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Title: Tensile-stressed microelectromechanical apparatus and micromirrors formed therefrom

Abstract

A microelectromechanical (MEM) apparatus is disclosed which includes one or more tensile-stressed actuators that are coupled through flexures to a stage on a substrate. The tensile-stressed actuators, which can be formed from tensile-stressed tungsten or silicon nitride, initially raise the stage above the substrate without any applied electrical voltage, and can then be used to control the height or tilt angle of the stage. An electrostatic actuator can also be used in combination with each tensile-stressed actuator. The MEM apparatus has applications for forming piston micromirrors or tiltable micromirrors and independently addressable arrays of such devices.

Inventors:
 [1]
  1. Albuquerque, NM
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
908436
Patent Number(s):
7,046,411
Application Number:
11/118,573
Assignee:
Sandia Corporation (Albuquerque, NM)
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Fleming, James G. Tensile-stressed microelectromechanical apparatus and micromirrors formed therefrom. United States: N. p., 2006. Web.
Fleming, James G. Tensile-stressed microelectromechanical apparatus and micromirrors formed therefrom. United States.
Fleming, James G. Tue . "Tensile-stressed microelectromechanical apparatus and micromirrors formed therefrom". United States. https://www.osti.gov/servlets/purl/908436.
@article{osti_908436,
title = {Tensile-stressed microelectromechanical apparatus and micromirrors formed therefrom},
author = {Fleming, James G},
abstractNote = {A microelectromechanical (MEM) apparatus is disclosed which includes one or more tensile-stressed actuators that are coupled through flexures to a stage on a substrate. The tensile-stressed actuators, which can be formed from tensile-stressed tungsten or silicon nitride, initially raise the stage above the substrate without any applied electrical voltage, and can then be used to control the height or tilt angle of the stage. An electrostatic actuator can also be used in combination with each tensile-stressed actuator. The MEM apparatus has applications for forming piston micromirrors or tiltable micromirrors and independently addressable arrays of such devices.},
doi = {},
url = {https://www.osti.gov/biblio/908436}, journal = {},
number = ,
volume = ,
place = {United States},
year = {2006},
month = {5}
}

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Works referenced in this record:

Stress relaxation in Si-rich silicon nitride thin films
journal, May 1998


Novel multi-user-MEMS-processes-compatible single-layer out-of-plane electrothermal actuator
journal, April 2003