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Title: Surface-Micromachined Microfluidic Devices

Abstract

Microfluidic devices are disclosed which can be manufactured using surface-micromachining. These devices utilize an electroosmotic force or an electromagnetic field to generate a flow of a fluid in a microchannel that is lined, at least in part, with silicon nitride. Additional electrodes can be provided within or about the microchannel for separating particular constituents in the fluid during the flow based on charge state or magnetic moment. The fluid can also be pressurized in the channel. The present invention has many different applications including electrokinetic pumping, chemical and biochemical analysis (e.g. based on electrophoresis or chromatography), conducting chemical reactions on a microscopic scale, and forming hydraulic actuators. Microfluidic devices are disclosed which can be manufactured using surface-micromachining. These devices utilize an electroosmotic force or an electromagnetic field to generate a flow of a fluid in a microchannel that is lined, at least in part, with silicon nitride. Additional electrodes can be provided within or about the microchannel for separating particular constituents in the fluid during the flow based on charge state or magnetic moment. The fluid can also be pressurized in the channel. The present invention has many different applications including electrokinetic pumping, chemical and biochemical analysis (e.g. based onmore » electrophoresis or chromatography), conducting chemical reactions on a microscopic scale, and forming hydraulic actuators.« less

Inventors:
 [1];  [1];  [1];  [2];  [3];  [4];  [1];  [5]
  1. Albuquerque, NM
  2. Redmond, WA
  3. Livermore, CA
  4. Coutlandt Manor, NY
  5. Hauppauge, NY
Publication Date:
Research Org.:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
OSTI Identifier:
879924
Patent Number(s):
US 6797187
Application Number:
10/351135
Assignee:
Sandia Corporation (Albuquerque, NM)
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English

Citation Formats

Galambos, Paul C, Okandan, Murat, Montague, Stephen, Smith, James H, Paul, Phillip H, Krygowski, Thomas W, Allen, James J, Nichols, Christopher A, and Jakubczak, II, Jerome F. Surface-Micromachined Microfluidic Devices. United States: N. p., 2004. Web.
Galambos, Paul C, Okandan, Murat, Montague, Stephen, Smith, James H, Paul, Phillip H, Krygowski, Thomas W, Allen, James J, Nichols, Christopher A, & Jakubczak, II, Jerome F. Surface-Micromachined Microfluidic Devices. United States.
Galambos, Paul C, Okandan, Murat, Montague, Stephen, Smith, James H, Paul, Phillip H, Krygowski, Thomas W, Allen, James J, Nichols, Christopher A, and Jakubczak, II, Jerome F. 2004. "Surface-Micromachined Microfluidic Devices". United States. https://www.osti.gov/servlets/purl/879924.
@article{osti_879924,
title = {Surface-Micromachined Microfluidic Devices},
author = {Galambos, Paul C and Okandan, Murat and Montague, Stephen and Smith, James H and Paul, Phillip H and Krygowski, Thomas W and Allen, James J and Nichols, Christopher A and Jakubczak, II, Jerome F.},
abstractNote = {Microfluidic devices are disclosed which can be manufactured using surface-micromachining. These devices utilize an electroosmotic force or an electromagnetic field to generate a flow of a fluid in a microchannel that is lined, at least in part, with silicon nitride. Additional electrodes can be provided within or about the microchannel for separating particular constituents in the fluid during the flow based on charge state or magnetic moment. The fluid can also be pressurized in the channel. The present invention has many different applications including electrokinetic pumping, chemical and biochemical analysis (e.g. based on electrophoresis or chromatography), conducting chemical reactions on a microscopic scale, and forming hydraulic actuators. Microfluidic devices are disclosed which can be manufactured using surface-micromachining. These devices utilize an electroosmotic force or an electromagnetic field to generate a flow of a fluid in a microchannel that is lined, at least in part, with silicon nitride. Additional electrodes can be provided within or about the microchannel for separating particular constituents in the fluid during the flow based on charge state or magnetic moment. The fluid can also be pressurized in the channel. The present invention has many different applications including electrokinetic pumping, chemical and biochemical analysis (e.g. based on electrophoresis or chromatography), conducting chemical reactions on a microscopic scale, and forming hydraulic actuators.},
doi = {},
url = {https://www.osti.gov/biblio/879924}, journal = {},
number = ,
volume = ,
place = {United States},
year = {2004},
month = {9}
}

Works referenced in this record:

The zeta potential of silicon nitride thin films
journal, March 1991


An AC magnetohydrodynamic micropump
journal, May 2000