Method of forming oriented block copolymer line patterns, block copolymer line patterns formed thereby, and their use to form patterned articles
Abstract
A block copolymer film having a line pattern with a high degree of long-range order is formed by a method that includes forming a block copolymer film on a substrate surface with parallel facets, and annealing the block copolymer film to form an annealed block copolymer film having linear microdomains parallel to the substrate surface and orthogonal to the parallel facets of the substrate. The line-patterned block copolymer films are useful for the fabrication of magnetic storage media, polarizing devices, and arrays of nanowires.
- Inventors:
- Issue Date:
- Research Org.:
- Univ. of California, Oakland, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1373919
- Patent Number(s):
- 9718094
- Application Number:
- 14/845,488
- Assignee:
- THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B05 - SPRAYING OR ATOMISING IN GENERAL B05D - PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- DOE Contract Number:
- FG02-96ER45612
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2015 Sep 04
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Russell, Thomas P., Hong, Sung Woo, Lee, Dong Hyun, Park, Soojin, and Xu, Ting. Method of forming oriented block copolymer line patterns, block copolymer line patterns formed thereby, and their use to form patterned articles. United States: N. p., 2017.
Web.
Russell, Thomas P., Hong, Sung Woo, Lee, Dong Hyun, Park, Soojin, & Xu, Ting. Method of forming oriented block copolymer line patterns, block copolymer line patterns formed thereby, and their use to form patterned articles. United States.
Russell, Thomas P., Hong, Sung Woo, Lee, Dong Hyun, Park, Soojin, and Xu, Ting. Tue .
"Method of forming oriented block copolymer line patterns, block copolymer line patterns formed thereby, and their use to form patterned articles". United States. https://www.osti.gov/servlets/purl/1373919.
@article{osti_1373919,
title = {Method of forming oriented block copolymer line patterns, block copolymer line patterns formed thereby, and their use to form patterned articles},
author = {Russell, Thomas P. and Hong, Sung Woo and Lee, Dong Hyun and Park, Soojin and Xu, Ting},
abstractNote = {A block copolymer film having a line pattern with a high degree of long-range order is formed by a method that includes forming a block copolymer film on a substrate surface with parallel facets, and annealing the block copolymer film to form an annealed block copolymer film having linear microdomains parallel to the substrate surface and orthogonal to the parallel facets of the substrate. The line-patterned block copolymer films are useful for the fabrication of magnetic storage media, polarizing devices, and arrays of nanowires.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Aug 01 00:00:00 EDT 2017},
month = {Tue Aug 01 00:00:00 EDT 2017}
}
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.
Works referenced in this record:
Poly(alkenyl substituted aromatic) and elastomer containing polymer compositions and process for their preparation
patent, January 1992
- Nelissen, Laurentius Nicolaas Ida Hubertus; De Koning, Gerardus J. M.; Zijderveld, Johannes M.
- US Patent Document 5,079,268
Method for the controlled growth of crystal whiskers and application thereof to the making of tip microcathodes
patent, May 1994
- Pribat, Didier; Leclerc, Pierre; Legagneux, Pierre
- US Patent Document 5,314,569
Indium gallium nitride smoothing structures for III-nitride devices
patent, October 2003
- Goetz, Werner; Camras, Michael D.; Gardner, Nathan
- US Patent Document 6,635,904
Guided self-assembly of block copolymer films on interferometrically nanopatterned substrates
patent, June 2004
- Nealey, Paul Franklin; DePablo, Juan; Cerrina, Francesco
- US Patent Document 6,746,825
Method for fabricating spaced-apart nanostructures
patent, February 2005
- Jin, Sungho
- US Patent Document 6,858,521
Large area orientation of block copolymer microdomains in thin films
patent, May 2005
- Thomas, Edwin L.; DeRosa, Claudio; Park, Cheolmin
- US Patent Document 6,893,705
Guided self-assembly of block copolymer films on interferometrically nanopatterned substrates
patent, August 2005
- Nealey, Paul Franklin; DePablo, Juan; Cerrina, Francesco
- US Patent Document 6,926,953
UV nanoimprint lithography process using elementwise embossed stamp and selectively additive pressurization
patent, September 2005
- Jeong, Jun-Ho; Sohn, HyonKee; Sim, Young-Suk
- US Patent Document 6,943,117
Nanoporous structures produced from self-assembling molecules
patent, April 2006
- Gunther, Janelle
- US Patent Document 7,030,167
Method of fabricating patterned polymer film with nanometer scale
patent, July 2006
- Yang, Seung-Man; Jang, Se Gyu; Choi, Dae-Geun
- US Patent Document 7,081,269
Composition containing a cross-linkable matrix precursor and a poragen, and porous matrix prepared therefrom
patent, September 2006
- Bruza, Kenneth J.; Godschalx, James P.; Shaffer, II, Edward O.
- US Patent Document 7,109,249
Method of manufacturing a wafer
patent, November 2006
- Maleville, Christophe; Arene, Emmanuel
- US Patent Document 7,138,325
Nanofabrication
patent, March 2007
- Tuominen, Mark; Bal, Mustafa; Russell, Thomas P.
- US Patent Document 7,189,435
Nanocylinder arrays
patent, March 2007
- Tuominen, Mark; Schotter, Joerg; Thurn-Albrecht, Thomas
- US Patent Document 7,190,049
Method for manufacturing porous structure and method for forming pattern
patent, April 2009
- Asakawa, Koji; Hiraoka, Toshiro; Akasaka, Yoshihiro
- US Patent Document 7,517,466
Structure and method for stochastic integrated circuit personalization
patent, June 2009
- Clevenger, Lawrence A.; Colburn, Matthew E.; Dalton, Timothy J.
- US Patent Document 7,544,578
Nanopatterned templates from oriented degradable diblock copolymer thin films
patent, December 2009
- Ho, Rong-Ming; Fan, Hui; Tseng, Wen-Hsien
- US Patent Document 7,632,544
Process for producing nanoparticle or nanostructure with use of nanoporous material
patent, June 2010
- Nomura, Shintaro; Itoh, Hironori
- US Patent Document 7,732,015
Inorganic nanoporous membranes and methods to form same
patent-application, July 2004
- Black, Charles; Guarini, Kathryn
- US Patent Application 10/331908; 20040124092
Guided self-assembly of block copolymer films on interferometrically nanopatterned substrates
patent-application, September 2004
- Nealey, Paul; DePablo, Juan; Cerrina, Francesco
- US Patent Application 10/800923; 20040175628
Method for catalytic growth of nanotubes or nanofibers comprising a nisi alloy diffusion barrier
patent-application, October 2005
- Legagneux, Pierre; Pribat, Didier; Nedellec, Yannig
- US Patent Application 10/497079; 20050235906
Liquid electrophotographic toners comprising amphipathic copolymers having acidic or basic functionality and wax having basic or acidic functionality
patent-application, May 2006
- Moudry, Ronald; Simpson, Charles; Baker, James
- US Patent Application 10/978635; 20060093954
Materials having predefined morphologies and methods of formation thereof
patent-application, September 2006
- Cha, Jennifer; Hedrick, James; Kim, Ho-Cheol
- US Patent Application 11/077804; 20060205875
Method of making a substrate structure with enhanced surface area
patent-application, October 2006
- Yi, Sungsoo
- US Patent Application 11/095634; 20060225162
Method of preparing catalyst layer for synthesis of carbon nanotubes and method of synthesizing carbon nanotubes using the same
patent-application, November 2006
- Jin, Yong-Wan; Han, In-Taek; Chung, Deuk-Seok
- US Patent Application 11/356240; 20060257565
A method of synthesizing nanoscale filamentary structures and electronic components comprising such structures
patent-application, December 2006
- Pribat, Didier
- US Patent Application 10/574186; 20060292870
Master mold, master mold fabrication method, and method for fabricating liquid crystal display device using the same
patent-application, July 2007
- Jo, Gyoo-Chul; Kim, Jin-Wuk; Lee, Chang-Hee
- US Patent Application 11/477909; 20070153222
Metal compositions, thermal imaging donors and patterned multilayer compositions derived therefrom
patent-application, January 2008
- Bailey, Richard; Blanchet, Graciela; Caspar, Jonathan
- US Patent Application 11/488247; 20080014528
Method of producing nanopatterned templates
patent-application, September 2008
- Park, Soojin; Russell, Thomas; Wang, Jia-Yu
- US Patent Application 12/049541; 20080230514
Orientation-controlled self-assembled nanolithography using a block copolymer
patent-application, December 2008
- Jung, Yeon; Ross, Caroline
- US Patent Application 12/137016; 20080311402
Multilayer antireflection coatings, structures and devices including the same and methods of making the same
patent-application, December 2008
- Marsh, Eugene; Millward, Dan
- US Patent Application 11/766663; 20080315270
Directed assembly of triblock copolymers
patent-application, April 2009
- Nealey, Paul; Bates, Frank; Pablo, Juan
- US Patent Application 11/580694; 20090087664
Self-assembly of block copolymers on topographically patterned polymeric substrates
patent-application, March 2010
- Russell, Thomas; Park, Soojin; Lee, Doug
- US Patent Application 12/553484; 20100075116
Method of producing nanopatterned articles, and articles produced thereby
patent-application, April 2010
- Russell, Thomas; Park, Soojin; Wang, Jia-Yu
- US Patent Application 12/566705; 20100086801
Method of producing nanopatterned articles, and articles produced thereby
patent-application, May 2010
- Russell, Thomas; Park, Soojin; Xu, Ting
- US Patent Application 12/553401; 20100112308
Method of Forming Self-Assembled Patterns Using Block Copolymers, and Articles Thereof
patent-application, March 2011
- Kim, Ho-Cheol; Park, Sang-min; Rettner, Charles
- US Patent Application 12/554175; 20110059299
Method of forming oriented block copolymer line patterns, block copolymer line patterns formed thereby, and their use to form patterned articles
patent-application, November 2012
- Russell, Thomas; Hong, Sung; Lee, Doug
- US Patent Application 13/480506; 20120301677
Method of producing nanopatterned articles, and articles produced thereby
patent-application, November 2013
- Russell, Thomas; Park, Soojin; Wang, Jia-Yu
- US Patent Application 13/944329; 20130302632
Method of producing nanopatterned articles, and articles produced thereby
patent-application, August 2016
- Russell, Thomas; Park, Soojin; Wang, Jia-Yu
- US Patent Application 15/138343; 20160236439
Salt Complexation in Block Copolymer Thin Films
journal, November 2006
- Kim, Seung Hyun; Misner, Matthew J.; Yang, Ling
- Macromolecules, Vol. 39, Issue 24, p. 8473-8479
Long-Range Ordering of Diblock Copolymers Induced by Droplet Pinning
journal, November 2003
- Kimura, Masahiro; Misner, Matthew J.; Xu, Ting
- Langmuir, Vol. 19, Issue 23, p. 9910-9913
Characterization of pattern transfer in the fabrication of magnetic nanostructure arrays by block copolymer lithography
journal, June 2007
- Kubo, T.; Parker, J. S.; Hillmyer, M. A.
- Applied Physics Letters, Vol. 90, Issue 23, Article No. 233113
Dense arrays of ordered GaAs nanostructures by selective area growth on substrates patterned by block copolymer lithography
journal, March 2000
- Li, R. R.; Dapkus, P. D.; Thompson, M. E.
- Applied Physics Letters, Vol. 76, Issue 13, p. 1689-1691
Ordered Block-Copolymer Assembly Using Nanoimprint Lithography
journal, September 2004
- Li, Hong-Wei; Huck, Wilhelm T. S.
- Nano Letters, Vol. 4, Issue 9, p. 1633-1636
Spatially Controlled Fabrication of Nanoporous Block Copolymers
journal, October 2004
- Li, Mingqi; Douki, Katsuji; Goto, Ken
- Chemistry of Materials, Vol. 16, Issue 20, p. 3800-3808
Patternable Block Copolymers
book, October 2005
- Li, Mingqi; Coenjarts, Christopher A.; Ober, Christopher K.
- Block Copolymers II, p. 183-226
Block copolymer patterns and templates
journal, September 2006
- Li, Mingqi; Ober, Christopher K.
- Materials Today, Vol. 9, Issue 9, p. 30-39
Hierarchical self-assembly of metal nanostructures on diblock copolymer scaffolds
journal, December 2001
- Lopes, Ward A.; Jaeger, Heinrich M.
- Nature, Vol. 414, Issue 6865, p. 735-738
Plasmonics-A Route to Nanoscale Optical Devices
journal, September 2001
- Maier, S. A.; Brongersma, M. L.; Kik, P. G.
- Advanced Materials, Vol. 13, Issue 19, p. 1501-1505
Controlling Polymer-Surface Interactions with Random Copolymer Brushes
journal, March 1997
- Mansky, P.; Liu, Y.; Huang, E.
- Science, Vol. 275, Issue 5305, p. 1458-1460
Tailored Polymer Surfaces
journal, January 1997
- Mayes, Anne M.; Kumar, Sanat K.
- MRS Bulletin, Vol. 22, Issue 1, p. 43-47
Self-Assembled Masks for the Transfer of Nanometer-Scale Patterns into Surfaces: Characterization by AFM and LFM
journal, February 2002
- Meli, Maria-Victoria; Badia, Antonella; Grütter, Peter
- Nano Letters, Vol. 2, Issue 2, p. 131-135
Optical Alignment and Patterning of Nanoscale Microdomains in a Block Copolymer Thin Film
journal, April 2006
- Morikawa, Y.; Nagano, S.; Watanabe, K.
- Advanced Materials, Vol. 18, Issue 7, p. 883-886
Block Copolymer Lithography
journal, November 2013
- Bates, Christopher M.; Maher, Michael J.; Janes, Dustin W.
- Macromolecules, Vol. 47, Issue 1, p. 2-12
Large area dense nanoscale patterning of arbitrary surfaces
journal, July 2001
- Park, Miri; Chaikin, P. M.; Register, Richard A.
- Applied Physics Letters, Vol. 79, Issue 2, p. 257-259
Double textured cylindrical block copolymer domains via directional solidification on a topographically patterned substrate
journal, August 2001
- Park, Cheolmin; Cheng, Joy Y.; Fasolka, Michael J.
- Applied Physics Letters, Vol. 79, Issue 6, p. 848-850
Large Area Orientation of Block Copolymer Microdomains in Thin Films via Directional Crystallization of a Solvent
journal, April 2001
- Park, Cheolmin; De Rosa, Claudio; Thomas, Edwin L.
- Macromolecules, Vol. 34, Issue 8, p. 2602-2606
Solvent-Induced Transition from Micelles in Solution to Cylindrical Microdomains in Diblock Copolymer Thin Films
journal, December 2007
- Park, Soojin; Wang, Jia-Yu; Kim, Bokyung
- Macromolecules, Vol. 40, Issue 25, p. 9059-9063
Fabrication of Highly Ordered Silicon Oxide Dots and Stripes from Block Copolymer Thin Films
journal, February 2008
- Park, S.; Kim, B.; Wang, J.-Y.
- Advanced Materials, Vol. 20, Issue 4, p. 681-685
From Nanorings to Nanodots by Patterning with Block Copolymers
journal, June 2008
- Park, Soojin; Wang, Jia-Yu; Kim, Bokyung
- Nano Letters, Vol. 8, Issue 6, p. 1667-1672
A Simple Route to Highly Oriented and Ordered Nanoporous Block Copolymer Templates
journal, April 2008
- Park, Soojin; Wang, Jia-Yu; Kim, Bokyung
- ACS Nano, Vol. 2, Issue 4, p. 766-772
Macroscopic 10-Terabit-per-Square-Inch Arrays from Block Copolymers with Lateral Order
journal, February 2009
- Park, Soojin; Lee, Dong Hyun; Xu, Ji
- Science, Vol. 323, Issue 5917, p. 1030-1033
Aluminum nanowire polarizing grids: Fabrication and analysis
journal, May 2006
- Pelletier, Vincent; Asakawa, Koji; Wu, Mingshaw
- Applied Physics Letters, Vol. 88, Issue 21, Article No. 211114
Diblock Copolymer Thin Film Melts on Striped, Heterogeneous Surfaces: Parallel, Perpendicular and Mixed Lamellar Morphologies
journal, February 1999
- Pereira, G. G.; Williams, D. R. M.
- Macromolecules, Vol. 32, Issue 3, p. 758-764
Polymers on Nanoperiodic, Heterogeneous Surfaces
journal, March 1999
- Rockford, L.; Liu, Y.; Mansky, P.
- Physical Review Letters, Vol. 82, Issue 12, p. 2602-2605
Propagation of Nanopatterned Substrate Templated Ordering of Block Copolymers in Thick Films
journal, February 2001
- Rockford, L.; Mochrie, S. G. J.; Russell, T. P.
- Macromolecules, Vol. 34, Issue 5, p. 1487-1492
Patterned Magnetic Recording Media
journal, August 2001
- Ross, C. A.
- Annual Review of Materials Research, Vol. 31, Issue 1, p. 203-235
Block copolymers as nanoscopic templates
journal, October 2000
- Russell, Thomas P.; Thurn-Albrecht, Thomas; Tuominen, Mark
- Macromolecular Symposia, Vol. 159, Issue 1, p. 77-88
Graphoepitaxy of Spherical Domain Block Copolymer Films
journal, August 2001
- Segalman, R. A.; Yokoyama, H.; Kramer, E. J.
- Advanced Materials, Vol. 13, Issue 15, p. 1152-1155
Patterning with block copolymer thin films
journal, February 2005
- Segalman, Rachel A.
- Materials Science and Engineering: R: Reports, Vol. 48, Issue 6, p. 191-226
Sluggish Development of Parallel Lamellae at the Strongly Interacting Interface in Thin Films of Symmetric Diblock Copolymers
journal, December 2002
- Sohn, Byeong-Hyeok; Seo, Byung-Wook; Yoo, Seong Il
- Langmuir, Vol. 18, Issue 26, p. 10505-10508
Directed Self-Assembly of Two Kinds of Nanoparticles Utilizing Monolayer Films of Diblock Copolymer Micelles
journal, May 2003
- Sohn, Byeong-Hyeok; Choi, Jeong-Min; Yoo, Seong Il
- Journal of the American Chemical Society, Vol. 125, Issue 21, p. 6368-6369
Faceting Kinetics of Stepped Si(113) Surfaces: A Time-Resolved X-Ray Scattering Study
journal, June 1995
- Song, S.; Mochrie, S. G. J.; Stephenson, G. B.
- Physical Review Letters, Vol. 74, Issue 26, p. 5240-5243
Attractive step-step interactions, tricriticality, and faceting in the orientational phase diagram of silicon surfaces between [113] and [114]
journal, April 1995
- Song, S.; Mochrie, S. G. J.
- Physical Review B, Vol. 51, Issue 15, p. 10068-10084
Ultrathin Diblock Copolymer/Titanium Laminates—A Tool for Nanolithography
journal, August 1998
- Spatz, Joachim P.; Eibeck, Peter; Mößmer, Stefan
- Advanced Materials, Vol. 10, Issue 11, p. 849-852
Micellar Inorganic-Polymer Hybrid Systems—A Tool for Nanolithography
journal, February 1999
- Spatz, Joachim P.; Herzog, Thomas; Mößmer, Stefan
- Advanced Materials, Vol. 11, Issue 2, p. 149-153
A Combined Top–Down/Bottom–Up Approach to the Microscopic Localization of Metallic Nanodots
journal, December 2002
- Spatz, J. P.; Chan, V. Z.-H.; Mößmer, S.
- Advanced Materials, Vol. 14, Issue 24, p. 1827-1832
Directed Assembly of Block Copolymer Blends into Nonregular Device-Oriented Structures
journal, June 2005
- Stoykovich, Mark P.; Müller, Marcus; Kim, Sang Ouk
- Science, Vol. 308, Issue 5727, p. 1442-1446
Block copolymers and conventional lithography
journal, September 2006
- Stoykovich, Mark P.; Nealey, Paul F.
- Materials Today, Vol. 9, Issue 9, p. 20-29
Long-Range Ordered Thin Films of Block Copolymers Prepared by Zone-Casting and Their Thermal Conversion into Ordered Nanostructured Carbon
journal, May 2005
- Tang, Chuanbing; Tracz, Adam; Kruk, Michal
- Journal of the American Chemical Society, Vol. 127, Issue 19, p. 6918-6919
Spontaneous Vertical Ordering and Pyrolytic Formation of Nanoscopic Ceramic Patterns from Poly(styrene-b-ferrocenylsilane)
journal, February 2003
- Temple, K.; Kulbaba, K.; Power-Billard, K. N.
- Advanced Materials, Vol. 15, Issue 4, p. 297-300
Predicting the Mesophases of Copolymer-Nanoparticle Composites
journal, June 2001
- Thompson, Russell B.; Ginzburg, Valeriy V.; Matsen, Mark W.
- Science, Vol. 292, Issue 5526, p. 2469-2472
Overcoming Interfacial Interactions with Electric Fields
journal, May 2000
- Thurn-Albrecht, T.; DeRouchey, J.; Russell, T. P.
- Macromolecules, Vol. 33, Issue 9, p. 3250-3253
Ultrahigh-Density Nanowire Arrays Grown in Self-Assembled Diblock Copolymer Templates
journal, December 2000
- Thurn-Albrecht, T.; Schotter, J.; Kastle, G. A.
- Science, Vol. 290, Issue 5499, p. 2126-2129
Study of oriented block copolymers films obtained by roll-casting
journal, September 2002
- Villar, Marcelo A.; Rueda, Daniel R.; Ania, Fernando
- Polymer, Vol. 43, Issue 19, p. 5139-5145
Simulations of the Morphology of Cylinder-Forming Asymmetric Diblock Copolymer Thin Films on Nanopatterned Substrates
journal, March 2003
- Wang, Qiang; Nealey, Paul F.; de Pablo, Juan J.
- Macromolecules, Vol. 36, Issue 5, p. 1731-1740
One step fabrication and characterization of platinum nanopore electrode ensembles formed via amphiphilic block copolymer self-assembly
journal, October 2006
- Wang, Chengyin; Shao, Xiaoqiu; Liu, Qingxiu
- Electrochimica Acta, Vol. 52, Issue 2, p. 704-709
Etch rates for micromachining processing-part II
journal, December 2003
- Williams, K.R.; Gupta, K.; Wasilik, M.
- Journal of Microelectromechanical Systems, Vol. 12, Issue 6, p. 761-778
One-Dimensional Arrangements of Metal Nanoclusters
journal, April 2002
- Wyrwa, Daniel; Beyer, Norbert; Schmid, Günter
- Nano Letters, Vol. 2, Issue 4, p. 419-421
The influence of molecular weight on nanoporous polymer films
journal, October 2001
- Xu, Ting; Kim, Ho-Cheol; DeRouchey, Jason
- Polymer, Vol. 42, Issue 21, p. 9091-9095
Block Copolymer Surface Reconstuction: A Reversible Route to Nanoporous Films
journal, September 2003
- Xu, T.; Stevens, J.; Villa, J.A.
- Advanced Functional Materials, Vol. 13, Issue 9, p. 698-702
Interfacial Energy Effects on the Electric Field Alignment of Symmetric Diblock Copolymers
journal, August 2003
- Xu, Ting; Hawker, Craig J.; Russell, Thomas P.
- Macromolecules, Vol. 36, Issue 16, p. 6178-6182
Templating the patterning of gold nanoparticles using a stained triblock copolymer film surface
journal, January 2003
- Ansari, Imtiyaz A.; Hamley, Ian W.
- Journal of Materials Chemistry, Vol. 13, Issue 10, p. 2412-2413
Nano-Patterning for Patterned Media using Block-Copolymer
journal, January 2002
- Asakawa, Koji; Hiraoka, Toshiro; Hieda, Hiroyuki
- Journal of Photopolymer Science and Technology, Vol. 15, Issue 3, p. 465-470
Nanofabrication of integrated magnetoelectronic devices using patterned self-assembled copolymer templates
journal, October 2002
- Bal, M.; Ursache, A.; Tuominen, M. T.
- Applied Physics Letters, Vol. 81, Issue 18, p. 3479-3481
Spin-Dependent Tunneling in Self-Assembled Cobalt-Nanocrystal Superlattices
journal, November 2000
- Black, C. T.; Murray, C. B.; Sandstorm, R. L.
- Science, Vol. 290, Issue 5494, p. 1131-1134
Integration of self-assembled diblock copolymers for semiconductor capacitor fabrication
journal, July 2001
- Black, C. T.; Guarini, K. W.; Milkove, K. R.
- Applied Physics Letters, Vol. 79, Issue 3, p. 409-411
Block Copolymer Nanocomposites: Perspectives for Tailored Functional Materials
journal, June 2005
- Bockstaller, M. R.; Mickiewicz, R. A.; Thomas, E. L.
- Advanced Materials, Vol. 17, Issue 11, p. 1331-1349
Ordered Bicontinuous Nanoporous and Nanorelief Ceramic Films from Self Assembling Polymer Precursors
journal, November 1999
- Chan, Vanessa Z.-H.; Hoffman, James; Lee, Victor Y.
- Science, Vol. 286, Issue 5445, p. 1716-1719
Formation of a Cobalt Magnetic Dot Array via Block Copolymer Lithography
journal, August 2001
- Cheng, J.Y.; Ross, C.A.; Chan, V.Z.-H.
- Advanced Materials, Vol. 13, Issue 15, p. 1174-1178
Fabrication of nanostructures with long-range order using block copolymer lithography
journal, November 2002
- Cheng, J. Y.; Ross, C. A.; Thomas, E. L.
- Applied Physics Letters, Vol. 81, Issue 19, p. 3657-3659
A Highly Regular Two-Dimensional Array of Au Quantum Dots Deposited in a Periodically Nanoporous GaAs Epitaxial Layer
journal, November 2002
- Cheng, G.; Moskovits, M.
- Advanced Materials, Vol. 14, Issue 21, p. 1567-1570
Covalent stabilization of nanostructures: Robust block copolymer templates from novel thermoreactive systems
journal, January 2005
- Drockenmuller, Eric; Li, Lucy Y. T.; Ryu, Du Yeol
- Journal of Polymer Science Part A: Polymer Chemistry, Vol. 43, Issue 5, p. 1028-1037
Additive-Driven Phase-Selective Chemistry in Block Copolymer Thin Films: The Convergence of Top–Down and Bottom–Up Approaches
journal, June 2004
- Du, P.; Li, M.; Douki, K.
- Advanced Materials, Vol. 16, Issue 12, p. 953-957
Orientation of self-assembled block copolymer cylinders perpendicular to electric field in mesoscale film
journal, February 2003
- Elhadj, S.; Woody, J. W.; Niu, V. S.
- Applied Physics Letters, Vol. 82, Issue 6, p. 871-873
Semiconductor Nanowires: From Self-Organization to Patterned Growth
journal, April 2006
- Fan, Hong Jin; Werner, Peter; Zacharias, Margit
- Small, Vol. 2, Issue 6, p. 700-717
Observed Substrate Topography-Mediated Lateral Patterning of Diblock Copolymer Films
journal, October 1997
- Fasolka, M. J.; Harris, D. J.; Mayes, A. M.
- Physical Review Letters, Vol. 79, Issue 16, p. 3018-3021
Block Copolymer Thin Films: Physics and Applications
journal, August 2001
- Fasolka, Michael J.; Mayes, Anne M.
- Annual Review of Materials Research, Vol. 31, Issue 1, p. 323-355
Ultrahigh Pore Density Nanoporous Films Produced by the Phase Separation of Eutectic Al–Si for Template-Assisted Growth of Nanowire Array
journal, August 2004
- Fukutani, K.; Tanji, K.; Motoi, T.
- Advanced Materials, Vol. 16, Issue 16, p. 1456-1460
Nanoscale patterning using self-assembled polymers for semiconductor applications
journal, January 2001
- Guarini, K. W.; Black, C. T.; Milkove, K. R.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 19, Issue 6, Article No. 2784
Process integration of self-assembled polymer templates into silicon nanofabrication
journal, January 2002
- Guarini, K. W.; Black, C. T.; Zhang, Y.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 20, Issue 6, Article No. 2788
Cylinder Alignment in Annular Structures of Microphase-Separated Polystyrene-b-Poly(methyl methacrylate)
journal, May 2000
- Hahm, J.; Sibener, S. J.
- Langmuir, Vol. 16, Issue 11, p. 4766-4769
Nanotechnology with Soft Materials
journal, April 2003
- Hamley, I. W.
- Angewandte Chemie International Edition, Vol. 42, Issue 15, p. 1692-1712
Lithography with a mask of block copolymer microstructures
journal, March 1998
- Harrison, Christopher
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, Issue 2, Article No. 544
Block copolymers as bilevel resists
journal, September 1985
- Hartney, M. A.; Novembre, A. E.; , F. S. Bates
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 3, Issue 5, Article No. 1346
Nanoporous Gold Films Created Using Templates Formed from Self-Assembled Structures of Inorganic–Block Copolymer Micelles
journal, May 2003
- Haupt, M.; Miller, S.; Glass, R.
- Advanced Materials, Vol. 15, Issue 10, p. 829-831
Block Copolymer Lithography: Merging “Bottom-Up” with “Top-Down” Processes
journal, December 2005
- Hawker, Craig J.; Russell, Thomas P.
- MRS Bulletin, Vol. 30, Issue 12, p. 952-966
Thin Diblock Copolymer Films on Chemically Heterogeneous Surfaces
journal, October 1997
- Heier, Jakob; Kramer, Edward J.; Walheim, Stefan
- Macromolecules, Vol. 30, Issue 21, p. 6610-6614
Transfer of a chemical substrate pattern into an island-forming diblock copolymer film
journal, December 1999
- Heier, Jakob; Genzer, Jan; Kramer, Edward J.
- The Journal of Chemical Physics, Vol. 111, Issue 24, p. 11101-11110
Solvent-induced microdomain orientation in polystyrene-b-poly(l-lactide) diblock copolymer thin films for nanopatterning
journal, October 2005
- Ho, Rong-Ming; Tseng, Wen-Hsien; Fan, Hui-Wen
- Polymer, Vol. 46, Issue 22, p. 9362-9377
Impedance Characteristics of the Nanoporous Honeycomb Diamond Electrodes for Electrical Double-Layer Capacitor Applications
journal, May 2001
- Honda, K.; Rao, Tata N.; Tryk, D. A.
- Journal of The Electrochemical Society, Vol. 148, Issue 7, p. A668-A679
Modeling copolymer adsorption on laterally heterogeneous surfaces
journal, February 1991
- Huang, Kanglin; Balazs, Anna C.
- Physical Review Letters, Vol. 66, Issue 5, p. 620-623
Catalytic Activity of Supported Au Nanoparticles Deposited from Block Copolymer Micelles
journal, June 2003
- Jaramillo, Thomas F.; Baeck, Sung-Hyeon; Cuenya, Beatriz Roldan
- Journal of the American Chemical Society, Vol. 125, Issue 24, p. 7148-7149
Phase transition behavior in thin films of block copolymers by use of immiscible solvent vapors
journal, January 2011
- Kim, Bokyung; Hong, Sung Woo; Park, Soojin
- Soft Matter, Vol. 7, Issue 2, p. 443-447
Highly Oriented and Ordered Arrays from Block Copolymers via Solvent Evaporation
journal, February 2004
- Kim, S. H.; Misner, M. J.; Xu, T.
- Advanced Materials, Vol. 16, Issue 3, p. 226-231
Nanoparticle-Induced Phase Transitions in Diblock-Copolymer Films
journal, November 2005
- Kim, B. J.; Chiu, J. J.; Yi, G.-R.
- Advanced Materials, Vol. 17, Issue 21, p. 2618-2622
Enabling nanotechnology with self assembled block copolymer patterns
journal, October 2003
- Park, Cheolmin; Yoon, Jongseung; Thomas, Edwin L.
- Polymer, Vol. 44, Issue 22, p. 6725-6760
New Approaches to Nanofabrication: Molding, Printing, and Other Techniques
journal, April 2005
- Gates, Byron D.; Xu, Qiaobing; Stewart, Michael
- Chemical Reviews, Vol. 105, Issue 4, p. 1171-1196
Three-Dimensional Self-Assembly of Spherical Block Copolymer Domains into V-Shaped Grooves
journal, October 2006
- Chuang, Vivian P.; Cheng, Joy Y.; Savas, Tim A.
- Nano Letters, Vol. 6, Issue 10, p. 2332-2337
Nanoring formation by direct-write inorganic electron-beam lithography
journal, July 2003
- Jiang, N.; Hembree, G. G.; Spence, J. C. H.
- Applied Physics Letters, Vol. 83, Issue 3, p. 551-553
Fabrication of metal nanoring array by nanoimprint lithography (NIL) and reactive ion etching
journal, May 2007
- Cui, Bo; Veres, Teodor
- Microelectronic Engineering, Vol. 84, Issue 5-8, p. 1544-1547
Nanotailored Crystalline Morphology in Hexagonally Perforated Layers of a Self-Assembled PS-b-PEO Diblock Copolymer
journal, April 2002
- Zhu, Lei; Huang, Ping; Chen, William Y.
- Macromolecules, Vol. 35, Issue 9, p. 3553-3562
Fabrication Approaches for Generating Complex Micro- and Nanopatterns on Polymeric Surfaces
journal, March 2008
- del Campo, Aránzazu; Arzt, Eduard
- Chemical Reviews, Vol. 108, Issue 3, p. 911-945