, and methods for making same
patent, July 2008
- Yan, Mingdi; Bartlett, Michele A.
- US Patent Document 7,405,034
Method of Making Metal and Glass Fiber Structures
patent, August 1966
- Hicks, JR, J.W.
- US Patent Document 3,265,480
High density array fabrication and readout method for a fiber optic biosensor
patent, November 2000
- Pinkel, Daniel; Gray, Joe W.; Albertson, Donna G.
- US Patent Document 6,146,593
Carbon nanotube probe tip grown on a small probe
patent-application, May 2003
- Mitchell, Thomas Owen
- US Patent Application 10/261084; 20030094035
Self-cleaning surfaces of objects and process for producing same
patent, December 2003
- Barthlott, Wilhelm
- US Patent Document 6,660,363
Optical Member and Imaging Apparatus
patent-application, August 2013
- Sugiyama, Akira; Zhang, Zuyi; Kotani, Yoshinori
- US Patent Application 13/881006; 20130216775
Multi-fiber plug for a laser catheter
patent, March 1993
- Hayes, Gary B.; Kittrell, Carter; Prince, Martin R.
- US Patent Document 5,192,278
Method for Producing Microchannels in Drawn Material
patent-application, January 2008
- D'urso, Brian R.; Simpson, John T.
- US Patent Application 11/460658; 20080026188
Method for fabricating arrays of micro-needles
patent, April 2003
- Kenney, Christopher J.
- US Patent Document 6,551,849
Composite nanophosphor screen for detecting radiation
patent, September 1999
- Bhargava, Rameshwar N.
- US Patent Document 5,952,665
Near-field scanning optical microscope having a sub-wavelength aperture array for enhanced light transmission
patent, April 2000
- Ebbesen, Thomas; Ghaemi, Hadi F.; Thio, Tineke
- US Patent Document 6,052,238
Fiber optic biosensor for selectively detecting oligonucleotide species in a mixed fluid sample
patent, November 2002
- Walt, David R.; Healey, Brian G.
- US Patent Document 6,482,593
Subwavelength-diameter silica wires for low-loss optical waveguiding
patent, September 2008
- Mazur, Eric; Tong, Limin; Gattass, Rafael R.
- US Patent Document 7,421,173
Apparatus and method for near-field imaging of tissue
patent-application, December 2004
- van der Weide, Daniel Warren
- US Patent Application 10/855686; 20040254457
Silicon micromachining using a high-density plasma source
journal, September 2001
- McAuley, S. A.; Ashraf, H.; Atabo, L.
- Journal of Physics D: Applied Physics, Vol. 34, Issue 18, p. 2769-2774
Leached fiber bundle and method
patent-application, May 2004
- Gerstner, Klaus; Plichta, Armin; Schlatterbeck, Dirk
- US Patent Application 10/416897; 20040093906
Nanochannel filter
patent, August 1993
- Tonucci, Ronald J.; Justus, Brian L.
- US Patent Document 5,234,594
Optical sensor apparatus for far-field viewing and making optical analytical measurements at remote locations
patent, September 1998
- Walt, David R.; Michael, Karri L.; Chadha, Suneet
- US Patent Document 5,814,524
Optical array device and methods of use thereof for screening, analysis and manipulation of particles
patent, January 2006
- Walt, David R.; Weissman, Irving L.; Biran, Israel
- US Patent Document 6,991,939
Resonant optical cavities for high-sensitivity high-throughput biological sensors and methods
patent, June 2008
- Blair, Steven M.
- US Patent Document 7,384,797
Optical array device and methods of use thereof for screening, analysis and manipulation of particles
patent-application, February 2003
- Walt, David R.; Weissman, Irving L.; Biran, Israel
- US Patent Application 10/199341; 20030032204
Tunable Superhydrophobic Surfaces Fabricated by Nanosphere Lithography
journal, April 2004
- Litvinova, Ekaterina A.
- MRS Bulletin, Vol. 29, Issue 4, p. 229-230
Laser scanning confocal microscope with fibre bundle return
patent-application, August 2005
- Harris, Martin
- US Patent Application 10/510175; 20050174425
Method for forming optical interferometer
patent, January 1999
- Grabbe, Dimitry G.
- US Patent Document 5,863,449
Optical probes and probe systems for monitoring fluid flow in a well
patent-application, November 2002
- Wu,, Xu; Dussan V, Elizabeth B.; Mullins, Oliver C.
- US Patent Application 10/055420; 20020176646
Process for fabricating an array of nanowires
patent, May 2001
- Ying, Jackie Y.; Zhang, Zhibo; Zhang, Lei
- US Patent Document 6,231,744
Nanofiber optic sensor based on the excitation of surface plasmon wave near fiber tip
journal, January 2006
- Chang, Yu-Jen; Chen, Yi-Chun; Kuo, Hui-Ling
- Journal of Biomedical Optics, Vol. 11, Issue 1, Article No. 014032
Photonic crystals with nanowire-based fabrication
patent-application, September 2005
- Li, Zhiyong; Williams, R. Stanley; Islam, M. Saif
- US Patent Application 11/096669; 20050191774
High density array fabrication and readout method for a fiber optic biosensor
patent, July 2002
- Pinkel, Daniel; Gray, Joe W.; Albertson, Donna G.
- US Patent Document 6,417,506
Photodeposition method for fabricating a three-dimensional, patterned polymer microstructure
patent, March 2001
- Walt, David R.; Healey, Brian G.
- US Patent Document 6,200,737
Target analyte sensors utilizing microspheres
patent, February 2005
- Walt, David R.; Michael, Karri L.
- US Patent Document 6,859,570
Microfabricated needles for transdermal delivery of macromolecules and nanoparticles: Fabrication methods and transport studies
journal, November 2003
- McAllister, D. V.; Wang, P. M.; Davis, S. P.
- Proceedings of the National Academy of Sciences, Vol. 100, Issue 24, p. 13755-13760
Polymeric structures, particularly microstructures, and methods for making same
patent-application, December 2004
- Yan, Mingdi; Bartlett, Michele A.
- US Patent Application 10/769423; 20040242023
Fuel Cell Electrode
patent, November 1966
- Gladrow, Elroy M.; Thompson, Charles E.
- US Patent Document 3,284,332
Laser resectoscope with laser induced mechanical cutting means
patent, March 1996
- Hakky, Said I.; Hudson, Perry B.
- US Patent Document 5,498,258
Optical fiber coupling system
patent, August 2005
- Hikichi, Naoko; Kobayashi, Fumitoshi; Nakama, Kenichi
- US Patent Document 6,934,443
Zero-mode metal clad waveguides for performing spectroscopy with confined effective observation volumes
patent-application, September 2003
- Levene, Michael J.; Korlach, Jonas; Turner, Stephen W.
- US Patent Application 10/259268; 20030174992
Optical fiber array with lenses
patent, August 2005
- Suzuki, Masaru; Ao, Masahiro
- US Patent Document 6,931,177
Microneedle device for transport of molecules across tissue
patent, January 2003
- Prausnitz, Mark R.; Allen, Mark G.; McAllister, Devin V.
- US Patent Document 6,503,231
Apparatus and method for using an intracutaneous microneedle array
patent, July 2001
- Yuzhakov, Vadim Vladimirovich; Sherman, Faiz Feisal; Owens, Grover
- US Patent Document 6,256,533
Self-encoding sensor with microspheres
patent, March 2008
- Walt, David R.; Dickinson, Todd A.
- US Patent Document 7,348,181
Method of making and decoding of array sensors with microspheres
patent, June 2006
- Chee, Mark S.; Stuelpnagel, John R.; Czarnik, Anthony W.
- US Patent Document 7,060,431
Fiber optic biosensor for selectively detecting oligonucleotide species in a mixed fluid sample
patent, June 2002
- Walt, David R.; Healey, Brian G.
- US Patent Document 6,406,845
Microfabrication method based on metal matrix composite technology
patent-application, May 2004
- Ozeryansky, Gennady
- US Patent Application 10/702856; 20040094503
Methods for using resonant waveguide-grating filters and sensors
patent, July 2008
- Wawro, Debra D.; Tibuleac, Sorin; Magnusson, Robert
- US Patent Document 7,400,399
Transparent, super-hydrophobic, disordered composite material
patent-application, August 2007
- Simpson, John; D'Urso, Brian
- US Patent Application 11/347139; 20070184247
Method of preparing ultra fine particle of metal chalcogenide
patent, August 2005
- Ishida, Akito
- US Patent Document 6,926,927
Properties of structure-formers for self-cleaning surfaces, and the production of the same
patent-application, October 2002
- Nun, Edwin; Oles, Markus; Schleich, Bernhard
- US Patent Application 10/120366; 20020150726
Ultrablack surfaces
patent, July 1993
- Myers, William M.; Ramsey, Keith A.
- US Patent Document 5,225,933
Method of making wide band gap field emitter
patent, July 1996
- Kumar, Nalin
- US Patent Document 5,536,193
Imaging fiber optic array sensors, apparatus, and methods for concurrently detecting multiple analytes of interest in a fluid sample
patent, September 1993
- Walt, David R.; Barnard, Steven M.
- US Patent Document 5,244,636
Subwavelength-diameter silica wires for low-loss optical waveguiding
patent-application, September 2005
- Mazur, Eric; Tong, Limin; Gattass, Rafael
- US Patent Application 11/013198; 20050207713
Methods and preforms for drawing microstructured optical fibers
patent-application, December 2003
- Dawes, Steven B.; Gallagher, Michael T.; Hawtof, Daniel W.
- US Patent Application 10/171335; 20030230118
Encoding and decoding of array sensors utilizing nanocrystals
patent, May 2005
- Chee, Mark S.; Barnard, Steven M.; Zhao, Chanfeng
- US Patent Document 6,890,764
Photonic crystal fibers and medical systems including photonic crystal fibers
patent, January 2007
- Temelkuran, Burak; Anastassiou, Charalambos; Torres, David
- US Patent Document 7,167,622
Methods and device for biomolecule characterization
patent-application, November 2003
- Su, Xing; Berlin, Andrew A.
- US Patent Application 10/138157; 20030207326
Photonic-crytal fibres and photonic-crytal fibre devices
patent-application, April 2003
- Russell, Phillip St. John; Birks, Timothy Adam; Knight, Jonathan Cave
- US Patent Application 10/149556; 20030077058
Spectral filter for green and shorter wavelengths
patent, April 2006
- Kochergin, Vladimir; Swinehart, Philip
- US Patent Document 7,031,566
Automated information processing in randomly ordered arrays
patent-application, October 2002
- Stuelpnagel, John R.; Chee, Mark S.; Dickinson, Todd A.
- US Patent Application 09/925941; 20020150909
Multi-Tipped Optical Component
patent-application, December 2007
- D'Urso, Brian; Simpson, John
- US Patent Application 11/421547; 20070281130
Method for optical fiber with tapered end core protruding from clad
patent, July 1999
- Ohtsu, Motoichi; Mononobe, Shuji; Rajagopalan, Uma Maheswari
- US Patent Document 5,928,525
Method for creating chemical sensors using contact-based microdispensing technology
patent-application, October 2005
- Carter, J. Chance; Colston, Billy W. JR.; Brown, Steve B.
- US Patent Application 11/099274; 20050221279
Method of making a product with a micro or nano sized structure and product
patent-application, February 2004
- Van Rijn, Cornelis Johannes Maria; Vogelaar, Laura; Nijdam, Wietze
- US Patent Application 10/433275; 20040028875
Optical fiber array and method of formation
patent-application, October 2002
- Moran,, Joseph M.
- US Patent Application 09/739045; 20020154882
Tapered coherent fiber bundle imaging device for near-field optical microscopy
patent, January 2000
- Ghaemi, Hadi F.; Li, Yao; Thio, Tineke
- US Patent Document 6,016,376
"Self - Encoding Sensor with Microspheres "
patent-application, October 2001
- Walt, David R.; Dickinson, Todd A.
- US Patent Application 09/287573; 20010029049
Spectral filter for green and shorter wavelengths
patent-application, January 2004
- Kochergin, Vladimir; Swinehart, Philip
- US Patent Application 10/453937; 20040004779
Reflective coherent spatial light modulator
patent-application, October 2002
- Simpson, John T.; Richards, Roger K.; Hutchinson, Donald P.
- US Patent Application 09/834422; 20020149584
Substrates with a self-cleaning surface, a process for their production and their use
patent-application, October 2002
- Baumann, Martin; Fritsche, Klaus-Dieter; Korbelarz, Dagmar
- US Patent Application 10/021558; 20020142150
Composite, ordered material having sharp surface features
patent, December 2006
- D'Urso, Brian R.; Simpson, John T.
- US Patent Document 7,150,904
Target analyte sensors utilizing Microspheres
patent, December 2001
- Walt, David R.; Michael, Karri L.
- US Patent Document 6,327,410
Spectral volume microprobe arrays
patent, August 2000
- Modell, Mark; Hed, A. Ze'ev
- US Patent Document 6,104,945
Resonant waveguide-grating filters and sensors and methods for making and using same
patent, January 2007
- Wawro, Debra D.; Tibuleac, Sorin; Magnusson, Robert
- US Patent Document 7,167,615
Microneedle devices and methods of manufacture and use thereof
patent-application, September 2002
- Allen, Mark G.; Prausnitz, Mark R.; McAllister, Devin V.
- US Patent Application 10/010723; 20020138049
Method of manufacturing a spectral filter for green and shorter wavelengths
patent-application, March 2004
- Kochergin, Vladimir; Swinehart, Philip
- US Patent Application 10/453938; 20040045932
From Rolling Ball to Complete Wetting: The Dynamic Tuning of Liquids on Nanostructured Surfaces
journal, May 2004
- Krupenkin, Tom N.; Taylor, J. Ashley; Schneider, Tobias M.
- Langmuir, Vol. 20, Issue 10, p. 3824-3827
Fiber optic sensor with encoded microspheres
patent, July 2001
- Walt, David R.; Michael, Karri L.
- US Patent Document 6,266,459
Fiber-optic assay apparatus based on phase-shift interferometry
patent, July 2008
- Tan, Hong; Chen, Duan-Jun; Tan, Yushan
- US Patent Document 7,394,547
Microfabricated, flowthrough porous apparatus for discrete detection of binding reactions
patent, May 2005
- Beattie, Kenneth L.
- US Patent Document 6,893,816
Methods and devices for optically recording and imaging representations of interactions of an object with its environment
patent, November 2005
- Yankielun, Norbert E.
- US Patent Document 6,970,247
Method and apparatus for compact spectrometer for fiber array spectral translator
patent-application, September 2006
- Gardner, Charles W. JR.; Maier, John S.; Nelson, Matthew P.
- US Patent Application 11/366531; 20060209301
Fabrication of Anodic-Alumina Films with Custom-Designed Arrays of Nanochannels
journal, January 2005
- Liu, N.-W.; Datta, A.; Liu, C.-Y.
- Advanced Materials, Vol. 17, Issue 2, p. 222-225
TEM modes of nanowire arrays for use in photolithography
patent-application, November 2002
- Wolff, Peter A.
- US Patent Application 09/819341; 20020171029
Optical notch filters based on two-dimensional photonic band-gap materials
patent, November 2002
- Tonucci, Ronald J.; Rosenberg, Armand; Lin, Ho-Shen
- US Patent Document 6,483,640
High density optical data storage
patent-application, January 2005
- Walt, David R.
- US Patent Application 10/855958; 20050013536
High resolution fiber optic probe for near field optical microscopy and method of making same
patent, September 1997
- Islam, Mohammed N.
- US Patent Document 5,664,036
Use Of Fluoropolymer Coating For Planarizing And Passivating Integrated Circuit Devices
patent-application, June 2003
- Siegel, Harry M.; Lane, Fred P.
- US Patent Application 09/998503; 20030104693
Photocathode Of Light Fibers Having Ends Terminating In Truncated Corner Cubes
patent, June 1971
- Sowers, Hal L.; Balkwill, John T.
- US Patent Document 3,586,895
Microlens for projection lithography and method of preparation thereof
patent, June 2006
- Wu, Ming-Hsien; Paul, Kateri E.; Whitesides, George M.
- US Patent Document 7,057,832
Fiber spacers in large area vacuum displays and method for manufacture
patent-application, October 2002
- Hofmann, James J.; Elledge, Jason B.
- US Patent Application 10/162339; 20020151245
Composite, Nanostructured, Super-Hydrophobic Material
patent-application, December 2008
- D'Urso, Brian R; Simpson, John T.
- US Patent Application 11/463964; 20080296252
Insulator coating and method for forming same
patent-application, April 2006
- Li, Jun; Fan, Lianhua; Wong, Ching-Ping
- US Patent Application 10/966963; 20060081394
Microarrays and their manufacture
patent, January 2005
- Anderson, Norman G.; Anderson, N. Leigh; Braatz, James A.
- US Patent Document 6,846,635
High density array fabrication and readout method for a fiber optic biosensor
patent, November 1997
- Pinkel, Daniel; Gray, Joe W.
- US Patent Document 5,690,894