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Title: Tensile-stressed microelectromechanical apparatus and tiltable micromirrors formed therefrom

Abstract

A microelectromechanical (MEM) apparatus is disclosed which includes a pair of tensile-stressed actuators suspending a platform above a substrate to tilt the platform relative to the substrate. A tensile stress built into the actuators initially tilts the platform when a sacrificial material used in fabrication of the MEM apparatus is removed. Further tilting of the platform can occur with a change in the ambient temperature about the MEM apparatus, or by applying a voltage to one or both of the tensile-stressed actuators. The MEM apparatus can be used to form a tiltable micromirror or an array of such devices, and also has applications for thermal management within satellites.

Inventors:
Publication Date:
Research Org.:
Sandia National Lab. (SNL-CA), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1176059
Patent Number(s):
7,159,397
Application Number:
11/146,811
Assignee:
Sandia Corporation
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Fleming, James G. Tensile-stressed microelectromechanical apparatus and tiltable micromirrors formed therefrom. United States: N. p., 2007. Web.
Fleming, James G. Tensile-stressed microelectromechanical apparatus and tiltable micromirrors formed therefrom. United States.
Fleming, James G. Tue . "Tensile-stressed microelectromechanical apparatus and tiltable micromirrors formed therefrom". United States. https://www.osti.gov/servlets/purl/1176059.
@article{osti_1176059,
title = {Tensile-stressed microelectromechanical apparatus and tiltable micromirrors formed therefrom},
author = {Fleming, James G.},
abstractNote = {A microelectromechanical (MEM) apparatus is disclosed which includes a pair of tensile-stressed actuators suspending a platform above a substrate to tilt the platform relative to the substrate. A tensile stress built into the actuators initially tilts the platform when a sacrificial material used in fabrication of the MEM apparatus is removed. Further tilting of the platform can occur with a change in the ambient temperature about the MEM apparatus, or by applying a voltage to one or both of the tensile-stressed actuators. The MEM apparatus can be used to form a tiltable micromirror or an array of such devices, and also has applications for thermal management within satellites.},
doi = {},
url = {https://www.osti.gov/biblio/1176059}, journal = {},
number = ,
volume = ,
place = {United States},
year = {2007},
month = {1}
}

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Works referenced in this record:

Stress relaxation in Si-rich silicon nitride thin films
journal, May 1998


Novel multi-user-MEMS-processes-compatible single-layer out-of-plane electrothermal actuator
journal, April 2003