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Title: Conductivity based on selective etch for GaN devices and applications thereof

Patent ·
OSTI ID:1228370

This invention relates to methods of generating NP gallium nitride (GaN) across large areas (>1 cm.sup.2) with controlled pore diameters, pore density, and porosity. Also disclosed are methods of generating novel optoelectronic devices based on porous GaN. Additionally a layer transfer scheme to separate and create free-standing crystalline GaN thin layers is disclosed that enables a new device manufacturing paradigm involving substrate recycling. Other disclosed embodiments of this invention relate to fabrication of GaN based nanocrystals and the use of NP GaN electrodes for electrolysis, water splitting, or photosynthetic process applications.

Research Organization:
Yale Univ., New Haven, CT (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
FC26-07NT43227
Assignee:
Yale University
Patent Number(s):
9,206,524
Application Number:
13/559,199
OSTI ID:
1228370
Resource Relation:
Patent File Date: 2012 Jul 26
Country of Publication:
United States
Language:
English

References (12)

Porous silicon photo-device capable of photoelectric conversion patent July 1997
Integrated photoelectrochemical cell and system having a liquid electrolyte patent July 2010
Method for lift-off of epitaxially grown semiconductors by electrochemical anodic etching patent-application June 2002
Detachable substrate or detachable structure and method for the production thereof patent-application February 2005
Light Emitting Diode With Porous Sic Substrate And Method For Fabricating patent-application August 2005
Wafer Bonding of Thinned Electronic Materials and Circuits to High Performance Substrate patent-application September 2006
Photonic Structures for Efficient Light Extraction and Conversion in Multi-Color Light Emitting Devices patent-application April 2007
Semiconductor Light Emitting Device Including Porous Layer patent-application December 2007
Porous Particles and Methods of Making Thereof patent-application November 2008
Electrolysis transistor patent-application December 2008
Growth of indium gallium nitride (InGaN) on porous gallium nitride (GaN) template by metal-organic chemical vapor deposition (MOCVD) patent-application January 2009
Porous Substrates, Articles, Systems And Compositions Comprising Nanofibers And Methods Of Their Use And Production patent-application June 2009

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