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Title: Nanopatterned articles produced using reconstructed block copolymer films

Nanopatterned surfaces are prepared by a method that includes forming a block copolymer film on a substrate, annealing and surface reconstructing the block copolymer film to create an array of cylindrical voids, depositing a metal on the surface-reconstructed block copolymer film, and heating the metal-coated block copolymer film to redistribute at least some of the metal into the cylindrical voids. When very thin metal layers and low heating temperatures are used, metal nanodots can be formed. When thicker metal layers and higher heating temperatures are used, the resulting metal structure includes nanoring-shaped voids. The nanopatterned surfaces can be transferred to the underlying substrates via etching, or used to prepare nanodot- or nanoring-decorated substrate surfaces.
Inventors:
; ; ;
Issue Date:
OSTI Identifier:
1354817
Assignee:
THE UNIVERSITY OF MASSACHUSETTS CHO
Patent Number(s):
9,636,887
Application Number:
15/138,343
Contract Number:
FG02-96ER45612
Resource Relation:
Patent File Date: 2016 Apr 26
Research Org:
THE UNIVERSITY OF MASSACHUSETTS, Boston, MA (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 77 NANOSCIENCE AND NANOTECHNOLOGY

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