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Title: Method to fabricate micro and nano diamond devices

Abstract

A method including forming a diamond material on the surface of a substrate; forming a first contact and a separate second contact; and patterning the diamond material to form a nanowire between the first contact and the second contact. An apparatus including a first contact and a separate second contact on a substrate; and a nanowire including a single crystalline or polycrystalline diamond material on the substrate and connected to each of the first contact and the second contact.

Inventors:
; ; ; ;
Issue Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1351066
Patent Number(s):
9620596
Application Number:
14/490,518
Assignee:
Sandia Corporation
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Resource Relation:
Patent File Date: 2014 Sep 18
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Morales, Alfredo M., Anderson, Richard J., Yang, Nancy Y. C., Skinner, Jack L., and Rye, Michael J.. Method to fabricate micro and nano diamond devices. United States: N. p., 2017. Web.
Morales, Alfredo M., Anderson, Richard J., Yang, Nancy Y. C., Skinner, Jack L., & Rye, Michael J.. Method to fabricate micro and nano diamond devices. United States.
Morales, Alfredo M., Anderson, Richard J., Yang, Nancy Y. C., Skinner, Jack L., and Rye, Michael J.. Tue . "Method to fabricate micro and nano diamond devices". United States. https://www.osti.gov/servlets/purl/1351066.
@article{osti_1351066,
title = {Method to fabricate micro and nano diamond devices},
author = {Morales, Alfredo M. and Anderson, Richard J. and Yang, Nancy Y. C. and Skinner, Jack L. and Rye, Michael J.},
abstractNote = {A method including forming a diamond material on the surface of a substrate; forming a first contact and a separate second contact; and patterning the diamond material to form a nanowire between the first contact and the second contact. An apparatus including a first contact and a separate second contact on a substrate; and a nanowire including a single crystalline or polycrystalline diamond material on the substrate and connected to each of the first contact and the second contact.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2017},
month = {4}
}

Works referenced in this record:

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patent, May 1997


Diamond cold cathode
patent, September 1997


Method of fabricating n-type semiconductor diamond, and semiconductor diamond
patent, January 2009


Large-area nanoenabled macroelectronic substrates and uses therefor
patent-application, April 2005


Semiconductor nano-rod devices
patent-application, June 2005


All diamond self-aligned thin film transistor
patent-application, March 2006


Methods of Making Nanowires
patent-application, August 2013


High-performance lithium battery anodes using silicon nanowires
journal, December 2007


Self-consistent-charge density-functional tight-binding method for simulations of complex materials properties
journal, September 1998


Efficient hybrid density functional calculations in solids: Assessment of the Heyd–Scuseria–Ernzerhof screened Coulomb hybrid functional
journal, July 2004


Cross-sectional transmission electron microscopy method and studies of implant damage in single crystal diamond
journal, July 2006

  • Hickey, D. P.; Kuryliw, E.; Siebein, K.
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 24, Issue 4, p. 1302-1307
  • https://doi.org/10.1116/1.2209659

Focused ion beam patterning of diamondlike carbon films
journal, July 1999


Fabrication of GaN-based nanoscale device structures utilizing focused ion beam induced Pt deposition
journal, July 2006