Method for making electro-fluidic connections in microfluidic devices

Frye-Mason, Gregory C.; Martinez, David; Manginell, Ronald P.; Heller, Edwin J.; Chanchani, Rajen

Method for making electro-fluidic connections in microfluidic devices

Patent · Tue Aug 10 04:00:00 EDT 2004

OSTI ID:1174973

Frye-Mason, Gregory C.; Martinez, David; Manginell, Ronald P.; Heller, Edwin J.; Chanchani, Rajen

A method for forming electro-fluidic interconnections in microfluidic devices comprises forming an electrical connection between matching bond pads on a die containing an active electrical element and a microfluidic substrate and forming a fluidic seal ring that circumscribes the active electrical element and a fluidic feedthrough. Preferably, the electrical connection and the seal ring are formed in a single bonding step. The simple method is particularly useful for chemical microanalytical systems wherein a plurality of microanalytical components, such as a chemical preconcentrator, a gas chromatography column, and a surface acoustic wave detector, are fluidically interconnected on a hybrid microfluidic substrate having electrical connection to external support electronics.

Research Organization:: Sandia National Laboratories (SNL-CA), Livermore, CA (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: AC04-94AL85000

Assignee:: Sandia Corporation (Albuquerque, NM)

Patent Number(s):: 6,772,513

Application Number:: 10/184,782

OSTI ID:: 1174973

Country of Publication:: United States

Language:: English

References (4)

Novel interconnection technologies for integrated microfluidic systems Gray, B. L.; Jaeggi, D.; Mourlas, N. J. Sensors and Actuators A: Physical, Vol. 77, Issue 1 https://doi.org/10.1016/S0924-4247(99)00185-5	journal	September 1999
Micromachined chemical reaction system Koch, M.; Schabmueller, C. G. J.; Evans, A. G. R. Sensors and Actuators A: Physical, Vol. 74, Issue 1-3 https://doi.org/10.1016/S0924-4247(98)00318-5	journal	April 1999
Hand-Held Miniature Chemical Analysis System (μChemlab) for Detection of Trace Concentrations of Gas Phase Analytes Frye-Mason, Greg; Kottenstette, Rich; Lewis, Pat Micro Total Analysis Systems 2000 https://doi.org/10.1007/978-94-017-2264-3_53	book	January 2000
Gas sensing with acoustic devices Martin, S. J.; Frye, G. C.; Spates, J. J. 1996 IEEE Ultrasonics Symposium. Proceedings https://doi.org/10.1109/ULTSYM.1996.584005	conference	January 1996

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