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Cross-check of ex-situ and in-situ metrology of a bendable temperature stabilized KB mirror

Journal Article · · Nuclear Inst. and Methods in Physics Research, A
OSTI ID:991750
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At the Advanced Light Source (ALS), we are developing broadly applicable, high-accuracy, in-situ, at-wavelength wavefront slope measurement techniques for Kirkpatrick-Baez (KB) mirror nano-focusing. In this paper, we report an initial cross-check of ex-situ and in-situ metrology of a bendable temperature stabilized KB mirror. This cross-check provides a validation of the in-situ shearing interferometry currently under development at the ALS.
Research Organization:
Ernest Orlando Lawrence Berkeley National Laboratory, Berkeley, CA (US)
Sponsoring Organization:
Advanced Light Source Division
DOE Contract Number:
AC02-05CH11231
OSTI ID:
991750
Report Number(s):
LBNL-3972E
Journal Information:
Nuclear Inst. and Methods in Physics Research, A, Journal Name: Nuclear Inst. and Methods in Physics Research, A; ISSN NIMAER; ISSN 0168-9002
Country of Publication:
United States
Language:
English

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Related Subjects

47 OTHER INSTRUMENTATION
ADVANCED LIGHT SOURCE
INTERFEROMETRY
MIRRORS
VALIDATION
x-ray
synchrotron radiation
free electron laser
KB mirror
metrology
wavefront measurements
shearing interferometry
optical slope metrology
long trace profiler