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Title: Simple method to fabricate nano-porous diamond membranes

Abstract

A method to fabricate nanoporous diamond membranes and a nanoporous diamond membrane are provided. A silicon substrate is provided and an optical lithography is used to produce metal dots on the silicon substrate with a predefined spacing between the dots. Selective seeding of the silicon wafer with nanodiamond solution in water is performed followed by controlled lateral diamond film growth producing the nanoporous diamond membrane. Back etching of the under laying silicon is performed to open nanopores in the produced nanoporous diamond membrane.

Inventors:
Issue Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1531907
Patent Number(s):
8,673,164
Application Number:
13/248,074
Assignee:
UChicago Argonne, LLC (Chicago, IL)
DOE Contract Number:  
AC02-06CH11357
Resource Type:
Patent
Resource Relation:
Patent File Date: 2011-09-29
Country of Publication:
United States
Language:
English

Citation Formats

Sumant, Anirudha V. Simple method to fabricate nano-porous diamond membranes. United States: N. p., 2014. Web.
Sumant, Anirudha V. Simple method to fabricate nano-porous diamond membranes. United States.
Sumant, Anirudha V. Tue . "Simple method to fabricate nano-porous diamond membranes". United States. https://www.osti.gov/servlets/purl/1531907.
@article{osti_1531907,
title = {Simple method to fabricate nano-porous diamond membranes},
author = {Sumant, Anirudha V.},
abstractNote = {A method to fabricate nanoporous diamond membranes and a nanoporous diamond membrane are provided. A silicon substrate is provided and an optical lithography is used to produce metal dots on the silicon substrate with a predefined spacing between the dots. Selective seeding of the silicon wafer with nanodiamond solution in water is performed followed by controlled lateral diamond film growth producing the nanoporous diamond membrane. Back etching of the under laying silicon is performed to open nanopores in the produced nanoporous diamond membrane.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2014},
month = {3}
}

Patent:

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