Investigation of statistical variation of the characteristics of SAW devices due to random fabrication errors
Journal Article
·
· IEEE Trans. Sonics Ultrason.; (United States)
The variation of the transfer functions of surface acoustic wave (SAW) interdigital transducers as functions of the statistical errors associated with artwork, the production of photo masks, and other fabrication steps is studied analytically and numerically. Statistical calculations are performed to determine the effects of random variations of width of the metallic stripes and spacing between stripes on the reflection characteristics of SAW reflectors, insertion loss, and Q of SAW resonators. As expected, the tolerance criterion for resonators is much more stringent than that for reflectors and interdigital transducers. 13 refs.
- Research Organization:
- Purdue Univ, West Lafayette, Indiana, USA
- OSTI ID:
- 5452671
- Journal Information:
- IEEE Trans. Sonics Ultrason.; (United States), Journal Name: IEEE Trans. Sonics Ultrason.; (United States) Vol. SU-29:1; ISSN IESUA
- Country of Publication:
- United States
- Language:
- English
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