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Resonant surface acoustic wave chemical detector

Patent ·
OSTI ID:1374544

Apparatus for chemical detection includes a pair of interdigitated transducers (IDTs) formed on a piezoelectric substrate. The apparatus includes a layer of adsorptive material deposited on a surface of the piezoelectric substrate between the IDTs, where each IDT is conformed, and is dimensioned in relation to an operating frequency and an acoustic velocity of the piezoelectric substrate, so as to function as a single-phase uni-directional transducer (SPUDT) at the operating frequency. Additionally, the apparatus includes the pair of IDTs is spaced apart along a propagation axis and mutually aligned relative to said propagation axis so as to define an acoustic cavity that is resonant to surface acoustic waves (SAWs) at the operating frequency, where a distance between each IDT of the pair of IDTs ranges from 100 wavelength of the operating frequency to 400 wavelength of the operating frequency.

Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
Assignee:
National Technology & Engineering Solutions of Sandia, LLC
Patent Number(s):
9,726,646
Application Number:
14/244,767
OSTI ID:
1374544
Country of Publication:
United States
Language:
English

References (7)

Analysis and Design of Low-Loss SAW Filters Using Single-Phase Unidirectional Transducers journal May 1987
SAW devices-sensitivity enhancement in going from 80 MHz to 1 GHz journal February 1998
High-frequency stability oscillator for surface acoustic wave gas sensor journal January 2009
High frequency SAW correlator module conference August 2003
High frequency SAW stabilized oscillators for chemical agents sensors journal February 2008
Surface acoustic wave sensors to detect volatile gases by measuring output phase shift journal December 2006
Optimized SAW chemical sensor with microfluidic packaging conference May 2012

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