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Title: Resonant surface acoustic wave chemical detector

Patent ·
OSTI ID:1374544

Apparatus for chemical detection includes a pair of interdigitated transducers (IDTs) formed on a piezoelectric substrate. The apparatus includes a layer of adsorptive material deposited on a surface of the piezoelectric substrate between the IDTs, where each IDT is conformed, and is dimensioned in relation to an operating frequency and an acoustic velocity of the piezoelectric substrate, so as to function as a single-phase uni-directional transducer (SPUDT) at the operating frequency. Additionally, the apparatus includes the pair of IDTs is spaced apart along a propagation axis and mutually aligned relative to said propagation axis so as to define an acoustic cavity that is resonant to surface acoustic waves (SAWs) at the operating frequency, where a distance between each IDT of the pair of IDTs ranges from 100 wavelength of the operating frequency to 400 wavelength of the operating frequency.

Research Organization:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
Assignee:
National Technology & Engineering Solutions of Sandia, LLC
Patent Number(s):
9,726,646
Application Number:
14/244,767
OSTI ID:
1374544
Resource Relation:
Patent File Date: 2014 Apr 03
Country of Publication:
United States
Language:
English

References (33)

Surface wave gas sensor patent June 1993
Chemical sensor utilizing a surface transverse wave device patent February 1994
Surface acoustic wave unidirectional transducer having floating electrodes patent April 1994
Surface acoustic wave device patent December 1997
Unidirectional surface acoustic wave filter patent November 1999
Unidirectional surface acoustic wave transducer and transversal-type saw filter having the same patent November 2000
Surface acoustic wave device comprising langasite single crystal substrate patent February 2001
Surface acoustic wave device and method of designing the same patent July 2001
Surface acoustic wave device comprising langasite single crystal substrate patent September 2001
Surface acoustic wave transducer using NSPUDT property substrate and surface acoustic wave filter using the transducer patent April 2002
Surface acoustic wave hydrogen sensor patent May 2006
Surface acoustic wave device patent July 2006
Simultaneous sample manipulation and sensing using surface acoustic waves patent February 2011
Spatial harmonic transducers for surface wave devices having reflectors patent-application November 2002
Interdigital converter with distibuted excitation patent-application July 2003
Single phase unidirectional surface acoustic wave transducer and improved reflectors patent-application May 2005
Bulk acoustic wave crystal controlled clock with surface acoustic wave filter multiplier patent-application June 2006
Elastic wave filter patent-application April 2009
Fluid Actuator, and Heat Generating Device and Analysis Device Using the Same patent-application December 2009
Elastic wave filter patent-application April 2010
Elastic wave device and electronic component patent-application September 2010
Surface Acoustic Wave Element and Equipment for Measuring Characteristics of Liquid Material patent-application September 2010
Synchronous One-Pole Surface Acoustic Wave Resonator patent-application March 2012
Single-input multi-output surface acoustic wave device patent-application May 2012
Broadband SAW Filter patent-application December 2013
Saw filter with improved stop band suppression patent-application August 2015
Optimized SAW chemical sensor with microfluidic packaging conference May 2012
High frequency SAW correlator module conference August 2003
SAW devices-sensitivity enhancement in going from 80 MHz to 1 GHz journal February 1998
Analysis and Design of Low-Loss SAW Filters Using Single-Phase Unidirectional Transducers journal May 1987
High-frequency stability oscillator for surface acoustic wave gas sensor journal January 2009
High frequency SAW stabilized oscillators for chemical agents sensors journal February 2008
Surface acoustic wave sensors to detect volatile gases by measuring output phase shift journal December 2006

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