Micro/nano devices fabricated from Cu-Hf thin films
Abstract
An all-metal microdevice or nanodevice such as an atomic force microscope probe is manufactured from a copper-hafnium alloy thin film having an x-ray amorphous microstructure.
- Inventors:
- Issue Date:
- Research Org.:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1084331
- Patent Number(s):
- 8458811
- Application Number:
- 13/072,343
- Assignee:
- The Governors of the University of Alberta (Edmonton, Alberta, CA); The Regents of the University of California (Oakland, CA)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01Q - SCANNING-PROBE TECHNIQUES OR APPARATUS
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
- DOE Contract Number:
- AC02-05CH11231
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Luber, Erik J, Ophus, Colin, Mitlin, David, Olsen, Brian, Harrower, Christopher, and Radmilovi, Velimir. Micro/nano devices fabricated from Cu-Hf thin films. United States: N. p., 2013.
Web.
Luber, Erik J, Ophus, Colin, Mitlin, David, Olsen, Brian, Harrower, Christopher, & Radmilovi, Velimir. Micro/nano devices fabricated from Cu-Hf thin films. United States.
Luber, Erik J, Ophus, Colin, Mitlin, David, Olsen, Brian, Harrower, Christopher, and Radmilovi, Velimir. Tue .
"Micro/nano devices fabricated from Cu-Hf thin films". United States. https://www.osti.gov/servlets/purl/1084331.
@article{osti_1084331,
title = {Micro/nano devices fabricated from Cu-Hf thin films},
author = {Luber, Erik J and Ophus, Colin and Mitlin, David and Olsen, Brian and Harrower, Christopher and Radmilovi, Velimir},
abstractNote = {An all-metal microdevice or nanodevice such as an atomic force microscope probe is manufactured from a copper-hafnium alloy thin film having an x-ray amorphous microstructure.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2013},
month = {6}
}
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