Formation of interconnections to microfluidic devices
Patent
·
OSTI ID:973154
- Los Lunas, NM
- Edgewood, NM
- Tijeras, NM
A method is disclosed to form external interconnections to a microfluidic device for coupling of a fluid or light or both into a microchannel of the device. This method can be used to form optical or fluidic interconnections to microchannels previously formed on a substrate, or to form both the interconnections and microchannels during the same process steps. The optical and fluidic interconnections are formed parallel to the plane of the substrate, and are fluid tight.
- Research Organization:
- Sandia National Laboratories (SNL-NM), Albuquerque, NM
- Sponsoring Organization:
- United States Department of Energy
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Number(s):
- 6,599,436
- Application Number:
- 10/016,956
- OSTI ID:
- 973154
- Country of Publication:
- United States
- Language:
- English
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