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Title: Method of producing nanopatterned articles using surface-reconstructed block copolymer films

Abstract

Nanopatterned surfaces are prepared by a method that includes forming a block copolymer film on a substrate, annealing and surface reconstructing the block copolymer film to create an array of cylindrical voids, depositing a metal on the surface-reconstructed block copolymer film, and heating the metal-coated block copolymer film to redistribute at least some of the metal into the cylindrical voids. When very thin metal layers and low heating temperatures are used, metal nanodots can be formed. When thicker metal layers and higher heating temperatures are used, the resulting metal structure includes nanoring-shaped voids. The nanopatterned surfaces can be transferred to the underlying substrates via etching, or used to prepare nanodot- or nanoring-decorated substrate surfaces.

Inventors:
; ; ;
Issue Date:
Research Org.:
The University of Massachusetts (Boston, MA)
Sponsoring Org.:
USDOE
OSTI Identifier:
1093291
Patent Number(s):
8,518,837
Application Number:
12/566,705
Assignee:
The University of Massachusetts (Boston, MA)
DOE Contract Number:  
FG02-96ER45612
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Russell, Thomas P, Park, Soojin, Wang, Jia-Yu, and Kim, Bokyung. Method of producing nanopatterned articles using surface-reconstructed block copolymer films. United States: N. p., 2013. Web.
Russell, Thomas P, Park, Soojin, Wang, Jia-Yu, & Kim, Bokyung. Method of producing nanopatterned articles using surface-reconstructed block copolymer films. United States.
Russell, Thomas P, Park, Soojin, Wang, Jia-Yu, and Kim, Bokyung. Tue . "Method of producing nanopatterned articles using surface-reconstructed block copolymer films". United States. https://www.osti.gov/servlets/purl/1093291.
@article{osti_1093291,
title = {Method of producing nanopatterned articles using surface-reconstructed block copolymer films},
author = {Russell, Thomas P and Park, Soojin and Wang, Jia-Yu and Kim, Bokyung},
abstractNote = {Nanopatterned surfaces are prepared by a method that includes forming a block copolymer film on a substrate, annealing and surface reconstructing the block copolymer film to create an array of cylindrical voids, depositing a metal on the surface-reconstructed block copolymer film, and heating the metal-coated block copolymer film to redistribute at least some of the metal into the cylindrical voids. When very thin metal layers and low heating temperatures are used, metal nanodots can be formed. When thicker metal layers and higher heating temperatures are used, the resulting metal structure includes nanoring-shaped voids. The nanopatterned surfaces can be transferred to the underlying substrates via etching, or used to prepare nanodot- or nanoring-decorated substrate surfaces.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2013},
month = {8}
}

Patent:

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