Electrical contact resistance degradation of a hot-switched simulated metal MEMS contact.

Journal Article · Tue Mar 01 00:00:00 EST 2005 · Proposed for publication in Journal of Applied Physics.

OSTI ID:989377

Dugger, Michael Thomas

Electrical contact resistance testing was performed by hot-switching a simulated gold-platinum metal microelectromechanical systems contact. The experimental objective was to determine the sensitivity of the contact resistance degradation to current level and environment. The contact resistance increased sharply after 100 hot-switched cycles in air. Hot-switching at a reduced current and in nitrogen atmosphere curtailed contact resistance degradation by several orders of magnitude. The mechanism responsible for the resistance degradation was found to be arc-induced decomposition of adsorbed surface contaminants.

• Research Organization: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
• Sponsoring Organization: USDOE
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 989377
• Report Number(s): SAND2005-1693J; TRN: US201019%%473
• Journal Information: Proposed for publication in Journal of Applied Physics., Vol. 30, Issue 1; ISSN 1521-3331
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
AIR
NITROGEN
SENSITIVITY
TESTING