Effect of critical dimension variation on SAW correlator energy.
Journal Article
·
· Proposed for publication in IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control.
OSTI ID:990013
The effect of critical dimension (CD) variation and metallization ratio on the efficiency of energy conversion of a surface acoustic wave (SAW) correlator is examined. We find that a 10% variation in the width of finger electrodes predicts only a 1% decrease in the efficiency of energy conversion. Furthermore, our model predicts that a metallization ratio of 0.74 represents an optimum value for energy extraction from the SAW by the interdigitated transducer (IDT).
- Research Organization:
- Sandia National Laboratories
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 990013
- Report Number(s):
- SAND2005-2289J
- Journal Information:
- Proposed for publication in IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control., Journal Name: Proposed for publication in IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. Journal Issue: 2 Vol. 53; ISSN 0885-3010
- Country of Publication:
- United States
- Language:
- English
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