Micro environmental sensing device

Patent · Tue May 02 00:00:00 EDT 2006

OSTI ID:908516

Polosky, Marc A ^[1]; Lukens, Laurance L ^[1]

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1. Tijeras, NM

A microelectromechanical (MEM) acceleration switch is disclosed which includes a proof mass flexibly connected to a substrate, with the proof mass being moveable in a direction substantially perpendicular to the substrate in response to a sensed acceleration. An electrode on the proof mass contacts one or more electrodes located below the proof mass to provide a switch closure in response to the sensed acceleration. Electrical latching of the switch in the closed position is possible with an optional latching electrode. The MEM acceleration switch, which has applications for use as an environmental sensing device, can be fabricated using micromachining.

• Research Organization: Sandia National Laboratories (SNL-NM), Albuquerque, NM
• Sponsoring Organization: United States Department of Energy
• DOE Contract Number: AC04-94AL85000
• Assignee: Sandia Corporation (Albuquerque, NM)
• Patent Number(s): 7,038,150
• OSTI ID: 908516
• Country of Publication: United States
• Language: English