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Contour mode resonators with acoustic reflectors

Patent ·
OSTI ID:941136
 [1];  [1];  [1]
  1. Albuquerque, NM
+ Show Author Affiliations
A microelectromechanical (MEM) resonator is disclosed which has a linear or ring-shaped acoustic resonator suspended above a substrate by an acoustic reflector. The acoustic resonator can be formed with a piezoelectric material (e.g. aluminum nitride, zinc oxide or PZT), or using an electrostatically-actuated material. The acoustic reflector (also termed an acoustic mirror) uses alternating sections of a relatively low acoustic impedance Z.sub.L material and a relatively high acoustic impedance Z.sub.H material to isolate the acoustic resonator from the substrate. The MEM resonator, which can be formed on a silicon substrate with conventional CMOS circuitry, has applications for forming oscillators, rf filters, and acoustic sensors.
Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM
Sponsoring Organization:
United States Department of Energy
DOE Contract Number:
AC04-94AL85000
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Number(s):
7,385,334
Application Number:
11/602,011
OSTI ID:
941136
Country of Publication:
United States
Language:
English

References (6)

Vibrating micromechanical resonators with solid dielectric capacitive transducer gaps conference August 2005
Low motional resistance ring-shaped contour-mode aluminum nitride piezoelectric micromeckanical resonators for UHF applications conference January 2005
Design of a high-Q, low-impedance, GHz-range piezoelectric mems resonator
  • Antkowiak, B.; Gorman, J. P.; Varghese, M.
  • IEEE International Solid-State Sensors and Actuators Conference, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) https://doi.org/10.1109/SENSOR.2003.1215606
conference January 2003
Design of novel mechanical coupling for contour mode piezoelectric RF MEMS filters journal April 2006
Micromachined acoustic wave resonator isolated from substrate journal August 2005
Micromechanical "hollow-disk" ring resonators conference September 2004

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