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Surface-Micromachined Microfluidic Devices

Patent ·
OSTI ID:879924
 [1];  [1];  [1];  [2];  [3];  [4];  [1];  [5]
  1. Albuquerque, NM
  2. Redmond, WA
  3. Livermore, CA
  4. Coutlandt Manor, NY
  5. Hauppauge, NY
+ Show Author Affiliations

Microfluidic devices are disclosed which can be manufactured using surface-micromachining. These devices utilize an electroosmotic force or an electromagnetic field to generate a flow of a fluid in a microchannel that is lined, at least in part, with silicon nitride. Additional electrodes can be provided within or about the microchannel for separating particular constituents in the fluid during the flow based on charge state or magnetic moment. The fluid can also be pressurized in the channel. The present invention has many different applications including electrokinetic pumping, chemical and biochemical analysis (e.g. based on electrophoresis or chromatography), conducting chemical reactions on a microscopic scale, and forming hydraulic actuators. Microfluidic devices are disclosed which can be manufactured using surface-micromachining. These devices utilize an electroosmotic force or an electromagnetic field to generate a flow of a fluid in a microchannel that is lined, at least in part, with silicon nitride. Additional electrodes can be provided within or about the microchannel for separating particular constituents in the fluid during the flow based on charge state or magnetic moment. The fluid can also be pressurized in the channel. The present invention has many different applications including electrokinetic pumping, chemical and biochemical analysis (e.g. based on electrophoresis or chromatography), conducting chemical reactions on a microscopic scale, and forming hydraulic actuators.

Research Organization:
Sandia Corporation
DOE Contract Number:
AC04-94AL85000
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Number(s):
US 6797187
Application Number:
10/351135
OSTI ID:
879924
Country of Publication:
United States
Language:
English

References (3)

The zeta potential of silicon nitride thin films journal March 1991
An AC magnetohydrodynamic micropump journal May 2000
Electrokinetic Generation of High Pressures using Porous Microstructures book January 1998

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