Method of producing nanopatterned articles using surface-reconstructed block copolymer films

Russell, Thomas P; Park, Soojin; Wang, Jia-Yu; Kim, Bokyung

Title: Method of producing nanopatterned articles using surface-reconstructed block copolymer films

Abstract

Nanopatterned surfaces are prepared by a method that includes forming a block copolymer film on a substrate, annealing and surface reconstructing the block copolymer film to create an array of cylindrical voids, depositing a metal on the surface-reconstructed block copolymer film, and heating the metal-coated block copolymer film to redistribute at least some of the metal into the cylindrical voids. When very thin metal layers and low heating temperatures are used, metal nanodots can be formed. When thicker metal layers and higher heating temperatures are used, the resulting metal structure includes nanoring-shaped voids. The nanopatterned surfaces can be transferred to the underlying substrates via etching, or used to prepare nanodot- or nanoring-decorated substrate surfaces.

Inventors:: Russell, Thomas P; Park, Soojin; Wang, Jia-Yu; Kim, Bokyung

Issue Date:: 2013-08-27

Research Org.:: The University of Massachusetts (Boston, MA)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1093291

Patent Number(s):: 8518837

Application Number:: 12/566,705

Assignee:: The University of Massachusetts (Boston, MA)

Patent Classifications (CPCs):: B - PERFORMING OPERATIONS B32 - LAYERED PRODUCTS B32B - LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM

B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS

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B - PERFORMING OPERATIONS B32 - LAYERED PRODUCTS B32B - LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
B32B2264/105 - Metal particles
B32B3/10 - characterised by a discontinuous layer, i.e. formed of separate pieces of material
B32B5/16 - characterised by features of a layer formed of particles, e.g. chips, powder {, granules

B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
B81C1/00031 - {Regular or irregular arrays of nanoscale structures, e.g. etch mask layer
B81C2201/0149 - Forming nanoscale microstructures using auto-arranging or self-assembling material

B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
B82Y30/00 - Nanotechnology for materials or surface science, e.g. nanocomposites

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
Y10T428/12049 - Nonmetal component
Y10T428/24355 - Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]

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DOE Contract Number:: FG02-96ER45612

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE

Citation Formats


                    Russell, Thomas P, Park, Soojin, Wang, Jia-Yu, and Kim, Bokyung. Method of producing nanopatterned articles using surface-reconstructed block copolymer films.  United States: N. p., 2013. 
        Web.

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                    Russell, Thomas P, Park, Soojin, Wang, Jia-Yu, & Kim, Bokyung. Method of producing nanopatterned articles using surface-reconstructed block copolymer films.  United States.

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                    Russell, Thomas P, Park, Soojin, Wang, Jia-Yu, and Kim, Bokyung. Tue .  
        "Method of producing nanopatterned articles using surface-reconstructed block copolymer films".  United States.  https://www.osti.gov/servlets/purl/1093291.

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@article{osti_1093291,

  title        = {Method of producing nanopatterned articles using surface-reconstructed block copolymer films},

  author       = {Russell, Thomas P and Park, Soojin and Wang, Jia-Yu and Kim, Bokyung},

  abstractNote = {Nanopatterned surfaces are prepared by a method that includes forming a block copolymer film on a substrate, annealing and surface reconstructing the block copolymer film to create an array of cylindrical voids, depositing a metal on the surface-reconstructed block copolymer film, and heating the metal-coated block copolymer film to redistribute at least some of the metal into the cylindrical voids. When very thin metal layers and low heating temperatures are used, metal nanodots can be formed. When thicker metal layers and higher heating temperatures are used, the resulting metal structure includes nanoring-shaped voids. The nanopatterned surfaces can be transferred to the underlying substrates via etching, or used to prepare nanodot- or nanoring-decorated substrate surfaces.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2013},

  month        = {8}

}

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Title: Method of producing nanopatterned articles using surface-reconstructed block copolymer films

Abstract

Citation Formats

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Solvent-Induced Transition from Micelles in Solution to Cylindrical Microdomains in Diblock Copolymer Thin Films journal, December 2007

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Phase transition behavior in thin films of block copolymers by use of immiscible solvent vapors
journal, January 2011

Semiconductor Nanowires: From Self-Organization to Patterned Growth
journal, April 2006

Large Area Orientation of Block Copolymer Microdomains in Thin Films via Directional Crystallization of a Solvent
journal, April 2001

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journal, December 2002

Ultrahigh Pore Density Nanoporous Films Produced by the Phase Separation of Eutectic Al–Si for Template-Assisted Growth of Nanowire Array
journal, August 2004

Patterned Magnetic Recording Media
journal, August 2001

Study of oriented block copolymers films obtained by roll-casting
journal, September 2002

Method of producing nanopatterned templates
patent-application, September 2008

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journal, September 2003

Block Copolymer Nanocomposites: Perspectives for Tailored Functional Materials
journal, June 2005

Solvent-Induced Transition from Micelles in Solution to Cylindrical Microdomains in Diblock Copolymer Thin Films
journal, December 2007

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journal, June 2003

Propagation of Nanopatterned Substrate Templated Ordering of Block Copolymers in Thick Films
journal, February 2001

Nanodomain control in copolymer thin films
journal, October 1998

Block Copolymer Lithography: Periodic Arrays of 10¹¹ Holes in 1 Square Centimeter
journal, May 1997

Guided Self-Assembly of Symmetric Diblock Copolymer Films on Chemically Nanopatterned Substrates
journal, December 2000

Patterning with block copolymer thin films
journal, February 2005

Method of manufacturing a wafer
patent, November 2006

Ordered Bicontinuous Nanoporous and Nanorelief Ceramic Films from Self Assembling Polymer Precursors
journal, November 1999

Modeling copolymer adsorption on laterally heterogeneous surfaces
journal, February 1991

Nano-Patterning for Patterned Media using Block-Copolymer
journal, January 2002

Nano-structured micropatterns by combination of block copolymer self-assembly and UV photolithography
journal, September 2006

Method for catalytic growth of nanotubes or nanofibers comprising a nisi alloy diffusion barrier
patent-application, October 2005

Large-Scale Alignment of ABC Block Copolymer Microdomains via Solvent Vapor Treatment
journal, February 2000

Highly Oriented and Ordered Arrays from Block Copolymers via Solvent Evaporation
journal, February 2004

UV nanoimprint lithography process using elementwise embossed stamp and selectively additive pressurization
patent, September 2005

A Simple Route to Highly Oriented and Ordered Nanoporous Block Copolymer Templates
journal, April 2008

Simulations of the Morphology of Cylinder-Forming Asymmetric Diblock Copolymer Thin Films on Nanopatterned Substrates
journal, March 2003

Spatially Controlled Fabrication of Nanoporous Block Copolymers
journal, October 2004

Control of Nanoparticle Location in Block Copolymers
journal, April 2005

Additive-Driven Phase-Selective Chemistry in Block Copolymer Thin Films: The Convergence of Top–Down and Bottom–Up Approaches
journal, June 2004

Guided self-assembly of block copolymer films on interferometrically nanopatterned substrates
patent, August 2005

Etch rates for micromachining processing-part II
journal, December 2003

Reading and Writing with Electron Beams
journal, October 1997

Aluminum nanowire polarizing grids: Fabrication and analysis
journal, May 2006

A method of synthesizing nanoscale filamentary structures and electronic components comprising such structures
patent-application, December 2006

Nanoporous structures produced from self-assembling molecules
patent, April 2006

Directed Self-Assembly of Two Kinds of Nanoparticles Utilizing Monolayer Films of Diblock Copolymer Micelles
journal, May 2003

Sluggish Development of Parallel Lamellae at the Strongly Interacting Interface in Thin Films of Symmetric Diblock Copolymers
journal, December 2002

Dense arrays of ordered GaAs nanostructures by selective area growth on substrates patterned by block copolymer lithography
journal, March 2000

Electron Transfer in Self-Assembled Inorganic Polyelectrolyte/Metal Nanoparticle Heterostructures
journal, January 1996

Guided self-assembly of block copolymer films on interferometrically nanopatterned substrates
patent-application, September 2004

Single-Grain Lamellar Microdomain from a Diblock Copolymer
journal, March 1999

From Nanorings to Nanodots by Patterning with Block Copolymers
journal, June 2008

Poly(ferrocenyldimethylsilanes) for Reactive Ion Etch Barrier Applications
journal, February 2001

Spontaneous Vertical Ordering and Pyrolytic Formation of Nanoscopic Ceramic Patterns from Poly(styrene-b-ferrocenylsilane)
journal, February 2003

Spin-Dependent Tunneling in Self-Assembled Cobalt-Nanocrystal Superlattices
journal, November 2000

Block copolymers as bilevel resists
journal, September 1985

Nanoimprint lithography
patent, June 1998

Method for manufacturing porous structure and method for forming pattern
patent-application, October 2006

Poly(alkenyl substituted aromatic) and elastomer containing polymer compositions and process for their preparation
patent, January 1992

Inorganic nanoporous membranes and methods to form same
patent-application, July 2004

Liquid electrophotographic toners comprising amphipathic copolymers having acidic or basic functionality and wax having basic or acidic functionality
patent-application, May 2006

Self-directed self-assembly of nanoparticle/copolymer mixtures
journal, March 2005

Structure And Method For Stochastic Integrated Circuit Personalization
patent-application, July 2008

Thin Diblock Copolymer Films on Chemically Heterogeneous Surfaces
journal, October 1997

Epitaxial self-assembly of block copolymers on lithographically defined nanopatterned substrates
journal, July 2003

Nanopatterned templates from oriented degradable diblock copolymer thin films
patent-application, December 2004

Self-assembly of functional nanostructures from ABC triblock copolymers
journal, October 2003

Small Angle Neutron Scattering Studies on Ultrathin Films
journal, May 1995

Ultrahigh-Density Nanowire Arrays Grown in Self-Assembled Diblock Copolymer Templates
journal, December 2000

Tailored Polymer Surfaces
journal, January 1997

Controlling Polymer-Surface Interactions with Random Copolymer Brushes
journal, March 1997

Nanofabrication of integrated magnetoelectronic devices using patterned self-assembled copolymer templates
journal, October 2002

Attractive step-step interactions, tricriticality, and faceting in the orientational phase diagram of silicon surfaces between [113] and [114]
journal, April 1995

Directed Assembly of Block Copolymer Blends into Nonregular Device-Oriented Structures
journal, June 2005

Optical Alignment and Patterning of Nanoscale Microdomains in a Block Copolymer Thin Film
journal, April 2006

Nanoporous Gold Films Created Using Templates Formed from Self-Assembled Structures of Inorganic–Block Copolymer Micelles
journal, May 2003

Characterization of pattern transfer in the fabrication of magnetic nanostructure arrays by block copolymer lithography
journal, June 2007

Block copolymers and conventional lithography
journal, September 2006

Morphological Development in Solvent-Cast Polystyrene−Polybutadiene−Polystyrene (SBS) Triblock Copolymer Thin Films
journal, April 1998

Impedance Characteristics of the Nanoporous Honeycomb Diamond Electrodes for Electrical Double-Layer Capacitor Applications
journal, May 2001

Method for fabricating spaced-apart nanostructures
patent, February 2005

Indium gallium nitride smoothing structures for III-nitride devices
patent, October 2003

Nanoscale patterning using self-assembled polymers for semiconductor applications
journal, January 2001

Ordered Block-Copolymer Assembly Using Nanoimprint Lithography
journal, September 2004

Self-assembly of block copolymers on topographically patterned polymeric substrates
patent-application, March 2010

Enabling nanotechnology with self assembled block copolymer patterns
journal, October 2003

The influence of molecular weight on nanoporous polymer films
journal, October 2001

Multilayer antireflection coatings, structures and devices including the same and methods of making the same
patent-application, December 2008