Method to fabricate micro and nano diamond devices
Abstract
A method including forming a diamond material on the surface of a substrate; forming a first contact and a separate second contact; and patterning the diamond material to form a nanowire between the first contact and the second contact. An apparatus including a first contact and a separate second contact on a substrate; and a nanowire including a single crystalline or polycrystalline diamond material on the substrate and connected to each of the first contact and the second contact.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1351066
- Patent Number(s):
- 9620596
- Application Number:
- 14/490,518
- Assignee:
- Sandia Corporation
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2014 Sep 18
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Morales, Alfredo M., Anderson, Richard J., Yang, Nancy Y. C., Skinner, Jack L., and Rye, Michael J. Method to fabricate micro and nano diamond devices. United States: N. p., 2017.
Web.
Morales, Alfredo M., Anderson, Richard J., Yang, Nancy Y. C., Skinner, Jack L., & Rye, Michael J. Method to fabricate micro and nano diamond devices. United States.
Morales, Alfredo M., Anderson, Richard J., Yang, Nancy Y. C., Skinner, Jack L., and Rye, Michael J. Tue .
"Method to fabricate micro and nano diamond devices". United States. https://www.osti.gov/servlets/purl/1351066.
@article{osti_1351066,
title = {Method to fabricate micro and nano diamond devices},
author = {Morales, Alfredo M. and Anderson, Richard J. and Yang, Nancy Y. C. and Skinner, Jack L. and Rye, Michael J.},
abstractNote = {A method including forming a diamond material on the surface of a substrate; forming a first contact and a separate second contact; and patterning the diamond material to form a nanowire between the first contact and the second contact. An apparatus including a first contact and a separate second contact on a substrate; and a nanowire including a single crystalline or polycrystalline diamond material on the substrate and connected to each of the first contact and the second contact.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2017},
month = {4}
}
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