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Conducting metal oxides integrated with the surface acoustic wave (SAW) sensor platform

Patent ·
OSTI ID:1823840
; ;

One or more embodiments relates a single port surface acoustic wave sensor (SAW) device adapted for use in a wide range of operational temperatures and gas phase chemical species. The device includes a piezoelectric crystal substrate; at least one interdigitated electrode/transducer (IDT) positioned on the piezoelectric crystal substrate; and at least one conducting metal oxide film positioned on the piezoelectric crystal substrate and in communication with at least the IDT.

Research Organization:
US Dept. of Energy, Washington, DC (United States)
Sponsoring Organization:
USDOE
Assignee:
U.S. Department of Energy (Washington, DC)
Patent Number(s):
10,976,287
Application Number:
16/203,533
OSTI ID:
1823840
Country of Publication:
United States
Language:
English

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