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Title: Micro/nano devices fabricated from Cu-Hf thin films

Abstract

An all-metal microdevice or nanodevice such as an atomic force microscope probe is manufactured from a copper-hafnium alloy thin film having an x-ray amorphous microstructure.

Inventors:
; ; ; ; ;
Issue Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1084331
Patent Number(s):
8458811
Application Number:
13/072,343
Assignee:
The Governors of the University of Alberta (Edmonton, Alberta, CA); The Regents of the University of California (Oakland, CA)
Patent Classifications (CPCs):
G - PHYSICS G01 - MEASURING G01Q - SCANNING-PROBE TECHNIQUES OR APPARATUS
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
DOE Contract Number:  
AC02-05CH11231
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Luber, Erik J, Ophus, Colin, Mitlin, David, Olsen, Brian, Harrower, Christopher, and Radmilovi, Velimir. Micro/nano devices fabricated from Cu-Hf thin films. United States: N. p., 2013. Web.
Luber, Erik J, Ophus, Colin, Mitlin, David, Olsen, Brian, Harrower, Christopher, & Radmilovi, Velimir. Micro/nano devices fabricated from Cu-Hf thin films. United States.
Luber, Erik J, Ophus, Colin, Mitlin, David, Olsen, Brian, Harrower, Christopher, and Radmilovi, Velimir. Tue . "Micro/nano devices fabricated from Cu-Hf thin films". United States. https://www.osti.gov/servlets/purl/1084331.
@article{osti_1084331,
title = {Micro/nano devices fabricated from Cu-Hf thin films},
author = {Luber, Erik J and Ophus, Colin and Mitlin, David and Olsen, Brian and Harrower, Christopher and Radmilovi, Velimir},
abstractNote = {An all-metal microdevice or nanodevice such as an atomic force microscope probe is manufactured from a copper-hafnium alloy thin film having an x-ray amorphous microstructure.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2013},
month = {6}
}

Works referenced in this record:

New approaches to atomic force microscope lithography on silicon
journal, November 1997


High copper content bulk glass formation in bimetallic Cu-Hf system
journal, February 2005


Etch rates for micromachining processing-part II
journal, December 2003


Surface Studies by Scanning Tunneling Microscopy
journal, July 1982


Microfabricated small metal cantilevers with silicon tip for atomic force microscopy
journal, March 2000


Thermally-treated Pt-coated silicon AFM tips for wear resistance in ferroelectric data storage
journal, September 2008


Microfabrication of cantilever styli for the atomic force microscope
journal, July 1990

  • Albrecht, T. R.; Akamine, S.; Carver, T. E.
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 8, Issue 4
  • https://doi.org/10.1116/1.576520

Reevaluation of the Cu–Hf binary system
journal, December 2006


Electronic Effects in the Elastic Constants of n -Type Silicon
journal, September 1967


Temperature and pressure dependence of resonance in multi-layer microcantilevers
journal, June 2005


Surface Characterization of Cu−M (M = Ti, Zr, or Hf) Alloy Powder Catalysts
journal, October 1998


Improvement of thermally induced bending of cantilevers used for atomic force microscopy
journal, March 1995


All-metal AFM probes fabricated from microstructurally tailored Cu–Hf thin films
journal, August 2009


Studies of multilayers of Cu-Hf with a variable-energy positron beam
journal, December 1994


Conductive polymer patterned media fabricated by diblock copolymer lithography for scanning multiprobe data storage
journal, October 2008


Structural Aspects of the Electrical Resistivity of Binary Alloys
journal, October 1970


Thermomechanical writing with an atomic force microscope tip
journal, August 1992


Stress and grain growth in thin films
journal, May 1996


Towards wet anisotropic silicon etching of perfect pyramidal pits
journal, May 2007


Atomic packing and short-to-medium-range order in metallic glasses
journal, January 2006


Improved atomic force microscope images using microcantilevers with sharp tips
journal, July 1990


Metallic NEMS components fabricated from nanocomposite Al–Mo films
journal, June 2006


Measurements of stress during vapor deposition of copper and silver thin films and multilayers
journal, December 1996


Interfaces and stresses in thin films
journal, January 2000


Electrically conducting probes with full tungsten cantilever and tip for scanning probe applications
journal, February 2006


Glass forming ability: Miedema approach to (Zr, Ti, Hf)–(Cu, Ni) binary and ternary alloys
journal, October 2008


Three-dimensional design and replication of silicon oxide nanostructures using an atomic force microscope
journal, July 2007


Local atomic structure in disordered and nanocrystalline catalytic materials
journal, November 2007


Thermodynamic assessment of the copper-hafnium system
journal, March 2008


A mould-and-transfer technology for fabricating scanning probe microscopy probes
journal, October 2003


Bulk metallic glasses with large plasticity: Composition design from the structural perspective
journal, February 2009


Temperature dependence of the thermodynamic functions of strongly interacting liquid alloys
journal, June 1992