Silicone oil contamination and electrical contact resistance degradation of low-force gold contacts.
Journal Article
·
· Proposed for publication in the IEEE Journal of Microelectromechanical Systems.
OSTI ID:951701
Hot-switched low-force gold electrical contact testing was performed using a nanomechanical test apparatus to ascertain the sensitivity of simulated microelectromechanical systems (MEMS) contact to silicone oil contamination. The observed cyclic contact resistance degradation was dependent on both closure rate and noncontact applied voltage. The decomposition of silicone oil from electrical arcing was hypothesized as the degradation mechanism.
- Research Organization:
- Sandia National Laboratories
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 951701
- Report Number(s):
- SAND2006-1028J
- Journal Information:
- Proposed for publication in the IEEE Journal of Microelectromechanical Systems., Journal Name: Proposed for publication in the IEEE Journal of Microelectromechanical Systems.
- Country of Publication:
- United States
- Language:
- English
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