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Title: Surface-micromachined microfluidic devices

Abstract

Microfluidic devices are disclosed which can be manufactured using surface-micromachining. These devices utilize an electroosmotic force or an electromagnetic field to generate a flow of a fluid in a microchannel that is lined, at least in part, with silicon nitride. Additional electrodes can be provided within or about the microchannel for separating particular constituents in the fluid during the flow based on charge state or magnetic moment. The fluid can also be pressurized in the channel. The present invention has many different applications including electrokinetic pumping, chemical and biochemical analysis (e.g. based on electrophoresis or chromatography), conducting chemical reactions on a microscopic scale, and forming hydraulic actuators.

Inventors:
 [1];  [1];  [1];  [2];  [3];  [4];  [1];  [5];  [6]
  1. (Albuquerque, NM)
  2. (Redmond, WA)
  3. (Livermore, CA)
  4. (Cortlandt Manor, NY)
  5. (Hauppauge, NY)
  6. (Rio Rancho, NM)
Publication Date:
Research Org.:
SANDIA CORP
OSTI Identifier:
875124
Patent Number(s):
US 6537437
Assignee:
Sandia Corporation (Albuquerque, NM) SNL
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
surface-micromachined; microfluidic; devices; disclosed; manufactured; surface-micromachining; utilize; electroosmotic; force; electromagnetic; field; generate; flow; fluid; microchannel; lined; silicon; nitride; additional; electrodes; provided; separating; constituents; based; charge; magnetic; moment; pressurized; channel; applications; including; electrokinetic; pumping; chemical; biochemical; analysis; electrophoresis; chromatography; conducting; reactions; microscopic; scale; forming; hydraulic; actuators; magnetic field; silicon nitride; chemical reaction; chemical analysis; microfluidic devices; /204/

Citation Formats

Galambos, Paul C., Okandan, Murat, Montague, Stephen, Smith, James H., Paul, Phillip H., Krygowski, Thomas W., Allen, James J., Nichols, Christopher A., and Jakubczak, II, Jerome F. Surface-micromachined microfluidic devices. United States: N. p., 2003. Web.
Galambos, Paul C., Okandan, Murat, Montague, Stephen, Smith, James H., Paul, Phillip H., Krygowski, Thomas W., Allen, James J., Nichols, Christopher A., & Jakubczak, II, Jerome F. Surface-micromachined microfluidic devices. United States.
Galambos, Paul C., Okandan, Murat, Montague, Stephen, Smith, James H., Paul, Phillip H., Krygowski, Thomas W., Allen, James J., Nichols, Christopher A., and Jakubczak, II, Jerome F. Wed . "Surface-micromachined microfluidic devices". United States. https://www.osti.gov/servlets/purl/875124.
@article{osti_875124,
title = {Surface-micromachined microfluidic devices},
author = {Galambos, Paul C. and Okandan, Murat and Montague, Stephen and Smith, James H. and Paul, Phillip H. and Krygowski, Thomas W. and Allen, James J. and Nichols, Christopher A. and Jakubczak, II, Jerome F.},
abstractNote = {Microfluidic devices are disclosed which can be manufactured using surface-micromachining. These devices utilize an electroosmotic force or an electromagnetic field to generate a flow of a fluid in a microchannel that is lined, at least in part, with silicon nitride. Additional electrodes can be provided within or about the microchannel for separating particular constituents in the fluid during the flow based on charge state or magnetic moment. The fluid can also be pressurized in the channel. The present invention has many different applications including electrokinetic pumping, chemical and biochemical analysis (e.g. based on electrophoresis or chromatography), conducting chemical reactions on a microscopic scale, and forming hydraulic actuators.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Wed Jan 01 00:00:00 EST 2003},
month = {Wed Jan 01 00:00:00 EST 2003}
}

Patent:

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