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Title: Method to fabricate micro and nano diamond devices

A method including forming a diamond material on the surface of a substrate; forming a first contact and a separate second contact; and patterning the diamond material to form a nanowire between the first contact and the second contact. An apparatus including a first contact and a separate second contact on a substrate; and a nanowire including a single crystalline or polycrystalline diamond material on the substrate and connected to each of the first contact and the second contact.
Inventors:
; ; ; ;
Issue Date:
OSTI Identifier:
1160137
Assignee:
Sandia Corporation (Albuquerque, NM) SNL-A
Patent Number(s):
8,852,998
Application Number:
13/598,152
Contract Number:
AC04-94AL85000
Resource Relation:
Patent File Date: 2012 Aug 29
Research Org:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
77 NANOSCIENCE AND NANOTECHNOLOGY

Other works cited in this record:

Diamond cold cathode
patent, September 1997

All diamond self-aligned thin film transistor
patent, July 2008

Fabrication of GaN-based nanoscale device structures utilizing focused ion beam induced Pt deposition
journal, July 2006
  • Motayed, Abhishek; Davydov, Albert V.; Vaudin, Mark D.
  • Journal of Applied Physics, Vol. 100, Issue 2, Article No. 024306
  • DOI: 10.1063/1.2215354

High-performance lithium battery anodes using silicon nanowires
journal, December 2007
  • Chan, Candace K.; Peng, Hailin; Liu, Gao
  • Nature Nanotechnology, Vol. 3, Issue 1, p. 31-35
  • DOI: 10.1038/nnano.2007.411

Self-consistent-charge density-functional tight-binding method for simulations of complex materials properties
journal, September 1998
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  • Physical Review B, Vol. 58, Issue 11, p. 7260-7268
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Efficient hybrid density functional calculations in solids: Assessment of the Heyd–Scuseria–Ernzerhof screened Coulomb hybrid functional
journal, July 2004
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  • The Journal of Chemical Physics, Vol. 121, Issue 3, p. 1187-1192
  • DOI: 10.1063/1.1760074

Cross-sectional transmission electron microscopy method and studies of implant damage in single crystal diamond
journal, July 2006
  • Hickey, D. P.; Kuryliw, E.; Siebein, K.
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 24, Issue 4, p. 1302-1307
  • DOI: 10.1116/1.2209659

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