Aberration Measurement using the Ronchigram Contrast Transfer Function

Journal Article · Fri Jan 01 04:00:00 EST 2010 · Ultramicroscopy

DOI:https://doi.org/10.1016/j.ultramic.2010.04.006· OSTI ID:983558

Lupini, Andrew R ^[1]; Wang, Peng ^[2]; Nellist, Peter D. ^[3]; Kirkland, Angus I. ^[2]; Pennycook, Stephen J ^[1]

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1. ORNL
2. University of Oxford
3. Nion Company, WA

The bright field contrast transfer function is one of the most useful concepts in conventional transmission electron microscopy. However, the electron Ronchigram contrast transfer function, as derived by Cowley, is inherently more complicated since it is not isoplanatic. Here, we derive a local contrast transfer function for small patches in a Ronchigram and demonstrate its utility for the direct measurement of aberrations from single Ronchigrams of an amorphous film. We describe the measurement of aberrations from both simulated and experimental images and elucidate the effects due to higherorder aberrations, separating those arising from the pre- and post-sample optics, and partial coherence.

• Research Organization: Oak Ridge National Laboratory (ORNL)
• Sponsoring Organization: SC USDOE - Office of Science (SC)
• DOE Contract Number: AC05-00OR22725
• OSTI ID: 983558
• Journal Information: Ultramicroscopy, Journal Name: Ultramicroscopy Journal Issue: 7 Vol. 110; ISSN 0304-3991
• Country of Publication: United States
• Language: English

Related Subjects

47 OTHER INSTRUMENTATION
BEAM OPTICS
ELECTRONS
TRANSFER FUNCTIONS
TRANSMISSION ELECTRON MICROSCOPY