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Title: Nanopatterned articles produced using surface-reconstructed block copolymer films

Abstract

Nanopatterned surfaces are prepared by a method that includes forming a block copolymer film on a substrate, annealing and surface reconstructing the block copolymer film to create an array of cylindrical voids, depositing a metal on the surface-reconstructed block copolymer film, and heating the metal-coated block copolymer film to redistribute at least some of the metal into the cylindrical voids. When very thin metal layers and low heating temperatures are used, metal nanodots can be formed. When thicker metal layers and higher heating temperatures are used, the resulting metal structure includes nanoring-shaped voids. The nanopatterned surfaces can be transferred to the underlying substrates via etching, or used to prepare nanodot- or nanoring-decorated substrate surfaces.

Inventors:
; ; ;
Issue Date:
Research Org.:
THE UNIVERSITY OF MASSACHUSETTS, Boston, MA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1256017
Patent Number(s):
9358750
Application Number:
13/944,329
Assignee:
THE UNIVERSITY OF MASSACHUSETTS (Boston, MA)
Patent Classifications (CPCs):
B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
DOE Contract Number:  
FG02-96ER45612
Resource Type:
Patent
Resource Relation:
Patent File Date: 2013 Jul 17
Country of Publication:
United States
Language:
English
Subject:
77 NANOSCIENCE AND NANOTECHNOLOGY; 36 MATERIALS SCIENCE

Citation Formats

Russell, Thomas P., Park, Soojin, Wang, Jia-Yu, and Kim, Bokyung. Nanopatterned articles produced using surface-reconstructed block copolymer films. United States: N. p., 2016. Web.
Russell, Thomas P., Park, Soojin, Wang, Jia-Yu, & Kim, Bokyung. Nanopatterned articles produced using surface-reconstructed block copolymer films. United States.
Russell, Thomas P., Park, Soojin, Wang, Jia-Yu, and Kim, Bokyung. Tue . "Nanopatterned articles produced using surface-reconstructed block copolymer films". United States. https://www.osti.gov/servlets/purl/1256017.
@article{osti_1256017,
title = {Nanopatterned articles produced using surface-reconstructed block copolymer films},
author = {Russell, Thomas P. and Park, Soojin and Wang, Jia-Yu and Kim, Bokyung},
abstractNote = {Nanopatterned surfaces are prepared by a method that includes forming a block copolymer film on a substrate, annealing and surface reconstructing the block copolymer film to create an array of cylindrical voids, depositing a metal on the surface-reconstructed block copolymer film, and heating the metal-coated block copolymer film to redistribute at least some of the metal into the cylindrical voids. When very thin metal layers and low heating temperatures are used, metal nanodots can be formed. When thicker metal layers and higher heating temperatures are used, the resulting metal structure includes nanoring-shaped voids. The nanopatterned surfaces can be transferred to the underlying substrates via etching, or used to prepare nanodot- or nanoring-decorated substrate surfaces.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2016},
month = {6}
}

Patent:

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Works referenced in this record:

Nanotailored Crystalline Morphology in Hexagonally Perforated Layers of a Self-Assembled PS-b-PEO Diblock Copolymer
journal, April 2002


New Approaches to Nanofabrication:  Molding, Printing, and Other Techniques
journal, April 2005


Ordering and Melting of Block Copolymer Spherical Domains in 2 and 3 Dimensions
journal, May 2003


Three-Dimensional Self-Assembly of Spherical Block Copolymer Domains into V-Shaped Grooves
journal, October 2006


Nanoparticle-Induced Phase Transitions in Diblock-Copolymer Films
journal, November 2005


Enabling nanotechnology with self assembled block copolymer patterns
journal, October 2003


Phase transition behavior in thin films of block copolymers by use of immiscible solvent vapors
journal, January 2011


Large Area Orientation of Block Copolymer Microdomains in Thin Films via Directional Crystallization of a Solvent
journal, April 2001


Diblock Copolymer Thin Film Melts on Striped, Heterogeneous Surfaces:  Parallel, Perpendicular and Mixed Lamellar Morphologies
journal, February 1999


Epitaxial self-assembly of block copolymers on lithographically defined nanopatterned substrates
journal, July 2003


Modeling copolymer adsorption on laterally heterogeneous surfaces
journal, February 1991


Block copolymers and conventional lithography
journal, September 2006


Guided Self-Assembly of Symmetric Diblock Copolymer Films on Chemically Nanopatterned Substrates
journal, December 2000


Spontaneous Vertical Ordering and Pyrolytic Formation of Nanoscopic Ceramic Patterns from Poly(styrene-b-ferrocenylsilane)
journal, February 2003


Interfacial Energy Effects on the Electric Field Alignment of Symmetric Diblock Copolymers
journal, August 2003


A Simple Route to Highly Oriented and Ordered Nanoporous Block Copolymer Templates
journal, April 2008


Poly(ferrocenyldimethylsilanes) for Reactive Ion Etch Barrier Applications
journal, February 2001


Large-Scale Alignment of ABC Block Copolymer Microdomains via Solvent Vapor Treatment
journal, February 2000


Block Copolymer Thin Films: Physics and Applications
journal, August 2001


Thin Diblock Copolymer Films on Chemically Heterogeneous Surfaces
journal, October 1997


Block copolymers as bilevel resists
journal, September 1985

  • Hartney, M. A.; Novembre, A. E.; , F. S. Bates
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 3, Issue 5, Article No. 1346
  • https://doi.org/10.1116/1.582991

Lithography with a mask of block copolymer microstructures
journal, March 1998

  • Harrison, Christopher
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, Issue 2, Article No. 544
  • https://doi.org/10.1116/1.589860

Nanoscale patterning using self-assembled polymers for semiconductor applications
journal, January 2001

  • Guarini, K. W.; Black, C. T.; Milkove, K. R.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 19, Issue 6, Article No. 2784
  • https://doi.org/10.1116/1.1421551

Orientation of self-assembled block copolymer cylinders perpendicular to electric field in mesoscale film
journal, February 2003


Ordered Bicontinuous Nanoporous and Nanorelief Ceramic Films from Self Assembling Polymer Precursors
journal, November 1999


Integration of self-assembled diblock copolymers for semiconductor capacitor fabrication
journal, July 2001


Nanofabrication of integrated magnetoelectronic devices using patterned self-assembled copolymer templates
journal, October 2002


Propagation of Nanopatterned Substrate Templated Ordering of Block Copolymers in Thick Films
journal, February 2001


Fabrication Approaches for Generating Complex Micro- and Nanopatterns on Polymeric Surfaces
journal, March 2008