Controlled incorporation of mid-to-high Z transition metals in CVD diamond

Biener, M M; Biener, J; Kucheyev, S O; Wang, Y M; El-Dasher, B; Teslich, N E; Hamza, A V; Obloh, H; Mueller-Sebert, W; Wolfer, M; Fuchs, T; Grimm, M; Kriele, A; Wild, C

doi:10.1016/j.diamond.2010.02.017

Controlled incorporation of mid-to-high Z transition metals in CVD diamond

Journal Article · Fri Jan 08 04:00:00 EST 2010 · Diamond and related materials, vol. 19, no. 5-6, February 22, 2010, pp. 643?647

DOI:https://doi.org/10.1016/j.diamond.2010.02.017· OSTI ID:978419

Biener, M M; Biener, J; Kucheyev, S O; Wang, Y M; El-Dasher, B; Teslich, N E; Hamza, A V; Obloh, H; Mueller-Sebert, W; Wolfer, M; Fuchs, T; Grimm, M; Kriele, A; Wild, C

We report on a general method to fabricate transition metal related defects in diamond. Controlled incorporation of Mo and W in synthetic CVD diamond was achieved by adding volatile metal precursors to the diamond chemical vapor deposition (CVD) growth process. Effects of deposition temperature, grain structure and precursor exposure on the doping level were systematically studied, and doping levels of up to 0.25 at.% have been achieved. The metal atoms are uniformly distributed throughout the diamond grains without any indication of inclusion formation. These results are discussed in context of the kinetically controlled growth process of CVD diamond.

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Research Organization:: Lawrence Livermore National Laboratory (LLNL), Livermore, CA

Sponsoring Organization:: USDOE

DOE Contract Number:: W-7405-ENG-48

OSTI ID:: 978419

Report Number(s):: LLNL-JRNL-422323

Journal Information:: Diamond and related materials, vol. 19, no. 5-6, February 22, 2010, pp. 643?647, Journal Name: Diamond and related materials, vol. 19, no. 5-6, February 22, 2010, pp. 643?647 Journal Issue: 5-6 Vol. 19

Country of Publication:: United States

Language:: English

References (34)

The deposition of diamond films by filament techniques Jansen, F.; Machonkin, M. A.; Kuhman, D. E. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 8, Issue 5 https://doi.org/10.1116/1.576494	journal	September 1990
APPLIED PHYSICS: Diamond for Quantum Computing Prawer, S.; Greentree, A. D. Science, Vol. 320, Issue 5883 https://doi.org/10.1126/science.1158340	journal	June 2008
Effect of nitrogen and oxygen addition on morphology and texture of diamond films (from polycrystalline to nanocrystalline) Tang, C. J.; Neves, A. J.; Pereira, S. Diamond and Related Materials, Vol. 17, Issue 1 https://doi.org/10.1016/j.diamond.2007.10.022	journal	January 2008
Shock-Wave Exploration of the High-Pressure Phases of Carbon Knudson, M. D.; Desjarlais, M. P.; Dolan, D. H. Science, Vol. 322, Issue 5909 https://doi.org/10.1126/science.1165278	journal	December 2008
Tungsten incorporation in diamond thin films prepared by the hotfilament technique Gheeraert, E.; Deneuville, A.; Brunel, M. Diamond and Related Materials, Vol. 1, Issue 5-6 https://doi.org/10.1016/0925-9635(92)90153-F	journal	April 1992
Detection of residual molybdenum impurity in CVD diamond Kromka, A.; Kravetz, R.; Poruba, A. physica status solidi (a), Vol. 199, Issue 1 https://doi.org/10.1002/pssa.200303815	journal	September 2003
Fe and Ni impurities in synthetic diamond Meng, Yue; Newville, Matthew; Sutton, Steve American Mineralogist, Vol. 88, Issue 10 https://doi.org/10.2138/am-2003-1018	journal	October 2003
Optical and electrical characterization of boron-doped diamond films Locher, R.; Wagner, J.; Fuchs, F. Diamond and Related Materials, Vol. 4, Issue 5-6, p. 678-683 https://doi.org/10.1016/0925-9635(94)05297-2	journal	May 1995
Band gap states of interstitial nickel-complexes in diamond Larico, R.; Justo, J. F.; Machado, W. V. M. Physica B: Condensed Matter, Vol. 376-377 https://doi.org/10.1016/j.physb.2005.12.075	journal	April 2006
Monitoring the quality of diamond films using Raman spectra excited at 514.5 nm and 633 nm Sails, Stephanie R.; Gardiner, Derek J.; Bowden, Michael Diamond and Related Materials, Vol. 5, Issue 6-8 https://doi.org/10.1016/0925-9635(96)90031-X	journal	May 1996
Diamond Ablators for Inertial Confinement Fusion Biener, Juergen; Mirkarimi, Paul B.; Tringe, Joseph W. Fusion Science and Technology, Vol. 49, Issue 4 https://doi.org/10.13182/FST49-737	journal	May 2006
High-sensitivity diamond magnetometer with nanoscale resolution Taylor, J. M.; Cappellaro, P.; Childress, L. Nature Physics, Vol. 4, Issue 10 https://doi.org/10.1038/nphys1075	journal	September 2008
Conventional n-type doping in diamond: state of the art and recent progress Nesladek, Milos Semiconductor Science and Technology, Vol. 20, Issue 2 https://doi.org/10.1088/0268-1242/20/2/R01	journal	January 2005
Quantitative investigation of boron incorporation in polycrystalline CVD diamond films by SIMS Kolber, T.; Piplits, K.; Haubner, R. Fresenius' Journal of Analytical Chemistry, Vol. 365, Issue 8 https://doi.org/10.1007/s002160051537	journal	December 1999
Processing and properties of (Mo,Cr) oxycarbides from MOCVD Wei, Wen-Cheng J.; Lo, Ming-Hung Applied Organometallic Chemistry, Vol. 12, Issue 3 https://doi.org/10.1002/(SICI)1099-0739(199803)12:3<201::AID-AOC692>3.0.CO;2-T	journal	March 1998
Static Vapor Pressure Measurement of Low Volatility Precursors for Molecular Vapor Deposition Below Ambient Temperature Ohta, T.; Cicoira, F.; Doppelt, P. Chemical Vapor Deposition, Vol. 7, Issue 1 https://doi.org/10.1002/1521-3862(200101)7:1<33::AID-CVDE33>3.0.CO;2-Y	journal	January 2001
Algorithms for the rapid simulation of Rutherford backscattering spectra Doolittle, Lawrence R. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 9, Issue 3 https://doi.org/10.1016/0168-583X(85)90762-1	journal	June 1985
National Ignition Facility target design and fabrication Cook, R. C.; Kozioziemski, B. J.; Nikroo, A. Laser and Particle Beams, Vol. 26, Issue 3 https://doi.org/10.1017/S0263034608000499	journal	August 2008
Characterization of tantalum impurities in hot-filament diamond layers Griesser, M.; Stingeder, G.; Grasserbauer, M. Diamond and Related Materials, Vol. 3, Issue 4-6 https://doi.org/10.1016/0925-9635(94)90240-2	journal	April 1994
Comparison of sulfur, boron, nitrogen and phosphorus additions during low-pressure diamond deposition Haubner, R. Diamond and Related Materials, Vol. 14, Issue 3-7 https://doi.org/10.1016/j.diamond.2004.12.060	journal	March 2005
Diamond spheres for inertial confinement fusion Biener, J.; Ho, D. D.; Wild, C. Nuclear Fusion, Vol. 49, Issue 11 https://doi.org/10.1088/0029-5515/49/11/112001	journal	September 2009
Filament metal contamination and Raman spectra of hot filament chemical vapor deposited diamond films Mehta Menon, P.; Edwards, A.; Feigerle, C. S. Diamond and Related Materials, Vol. 8, Issue 1 https://doi.org/10.1016/S0925-9635(98)00444-0	journal	January 1999
A highly efficient two level diamond based single photon source Simpson, D. A.; Ampem-Lassen, E.; Gibson, B. C. Applied Physics Letters, Vol. 94, Issue 20 https://doi.org/10.1063/1.3141450	journal	May 2009
Characterisation and lattice location of nitrogen and boron in homoepitaxial CVD diamond Samlenski, R.; Haug, C.; Brenn, R. Diamond and Related Materials, Vol. 5, Issue 9 https://doi.org/10.1016/0925-9635(95)00471-8	journal	July 1996
Torsion effusion vapor pressure determinations of Os, Rh, Ru, W, Co, and Cr solid carbonyls Chandra, Dhanesh; Lau, K. H.; Chien, Wen-Ming Journal of Physics and Chemistry of Solids, Vol. 66, Issue 2-4 https://doi.org/10.1016/j.jpcs.2004.10.001	journal	February 2005
Interaction of hydrogen, methane, ethylene, and cyclopentane with hot tungsten: Implications for the growth of diamond films Winters, Harold F.; Seki, Hajime; Rye, Robert R. Journal of Applied Physics, Vol. 76, Issue 2 https://doi.org/10.1063/1.357852	journal	July 1994
Low-temperature magnetoresistance study of electrical transport in N- and B-doped ultrananocrystalline and nanocrystalline diamond films Nesladek, M.; Tromson, D.; Bergonzo, P. Diamond and Related Materials, Vol. 15, Issue 4-8 https://doi.org/10.1016/j.diamond.2005.11.001	journal	April 2006
Characterization of diamond films by Raman spectroscopy Knight, Diane S.; White, William B. Journal of Materials Research, Vol. 4, Issue 2 https://doi.org/10.1557/JMR.1989.0385	journal	April 1989
Novel microwave plasma reactor for diamond synthesis Füner, M.; Wild, C.; Koidl, P. Applied Physics Letters, Vol. 72, Issue 10 https://doi.org/10.1063/1.120997	journal	March 1998
EPR study of the peculiarities of incorporating transition metal ions into the diamond structure Nadolinny, V. A.; Baker, J. M.; Yuryeva, O. P. Applied Magnetic Resonance, Vol. 28, Issue 3-4 https://doi.org/10.1007/BF03166768	journal	September 2005
Fabrication of single nickel-nitrogen defects in diamond by chemical vapor deposition Rabeau, J. R.; Chin, Y. L.; Prawer, S. Applied Physics Letters, Vol. 86, Issue 13 https://doi.org/10.1063/1.1896088	journal	March 2005
Spectroscopy of defects and transition metals in diamond Collins, A. T. Diamond and Related Materials, Vol. 9, Issue 3-6 https://doi.org/10.1016/S0925-9635(99)00314-3	journal	April 2000
Analysis of contamination in diamond films by secondary ion mass spectroscopy Cifre, J.; Lopez, F.; Morenza, J. L. Diamond and Related Materials, Vol. 1, Issue 5-6 https://doi.org/10.1016/0925-9635(92)90152-E	journal	April 1992
Resonance effects in Raman scattering from polycrystalline diamond films Wagner, J.; Wild, C.; Koidl, P. Applied Physics Letters, Vol. 59, Issue 7 https://doi.org/10.1063/1.105340	journal	August 1991

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Controlled incorporation of mid-to-high Z transition metals in CVD diamond

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